1. Modeling and Design Diaphragm Micropump
University of South Florida - March 17, 2008

2. Diaphragm micropump with passive check-valves
Destination
Inlet valve
Outlet valve
Pump chamber p1 p2 s 1 2 d
Diaphragm
Source
Valve discs z
Vdead
p2*
p1*
p(t) ΔV

3. Pump chamber: mathematical model

4. Pump chamber: Simulink model

5. Pump chamber: simulation results

6. Typical actuators

7. Thermopneumatic micropump

8. Diaphragm deflection

9. Temperature–deflection relationship

10. Temperature vs. deflection

11. Actuation chamber: math. model

12. Actuation chamber: Simulink model

13. Actuation chamber: simulation results
Experimental data

14. Thermopneumatic micropump: Simulink model

15. Thermopneumatic micropump: simulation results

16. PCB Thermopneumatic micropump

17. PCB design (boards 1 & 2) 1 2
TOP
BOTTOM

18. PCB design (boards 3 & 4) 3 4
TOP
BOTTOM

19. Pneumatic micropump

20. Pneumatic micropump: math. model

21. Pneumatic micropump: Simulink model

22. Pneumatic micropump: results

23. Pneumatic micropump: volume pumped per cycle vs. frequency

24. Pneumatic micropump: flow rate vs. frequency

25. Pneumatic micropump: flow rate vs. back pressure