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Published byHorace Maxwell Modified over 9 years ago
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ESD SYSTEM OVERVIEW Sample Holder plate Bias Filament Cu Sample 1 2 B-A gaugeRGA Bias Sample Electrometer Butterfly valve Pumping group Conductance Gas Injection Line Filament Filament Power Supply Transport rod Full Range Gauge
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ESD SYSTEM OVERVIEW
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Cu SAMPLES
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Circuit A A V V +15 V 2-3 A 35 KV
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Cu Samples main steps: Machining Cleaning Heat treatment ESD
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Bake – out: lower part 1 2 3 4 5 6/11 7 8 9 10
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Bake – out: upper part 1B 2B 3B 4B
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RGA scans
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RGA scans (valve closed)
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Degassing: 9 Cycles @ 0.35KV
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Degassing: 9 Cycles @ 0.70KV
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Degassing: 9 Cycles @ 1.5KV
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Calibration: H 2 Calibration Factor
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Calibration: N 2 Calibration Factor
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Calibration: N 2 2 nd set of data Calibration Factor
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Degassing: 30 Cycles @ 0.35 KV
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CURRENT!!!!!
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Desorption Yield
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15 RGA Cycles for background Signal + biassing of the sample 15 RGA Cycles with the filament switched on filament + sample degassing
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Desorption Yield switch on the filament 15 RGA Cycles for background pressure 15 RGA Cycles with the sample biased
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Desorption Yield @ 0.35 KV
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Desorption Yield @ 10 KV
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N2 calibration
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Energy correlation
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Desorption Mechanisms
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Stopping power and Range Kinetic energyStopping Power (MeV cm 2 /gr) MeVCollisionRadiativeTotal 1.00E-021.32E+011.21E-021.32E+01
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Stopping power and Range Kinetic Energy MeV Range gr/cm2 Thickness cm 1.00E-02 4.601E-04 5.15E-05
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Energy correlation
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Circuit A A V V +15 V 2-3 A 35 KV
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Extra-electron source Positive Polarization [KV] Current [μA] Negative Polarization [KV] Current [μA] 70-0.2-70.6 81.1-1.2-80.8 92.2-91.8 103.9-105 1530-15100
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Degassing @ 5 KV
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Improvements
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