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Published byJonathan Lindsey Modified over 9 years ago
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SEM- Schematic Overview
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Electron Detection
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Tungsten Filament Electron Source
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Filament Emission
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Field Emission Gun
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Magnetic Lenses
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Focusing Optics
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Effect of Working distance
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Effect of Condenser Lense
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Aberations to Minimum Spot Size
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Voltage and Atomic Number Effect on Backscatter Electrons
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Monte Carlo Simulation and Secondary Electron Generation
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Electron- Atom Interaction
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X-ray Emission
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X-ray Generation
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Characteristic X-rays Characteristic radiation intensity is proportional to the tube current and the difference between the accelerating voltage and the excitation voltage. n ~ 1.5
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X-ray Transitions
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Energy Spectrum for Pure Ni
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Auger Electron Spectroscopy
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Energy Versus Penetration
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SEM Operational Components
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Line Scan Process
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Pixel Element and Sample area Scanned
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Effect of Working Distance and Aperture on Depth of Focus ( in m)
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Electron Detector and Electron Sources
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Non Dispersive X-ray Detection
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Non Dispersive Detector
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Multichannel Analyzer
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Super Alloy X-ray Spectrum
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Peak Broadening Due to Resolution of Si Detector
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X-ray Energies 1-10 KeV
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Mid Energy K and L Spectra
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Bi M and Cu Spectra
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Common Interfering X-ray Lines
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EDS Spectra of Glass
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Wavelength Dispersive X-ray Detector
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X-ray Detection Gas Proportional CounterSingle Channel Pulse Height Detector
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Detector Output
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Wavelength Dispersive Spectra
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Comparison of EDS and WDS
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EDS Spectra of Glass
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WDS Spectra of High Z Glass
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Corrections to Measured X-ray Spectra
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X-ray Generation with Depth ( z)
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Absorption of X-rays Through Specimen
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Effect of Absorption on ( z)
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