1. Micro-mirror Supervisor: Prof. Kämper Team member: Chun Wa George Young Issis Contreras Ramanathan Swaminathan Spandan Shroff 14-11-2011 Micromechatronics System FH AACHEN UNIVERSITY OF APPLIED SCIENCES

2. PROJECT GOAL Design of an electrically controllable micromirror Implement the design to specific application Rotational motion Linear motion (Optional) Source: FhG-IPSM Micro scanning mirror Micro scanning mirror Rotational+ Translational

3. TASKS Sensors andActuators Study on Application of Micromirror Type of Micromirror Working principle of Micromirror Spectrometer Working principle Advantage of disadvantage compared to conventional solution Design on Spectrometer system Micromirror specification Micromirror system

4. APPLICATION Sensors andActuators Advantage of micromirror implementation over conventional solutions Small size Low cost, Fast response – filter unwanted wavelengths High signal to noise ratio Reduced complexity and low power consumption Source: FhG-IPSM

5. APPLICATION Sensors andActuators Confocal microscopy Application 3D biological imaging Advantages : Applicable to surface profilometry Scanning unit (Micromirror) moves the focused laser beam across specimen line by line Source: Carl Zeiss, Nikon

6. APPLICATION 3D Photonic switch Application Fibre optical communication Advantages : Low cost, more simple optical path (more than 32x32 array) Micromirror Static type with high pointing precision Source: GLIMMERGLASS

7. APPLICATION Sensors andActuators Spectrometer Application IR - Organic chemistry UV, Visible light - Concentration of solution quantitatively Advantages : Small size, High Speed Micromirror resonant type Source: Carl Zeiss, Acal BFi Germany GmbH

8. WORKING PRINCIPLE Source: FhG-IZM Monochromator In-plane diffraction grating Micromirror Principle Prism Diode Array

9. DIFFRACTION GRATING Monochromatic light d sina + d sinb = wavelength x m So leading to constructive interference

10. PATENT STUDY Source: Acton Research Czerny-Turner mount Turret system: Triple Grating in triangular arrangement Triple Grating Monochromator for ~121nm to IR

11. PORTABLE MONOCHROMATOR