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Detector Development with Industry Jan Visschers Nationaal Instituut voor Kernfysica en Hoge-Energie Fysica NIKHEF Amsterdam, The Netherlands email: janv@nikhef.nl
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© NIKHEF 2005 SAC NIKHEF 21 May 2005 2 Silicon Detector R&D at NIKHEF ATLAS Silicon Tracker LHCb Vertex tracker Medipix2 1.20 m
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© NIKHEF 2005 SAC NIKHEF 21 May 2005 3 Hybrid Pixels Direct Conversion (no scintillator) no CCDs no CMOS imagers but: Hybrid Pixel detectors Schematic of a hybrid pixel detector MediPix chip 14 x 14 mm 2 sensitive area periphery
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© NIKHEF 2005 SAC NIKHEF 21 May 2005 4 Medipix2 @ NIKHEF Medipix2 X-ray Imager Photon Counting V th min ~1000 e- ( ~4 keV) noise-free high dynamic range 14 x 14 mm 2 256 x 256 pixels 55 x 55 μm 2 pixel size ~ 1 Mhz per pixel ~ 100 frames per second
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© NIKHEF 2005 SAC NIKHEF 21 May 2005 5 Medipix Collaboration - Univ + INFN Cagliari - CEA-LIST Saclay - CERN Genève - Univ d'Auvergne - Univ Erlangen - ESRF Grenoble - Univ Freiburg - Univ Glasgow - IFAE Barcelona - Mitthoegskolan Sundsvall - MRC-LMB Cambridge - Univ + INFN Napoli - NIKHEF Amsterdam - Univ + INFN Pisa - FZU CAS Prague - IEAP CTU Prague - SSL Berkeley Spokespersons: Michael CAMPBELL CERN Jan VISSCHERS NIKHEF
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© NIKHEF 2005 SAC NIKHEF 21 May 2005 6 Plug and Play 90 Sr electron source 20 frames / second (software limited)
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© NIKHEF 2005 SAC NIKHEF 21 May 2005 7 Tests at ESRF synchrotron Michaela Mitschke anti-scatter slit badly adjusted X-ray pencil beam 10 x 10 μm, steps 5 μm perfect PSF Spectroscopy: 3 rd 4 th 5 th Harmonics
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© NIKHEF 2005 SAC NIKHEF 21 May 2005 8 Some Images mm 28 mm Flies @ 10 keV Leaf @ 5.9 keV Tungsten source 55 Fe source 14 14 mm
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© NIKHEF 2005 SAC NIKHEF 21 May 2005 9 Quad-chip module 2x4 chip carrier 2x2 sensor Swatch movie 19 keV Mb source 5 fps
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© NIKHEF 2005 SAC NIKHEF 21 May 2005 10 Photon/electron Imaging Industries
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© NIKHEF 2005 SAC NIKHEF 21 May 2005 11 PANalytical, Almelo XRF XRD SAX X-ray Detectors 2005: market introduction market introduction
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© NIKHEF 2005 SAC NIKHEF 21 May 2005 12 Advantages of Hybrid Detectors Mainstream CMOS Follow semiconductor technology innovation Follow semiconductor technology innovation Yield, Price/Performance, turn-around Yield, Price/Performance, turn-around Radiation Resistance Radiation Resistance Increasing pixel functionality 0.25 μm 33 x 10 6 transistors/chip 0.25 μm 33 x 10 6 transistors/chip 130 nm, 90 nm > 10 9 transistors/chip 130 nm, 90 nm > 10 9 transistors/chip Freedom of choice for the sensor Higher-Z materials GaAs, CdTe, CZT > 20 keV Higher-Z materials GaAs, CdTe, CZT > 20 keV Gas-avalanche chambers Gas-avalanche chambers Micro Channel Plate in vacuo Micro Channel Plate in vacuo } < 4 keV
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© NIKHEF 2005 SAC NIKHEF 21 May 2005 13 The Future through-via etching and wafer thinning courtesy IMEC Leuven
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© NIKHEF 2005 SAC NIKHEF 21 May 2005 14 Fully tiled X-ray imager pitch redistribution 3D-stacking Gbit/s serial readout
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© NIKHEF 2005 SAC NIKHEF 21 May 2005 15 4-Side Tiling: Through the Wafer 2 μm courtesy IMEC Leuven 2 µm wide trench with polySi filling, insulated with Oxide, 20 µm deep
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© NIKHEF 2005 SAC NIKHEF 21 May 2005 16 Gbit/s Readout Mpix2MXR20: simulations 500 MHz (?) 2 ms readout time (?) 250 frames/sec @ 50%
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© NIKHEF 2005 SAC NIKHEF 21 May 2005 17 TLK3101 TRANSCEIVER 2.5 Gbps to 3.125 Gbps On-Chip 8-Bit/10-Bit Encoding/Decoding Comma Alignment and Link Sync On-Chip PLL Clock Synthesis
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© NIKHEF 2005 SAC NIKHEF 21 May 2005 18 Next step: 130 nm Technology 1 mm 2 chip Serial Transmitter in 130 nm Multi-Project Wafer submit J.R. Schrader NIKHEF
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© NIKHEF 2005 SAC NIKHEF 21 May 2005 19 Next step: 130 nm Technology Chip Pseudo random generator (at 3.2 Gbps) Eye diagram TXRX Pre-emphasisTransmitter: now runs at 5 Gb/s BER < 10 -12 ~ 40 mW J.R. Schrader NIKHEF / UTwente 30 m RG58U
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© NIKHEF 2005 SAC NIKHEF 21 May 2005 20 Funding FOM: Projectruimte (2002, with MESA) STW: Project with FEI and Leiden EU-FP5+6: TMR 1999/ M.Curie2001/ IP (IdePhix) / STREP EZ: Senter/IWT/Eureka (with IMEC) FOM: Industrial Partnership Program (IPP) Industry: Technology Transfer (PANalytical) green: succesful yellow:failed red: targeted
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© NIKHEF 2005 SAC NIKHEF 21 May 2005 21 Conclusions Hybrid Pixels Detectors are Mature Tiling 2 x N chips is solved Tiling N x N chips will come soon Gbit/s IO will offer > kHz frame rates Next IC-Technology Nodes (130, 90 nm): more functionality per pixel … a Spectroscopic Imager ? a Spectroscopic Imager ?
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