1. ION PUMPS By: Nima Moghimian

2. Why pump? Why vacuum? What is a good vacuum?

3. Ultra High Vacuum (UHV) Ultra High Vacuum (UHV) Rough Vacuum Low Vacuum High Vacuum (HV) High Vacuum (HV) NO Vacuum Pa 1Pa = 7.5 x 10 -3 Torr What is a good vacuum?

4. Ultra High Vacuum (UHV) Ultra High Vacuum (UHV) Rough Vacuum Low Vacuum High Vacuum (HV) High Vacuum (HV) NO Vacuum Pa Rotary and Dry pumps Ion pumps Diffusion pumps Turbomolecular pumps Types of pumps

5. SEM pumps 10 5 Pa 10 -1 Pa 10 -4 Pa 10 -8 Pa

6. S S N N DC Power supply + _ Ion pump Ti anode

7. S S N N e e e DC Power supply ------------ ------------ + + + + + + + + + + + e e e + _ Ion pump

8. e e + + + + + + + + _ _ _ _ _ _ + + 1.Collision 2.Ionization 3.Sputtering 4.Condensation

9. S S N N DC Power supply + _ Chemisorption Electrical attraction

10. e e + + + + + + + + + + + + + + ________________ ________________ ________________ ________________ S S N N + + DC Power supply + _

11. Ion pump features No Oil No moving parts Only efficient at high vacuums

12. Questions