1. NANO 225 Intro to Nano/Microfabrication
Other Characterization Techniques

2. Composition Analysis Wet Chemistry Techniques Physics Techniques
Liquid or Vapor Phase
Chromatography
Spectroscopy in UV-Vis region
Physics Techniques
Solid Phase
Inputs Particle (electrons) or X-rays
In Vacuum
Nano-friendly

3. X-ray Emission Spectroscopy
e- transition
e- beam in
Characteristic x-ray out
ejected electron
Energy Dispersive Spectroscopy (EDS)
Wavelength Dispersive Spectroscopy (WDS)

4. X-Ray Fluorescence Spectroscopy
e- transition
Characteristic x-ray out
x-ray in
ejected photoelectron

5. XRF Bulk analysis of elemental composition ~1mm beam diameter
ppm or ppb sensitivity
~1mm beam diameter
Quick quantitative analysis
Metals
Ceramics
Plastics
Thickness measurements
plating
coatings

6. Surface Chemical Analysis
Electron Spectroscopy for Chemical Analysis (ESCA) = X-ray Photoelectron Spectrometry (XPS)
Auger Electron Spectrometry
Secondary Ion Mass Spectrometry
photon or particle
emission

7. Electron Spectroscopy for Chemical Analysis (ESCA=XPS)
photoelectron out
Photoelectric effect
1906 Einstein
x-ray in

8. ESCA, XPS Electron escape depth (1-3nm) “surface analysis”
Chemical Shifts – identification of surface functions

9. ESCA Chemical Shifts
Example PET

10. Auger Electron Spectroscopy
e- transition
characteristic Auger electron
x-ray or electron in
characteristic x-ray re-absorbed
Surface analysis
Can use electrons or x-rays
Mostly electron beam
Scanning electron beams allow imaging as well
First derivative plots

11. Sputter Depth Profiling
Acquire spectrum
Sputter
Acquire
…….
Depth profile
auger
ESCA/XPS

12. Secondary Ion Mass Spectrometry
Atomic Billiards
Input: particles Ar+, Ga+, Cs+, C60
Output: atomic or molecular fragments

13. SIMS
Example PET .
                                                             

14. X-ray Diffraction
Bragg’s Law
nl=2dsin(q)

15. X-ray Diffraction
Data
Diffractogram
Camera images

16. X-ray Diffraction
Structure determination

17. Vibrational Spectroscopy for Organic Structure Characterization
Infrared Spectroscopy
IR absorption spectrum
Fourier Transform data collection (FT-IR)
Raman Spectroscopy
Raman effect
Laser (single l) excitation of vibration modes
near-IR, Vis, near-UV
Energy causes molecular vibrations (phonons)

18. Infrared Spectroscopy
Continuous IR light in
Absorption band out
hn1
hn1
hn2
hn2
hn3
hn3
hnx
hnn-1
hnn-1
hnn
hnn
Polar groups are active

19. Raman Spectroscopy Single wavelength in
Rayleigh and Raman scattered light out
hnx-n
hnx-2
hnx-3
hnx
hnx
hnx-(n-1)
hnx-n
Rayleigh: elastic
Raman: inelastic (Stokes / Antistokes)
Nonpolar groups are active

20. Infrared (Vibrational) Spectroscopy
Analysis of organic molecules or covalently bonded inorganics

21. Raman and IR Spectra
Example PET
Raman IR

22. Properties of Interest
Electrical
Mechanical
Optical
Thermal

23. Electrical Properties
Conductivity
s = enm
Hall effect
Mobility measurement
Capacitance – Voltage profile
Carrier concentrations

24. Electrical Properties
Dielectric constant (permittivity)
Dielectric strength
Magnetic permeability

25. Band Structure Valence and Conduction bands Optical spectroscopy
Optical gap in UV-Vis

26. Mechanical Properties
Tensile testing
Stress-strain curves
Stress=modulus · strain (Hooke’s Law)
Modulus

27. Nano-indentation Nanometer-scale stress-strain curves Load (mN)
Displacement (nm)

28. Thermal Properties Coefficient of thermal expansion Heat Capacity
b=1/V (DV/DT)
Heat Capacity
C = DQ/DT
Thermal conductivity
k= DQ/Dt (L/ADT)
Melting point
Crystallization point
Glass Transition

29. Optical Properties Index of refraction n = c/v Extinction coefficient
ellipsometry
Absorption and emission spectrum