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ELECTRONICS DEVICE ELCTRONICS DEVICE
Instructor : Prof. Dr. Ir. Djoko Hartanto, M.Sc. : Arief Udhiarto, M.T Source : U.C. Berkeley
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Schedule Lectures: K.301 Mon. 15:00-15.50 AM K.301 Wed. 13.00-14.50 AM
Electrical Engineering Department University of Indonesia
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Relation to Other Courses
Prerequisite: Simple pn-junction, BJT and MOSFET theory; BJT and MOSFET circuit applications. Familiarity with the Bohr atomic model Relation to other courses: Electronics Circuit Electrical Engineering Department University of Indonesia
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Reading Material Primary Text : References Text:
Semiconductor Device Fundamentals : R. F. Pierret (Addison Wesley, 1996) References Text: Solid State Electronic Devices 4th Edition: B. G. Stretman, S. Banerjee (Prentice Hall, 2000) Device Electronics for Integrated Circuits 3rd Edition: R. Muller, T. Kamins (Wiley & Sons, 2003) Electrical Engineering Department University of Indonesia
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SAP 1. Course : Electronics Device
2. Course Code : EES SKS: 4 Semester: 3 3. Instructor : Prof. Dr. Ir. Djoko Hartanto M.Sc. (DH) Arief Udhiarto, M.T (AU) 4. Class System : Single 5. Course’s Objective : mastering in basic concept of integrated circuit operation devices specially in silicon integrated circuits 6. Grading System (%) : Homework (10) , MT (35) , Seminar (15) , FT (40) Electrical Engineering Department University of Indonesia
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Miscellany Academic (dis)honesty Classroom etiquette:
Departmental policy will be strictly followed Collaboration (not cheating!) is encouraged Classroom etiquette: Arrive in class on time! Turn off cell phones, pagers, MP3/MP4 players, etc. No distracting conversations Ask question as much as possible Electrical Engineering Department University of Indonesia
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Pre Test What do you know about atom, electron, and hole?
What are the differences between conductor and semiconductor? What is majority carrier related to semiconductor! 10 Minutes only Electrical Engineering Department University of Indonesia
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Course Outline PN-Junction Diode Semiconductor Fundamentals;
Metal-Semiconductor Contact Bipolar Junction Transistor IC Processing (other subject) MOSFET Electrical Engineering Department University of Indonesia
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Overview of IC Devices and Semiconductor Fundamentals
Reading Assignment : Pierret Chap 1, Chap 2 Electrical Engineering Department University of Indonesia
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An IC consists of interconnected electronic components in a single piece ( chip ) of semiconductor material In 1959, Robert Noyce (Fairchild Semiconductor) demonstrated an IC made in silicon using SiO2 as the insulator and Al for the metallic interconnects. In 1958, Jack S. Kilby (Texas Instruments) showed that it was possible to fabricate a simple IC in germanium. Electrical Engineering Department University of Indonesia
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Evolution of Bipolar Junction Transistors
Point Contact BJT 1947 SiGe BJT 2000 Si Nanowire BJT 2003 Electrical Engineering Department University of Indonesia
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From a Few, to Billions By connecting a large number of components, each performing simple operations, an IC that performs very complex tasks can be built. The degree of integration has increased at an exponential pace over the past ~40 years. The number of devices on a chip doubles every ~18 months, for the same price. Electrical Engineering Department University of Indonesia
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Electrical Engineering Department University of Indonesia
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IC Technology Advancement
Improvements in IC performance and cost have been enabled by the steady miniaturization of the transistor Electrical Engineering Department University of Indonesia
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Advantages of Technology Scaling
• More dies per wafer, lower cost • Higher-speed devices and circuits Electrical Engineering Department University of Indonesia
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Today and Tomorrow Electrical Engineering Department University of Indonesia
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The Nanometer Size Scale
Electrical Engineering Department University of Indonesia
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State-of-the-art Transistor Size
1µm = 10-6m = 10-4 cm = 1000 nm 1 nm =10 Å Electrical Engineering Department University of Indonesia
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CZ Crystal Growth Electrical Engineering Department University of Indonesia
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Si Bulk Wafer Specifications Bulk Wafer Specifications
Electrical Engineering Department University of Indonesia
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Purity of Device Grade Si
% (so-called “eleven nines” ) Maximum impurity allowed is equivalent to 1 mg of sugar dissolved in an Olympic-size swimming pool. Electrical Engineering Department University of Indonesia
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Flatness deviation and particle sizes
Dimensions are equivalent to 1/1000 of a baseball placed inside a sports dome. Electrical Engineering Department University of Indonesia
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Crystallographic Planes
Electrical Engineering Department University of Indonesia
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Miller Indices Crystallographic Notation
h: inverse x-intercept k: inverse y-intercept l: inverse z-intercept (Intercept values are in multiples of the lattice constant; h, k and l are reduced to 3 integers having the same ratio.) Electrical Engineering Department University of Indonesia
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Crystallographic Planes and Si Wafers
Silicon wafers are usually cut along the (100) plane with a flat or notch to orient the wafer during IC fabrication Electrical Engineering Department University of Indonesia
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Bulk Si Wafer to IC Chip Electrical Engineering Department University of Indonesia
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Bohr Model Electrical Engineering Department University of Indonesia
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Electrical Engineering Department University of Indonesia
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Silicon Atom 1s, 2s, 2p orbitals filled by 10 electrons
4 nearest neighbors unit cell length = 5.43Å 5 × 1022 atoms/cm3 The Si Atom The Si Crystal “diamond cubic ” structure Electrical Engineering Department University of Indonesia
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Conduction Band and Valence Band
Electron Potential Energy Electrical Engineering Department University of Indonesia
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The Simplified Energy Band Diagram
Electrical Engineering Department University of Indonesia
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Semiconductors, Insulators, and Conductors
Totally filled band and totally empty bands do not allow current flow. (just as there is no motion of liquid in a totally filled or totally empty bottle Metal conduction band is half-filled Semiconductors have lower Eg’s than insulators and can be doped Electrical Engineering Department University of Indonesia
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Compound Semiconductors
“Zincblende Structure” III-V compound semiconductors : GaAs, GaP, GaN, etc. “important for optoelectronics and high speed ICs” Electrical Engineering Department University of Indonesia
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Density of States Electrical Engineering Department University of Indonesia
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Density of States at Conduction Band: The Greek Theater Analogy
Electrical Engineering Department University of Indonesia
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Concept of a “hole” An unoccupied electronic state in
the valence band is called a “hole” Treat as positively charge mobile particle in the semiconductors Electrical Engineering Department University of Indonesia
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Bond Model of Electrons and Holes
Electrical Engineering Department University of Indonesia
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Electrons and Holes Electrical Engineering Department University of Indonesia
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