1. Top Down Method Vacuum Applications in Nanomanufacturing Author’s Note: Significant portions of this work have been reproduced and/or adapted with permission from material created by the Maricopa Advanced Technology Education Center, part of the Academic Affairs Division, Maricopa Community College District.

2. Vacuum Applications in Nanomanufacturing Objectives –To demonstrate the use of vacuum in manufacturing processes –To quantify the need for vacuum conditions in each process –To define the levels of vacuum present in the process –To identify how these levels of vacuum are attained and measured

3. Vacuum in Lithography Process Objective of Process –Create temporary features on silicon wafer to guide etch and deposition processes –Role of Vacuum in Process Electron Beam Lithography –Exclude atmospheric gases from lithography chamber to avoid particle collisions with beam and loss of energy –Eliminate secondary emission from particles that were inadvertently “struck” through increased MFP –Extremely high vacuum level required (10-7 to 10-9 T)

4. Vacuum in Deposition Processes Objective of Process – Add new layers or substances to a defined region of a silicon wafer –Physical Vapor Deposition Sputtering Evaporation –Chemical Vapor Deposition LPCVD – Low Pressure Chemical Vapor Deposition PECVD – Plasma Enhanced CVD

5. Vacuum in Physical Deposition Sputtering –A target material is hit by a high energy ion beam of argon, dislodging particles of the species Pressures of 5 – 10 mTorr De-gas step at much higher vacuum (10 -9 T) may be used to remove oxide from target and drive off contaminants (vacuum provides a clean environment) –Vacuum is key to process as it minimizing gas molecule collisions (Mean Free Path is larger) so ions are created

6. Vacuum in Physical Deposition Thermal Evaporation –A material is heated to its melting point in a vacuum environment Pressures of 10 -3 Torr or lower may be required Dependent on vapor pressure of the metal being used –Vacuum environment lowers pressure in the chamber to allow vapors of the molten species to be escape and be deposited on the wafer surface

7. Vacuum in Chemical Deposition Chemical vapor deposition –LPCVD Low pressure CVD (0.1 – 1 Torr) Deposits oxides nitrides, or polysilicon Relatively high temperature process (>650 Deg C) –UHVCVD – Ultra high vacuum (10 -9 T) Extremely High vacuum eliminates contaminants from reaching surface –PECVD - Plasma Enhanced CVD Gas plasma used to control deposition rate –Not possible to create a plasma at higher pressures due to mean free path being too short –Electrons cannot gain enough energy without collision

8. Vacuum in The Etch Processes Objective –Remove material from a defined region of a silicon wafer –Physical Etching Sputtering – Similar to deposition, but the “target” is the wafer! Less common today, but a low pressure method (<50mTorr) A purely physical process where ions from introduced gas in RF powered chamber bombard the surface

9. Vacuum in Etch Process (2) Plasma Etching –Vacuum is used to remove atmospheric gases –Low pressure etchant gas such as CF 4 is introduced into chamber where RF stream is flowing –Gas breaks down into ions, electrons, and radicals –CF 4 dissasociates into CF 3 + and F radical, which attacks silicon causing etching(2)

10. Vacuum in Ion Implantation Ion Implantation –Used to create conductive species in silicon –Creates the source and drain areas for transistors and many other features –Ion beam of defined impurity is used –High Vacuum conditions are required to Ensure that no contaminant species exists Increase mean free path so no collisions in ion beam result

11. Vacuum Environments Creation of different vacuum levels requires different components –Pumping systems –Piping Measuring vacuum levels accurately requires different techniques –Gauge types –Physical Processes

12. Low or Rough Vacuum 760 Torr to a few Torr Medium VacuumA few Torr to 10 -3 Torr High Vacuum10 -3 to 10 -7 Torr Ultra-high Vacuum (UHV) Below 10 -7 Torr Ranges of Vacuum From Chamber, Fitch, and Halliday Basic Vacuum Technology, 2 nd edition, Institute of Physics Publishing, London

13. Vacuum Levels and Pumps

14. Pump Categories Pump s Gas Transfer Entrapment Momentum Transfer Drag Fluid Entrainment Turbo Molecular Positive Displacement Rotary Pumps Vane Lobe Piston Dry pumps Diffusion Water Jet Vapor Jet Cryogenic Cryosorption Sputter-Ion Sublimation From MATEC Module 101 Vacuum Pumps www.matec.org

15. Work Chamber Cryo Blower Rotary Vane Ion Gauge (Hi Vac) Thermocouple Gauge (TC) (Rough Vac) TC Gauge Rough Valve Soft Start Valve Foreline Valve Heater Purge Gas Valves Temperature Transducer Hi Vac Valve Exhaust Convectron Gauge (Rough line) N 2 rough line backfill Oil Trap N2 purge (vent) From MATEC Module 101 Complete Vacuum Chamber System

16. Pumpdown Sequence All valves are initially CLOSED Soft start valve OPENS Chamber pumps down for 60 seconds Soft start valve CLOSES Rough Valve OPENS Chamber pumps down to 100 mT Rough Valve CLOSES Hi Vac Valve OPENS Ion Gauge turns ON Chamber pumps down to base pressure Process begins at operating pressure From MATEC Module 101

17. Pumpdown Sequence Two different pump types are used –Rotary Vane type for rough vacuum Rotary vane pump is a positive displacement pump Prior to the rotary vane pump reaching its “ultimate pressure” (pressure at which its pumping speed goes to 0), the sequence shuts it off and the valve is closed to avoid backstreaming oil from the input. Crossover pressure is where this takes place –Cryo pump for high vacuum Cryo Pump is an entrapment type pump –Contaminant particles are captured on its inside walls through use of very low temperatures –Periodically Cryo pumps must be regenerated

18. How Can We Measure Vacuum? To ascertain the pressure level, gauges of different types are used –Direct gauges use pressure from the gas to deflect a needle or move a column of mercury or other liquid –Indirect gauges use principles of heat transfer or electrical changes that take place based on the number of gas molecules present –Both processes are gas type dependent

19. Vacuum Gauges –Direct Type Mechanical gauges such as the diaphragm gauge shown here are usable for rough vacuum. Pressure from the gas deflects the diaphragm

20. Vacuum Gauges - Indirect Indirect gauges such as the thermocouple gauge are usable for rough to medium vacuum levels where direct pressure is too low to mechanically deflect a gauge. From MATEC Module 99 www.matec.org

21. Vacuum Gauges - Indirect Ionization gauges are useful for high vacuum measurement. where direct pressure is too low to mechanically deflect a gauge. From MATEC Module 101

22. Typical Ranges of Gauges From MATEC Module 101

23. Sources and References (1)http://www.pfonline.com/articles/069901.ht mlhttp://www.pfonline.com/articles/069901.ht ml (2) SS 11.26 Introduction to Semiconductor Manufacturing, Hong Xaio, Prentice Hall, Upper Saddle River, NJ C 2001 Maricopa Advanced Technology Education Center Module 101 Narrative C(2006) (3) MATEC Module 74 Narrative – Etch (4) MATEC Module 26 PowerPoint