1. CERN, 14-16 November 2005 Claudio Piemonte RD50 workshop Claudio Piemonte a, Maurizio Boscardin a, Alberto Pozza a, Sabina Ronchin a, Nicola Zorzi a, Gian-Franco Dalla Betta b, Luciano Bosisio c \ a ITC-irst, Microsystems Division, via Sommarive 18, 38050 Povo di Trento, Italy b University of Trento, DIT, Trento, Italy c Physics Department, University of Trieste and INFN, Trieste, Italy First electrical characterization of 3D detectors with electrodes of the same doping type

2. Claudio Piemonte RD50 workshop CERN, 14-16 November 2005 Single-Type Column 3D detector concept Fabrication of 3D-STC detectors Layout and preliminary electrical results Conclusions Outline

3. Claudio Piemonte RD50 workshop CERN, 14-16 November 2005 STC-3D detectors - concept (1) Sketch of the detector: grid-like bulk contact ionizing particle cross-section between two electrodes n+n+ n+n+ electrons are swept away by the transversal field holes drift in the central region and diffuse towards p+ contact n + -columns p-type substrate Adv. over standard 3D: etching and column doping performed only once Functioning: [C. Piemonte et al, Nucl. Instr. Meth. A 541 (2005)]

4. Claudio Piemonte RD50 workshop CERN, 14-16 November 2005 3DSTC detectors - concept (2) Further simplification: holes not etched all through the wafer p-type substrate n + electrodes Uniform p+ layer Bulk contact is provided by a backside uniform p+ implant single side process. No need of support wafer.

5. Claudio Piemonte RD50 workshop CERN, 14-16 November 2005 Potential distribution (vertical cross-section) Potential distribution (horizontal cross-section) null field regions 0V -10V -5V 50  m 300  m -15V Drawbacks: once full depletion is reached it is not possible to increase the electric field between the columns large low field region 3DSTC detectors - 3D simulations Both can be improved using higher substrate doping concentration

6. Claudio Piemonte RD50 workshop CERN, 14-16 November 2005 Fabrication process (1) n+ diffusion contact metal oxide hole MAIN STEPS: 1. Hole etching with Deep RIE machine (step performed at CNM, Barcelona, Spain) 2. n+ diffusion (column doping) 3. passivation of holes with oxide 4. contact opening 5. metallization 10  m Hole depth: 120μm CHOICES FOR THIS PRODUCTION: No hole filling (with polysilicon) Holes are not etched all through the wafer Bulk contact provided by a uniform p+ implant

7. Claudio Piemonte RD50 workshop CERN, 14-16 November 2005 Si High Resistivity, p-type, Surface isolation: p-stop p-spray FZ (500  m) resistivity > 5.0 k  cm Cz (300  m) resistivity > 1.8 k  cm Substrates used for this production: Sintering Standard @ 420˚C for FZ 380˚C for Cz to minimize thermal donor activation Fabrication process (2)

8. Claudio Piemonte RD50 workshop CERN, 14-16 November 2005 Mask layout Small version of strip detectors Planar and 3D test structures “Low density layout” to increase mechanical robustness of the wafer “Large” strip-like detectors

9. Claudio Piemonte RD50 workshop CERN, 14-16 November 2005 Planar test structures measurements Standard planar test structures Electrical parameters compatible with standard planar processes High variation due to different substrates Ileak measured below full depletion due to Vbreak 50 - 60

10. Claudio Piemonte RD50 workshop CERN, 14-16 November 2005 3D diode – layout: Different 3D-diode layouts: Different isolation geometry (p-stop) Different column connections Different inter-colum distances (ranging from 80μm to 100μm) Bulk Guard ring p-stop 10x10 holes matrix Single hole p-stop p-stop around the entire region

11. Claudio Piemonte RD50 workshop CERN, 14-16 November 2005 3D diode – IV measurements: Vback Guard ring (n+) p-spray Depletion region High field region diode ─ guard ring p-stop case diode ─ guard ring 1 st punch through 2 nd punch through diode ─ guard ring p-spray case Breakdown Vback Guard ring (n+) p-stops e - layer - Depletion region I leak = 0.68 ± 0.2 pA/column @ 20V I leak = 0.59 ± 0.12 pA/column @ 20V

12. Claudio Piemonte RD50 workshop CERN, 14-16 November 2005 3D diode – CV measurements (preliminary) (preliminary) Capacitance measurement versus back on a 300  m thick wafer with ~150  m deep columns, 100  m picth Back 1/C 2 0 2 4 6 8 10 12 0102030405060 V bias [V] C diode [pF] 0.00 0.50 1.00 1.50 2.00 2.50 0102030405060 V bias [V] C -2 [pF -2 ] 1 2 Phase 1 Phase 2 region between col. is not fully depleted  large capacitance full dep. between columns ~ 7V region between col. is fully depleted  depletion proceeds only towards the back (almost like a planar diode) full depletion ~40V depletion width of ~150  m CdCd 1/C d 2 [pF -2 ] C d [pF] f=10kHz

13. Claudio Piemonte RD50 workshop CERN, 14-16 November 2005 detectors - layout Strip detectors - layout metal p-stop hole Contact opening n+n+ Inner guard ring (bias line)

14. Claudio Piemonte RD50 workshop CERN, 14-16 November 2005 Two different p-stop layouts: Strip detectors – layout: Different strip-detector layouts: Number of columns ranging from 12000 to 15000 Inter-columns pitch 80-100  m Holes Ø 6 or 10  m Single p-stop for each hole Common p-stop for each strip Punch-through structures AC coupling: DC coupling: DC pads

15. Claudio Piemonte RD50 workshop CERN, 14-16 November 2005 Current distribution @ 40V of 70 different devices Good process yield Strip detectors – IV measurements: p-spray p-stop Bias line Guard ring Average leakage current per column < 1pA Number of columns per detector: 12000 - 15000 0 5 10 15 20 25 30 0 5 101520 253035 404550 >50 I bias line [nA] Detectors count Leakage current < 1pA/column in most of the detectors

16. Claudio Piemonte RD50 workshop CERN, 14-16 November 2005 Conclusion The first production has proved: The feasibility of 3D-stc detectors Low leakage currents (< 1pA/column) Breakdown @ 50V for p-spray and >100V for p-stop structures Good process yield (typical detector current < 1pA/column) Samples have been given to: Glasgow (UK): CCE measurements with  on 3D diodes SCIPP (USA): CCE measurements on large strips

17. Claudio Piemonte RD50 workshop CERN, 14-16 November 2005 3D-stc TCAD simulations Simulation of the electric field along a cut-line from the electrode to the center of the cell Na=1e12 1/cm 3 Na=5e12 1/cm 3 Na=1e13 1/cm 3 DRAWBACK: 3D-stc: once full depletion is reached it is not possible to increase the electric field between the columns Maximum electric field depends on substrate doping