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ESD SYSTEM OVERVIEW Sample Holder plate Bias Filament Cu Sample 1 2 B-A gaugeRGA Bias Sample Electrometer Butterfly valve Pumping group Conductance Gas.

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Presentation on theme: "ESD SYSTEM OVERVIEW Sample Holder plate Bias Filament Cu Sample 1 2 B-A gaugeRGA Bias Sample Electrometer Butterfly valve Pumping group Conductance Gas."— Presentation transcript:

1 ESD SYSTEM OVERVIEW Sample Holder plate Bias Filament Cu Sample 1 2 B-A gaugeRGA Bias Sample Electrometer Butterfly valve Pumping group Conductance Gas Injection Line Filament Filament Power Supply Transport rod Full Range Gauge

2 ESD SYSTEM OVERVIEW

3 Cu SAMPLES

4 Circuit A A V V +15 V 2-3 A 35 KV

5 Cu Samples main steps: Machining  Cleaning  Heat treatment  ESD

6 Bake – out: lower part 1 2 3 4 5 6/11 7 8 9 10

7 Bake – out: upper part 1B 2B 3B 4B

8 RGA scans

9 RGA scans (valve closed)

10 Degassing: 9 Cycles @ 0.35KV

11 Degassing: 9 Cycles @ 0.70KV

12 Degassing: 9 Cycles @ 1.5KV

13 Calibration: H 2 Calibration Factor

14 Calibration: N 2 Calibration Factor

15 Calibration: N 2 2 nd set of data Calibration Factor

16 Degassing: 30 Cycles @ 0.35 KV

17 CURRENT!!!!!

18 Desorption Yield

19 15 RGA Cycles for background Signal + biassing of the sample 15 RGA Cycles with the filament switched on filament + sample degassing

20 Desorption Yield switch on the filament 15 RGA Cycles for background pressure 15 RGA Cycles with the sample biased

21 Desorption Yield @ 0.35 KV

22 Desorption Yield @ 10 KV

23 N2 calibration

24 Energy correlation

25 Desorption Mechanisms

26

27 Stopping power and Range Kinetic energyStopping Power (MeV cm 2 /gr) MeVCollisionRadiativeTotal 1.00E-021.32E+011.21E-021.32E+01

28 Stopping power and Range Kinetic Energy MeV Range gr/cm2 Thickness cm 1.00E-02 4.601E-04 5.15E-05

29 Energy correlation

30

31 Circuit A A V V +15 V 2-3 A 35 KV

32 Extra-electron source Positive Polarization [KV] Current [μA] Negative Polarization [KV] Current [μA] 70-0.2-70.6 81.1-1.2-80.8 92.2-91.8 103.9-105 1530-15100

33 Degassing @ 5 KV

34 Improvements


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