1. W E L C O M E

2. T R I G A T E T R A N S I S T O R

4. I N T R O D U C T I O N Transistors  Microscopic, silicon-based switches  Fundamental building block of all semiconductor chips.  With traditional planar transistors, electronic signals travel as if on a flat, one-way road.  Transistors shrink to less than 30 nanometers

5.  3-D structure  Runs faster,better perfomance  Reduces conventional transistor size  Reduces power dissipation  Increases battery life of mobile devices TRI GATE TRANSISTORS

6. H I S T O R Y  1950s- planar transistors acted as the basic building block of microprocessors.  2002 -Intel developed the world’s first CMOS tri-gate transistors.  Performance improved by integrating the tri-gate design with silicon process technology  Tri- gate transistors are expected to replace the nanometer transistors in the Intel microprocessors by 2012

7. A R C H I T E C T U R E  Built on an ultra-thin layer of fully depleted silicon  Raised source and drain structure  Compatible with the future introduction of a high K gate dielectric  Show excellent DIBL  Thickness requirement of the Si layer is also relaxed by about 2-3 times

8. A R C H I T E C T U R E

9. M O O R E ’ S L A W Moore's law describes a long-term trend in the history of computing hardware, in which the number of transistors that can be placed inexpensively on an integrated circuit has doubled approximately every two years.Moore's law 21st centuries precisely describes a driving force of technological and social change in the late 20th and early.

10. F A B R I C A T I O N

11. F A B R I C A T I O N D I A G R A M S

12. PERFORMANCE COMPARISON OF PLANAR AND TRI GATE TRANSISTOR

13.  Show excellent control of short channel effects (SCE)  Higher performance, in terms of drive current

19. A D V A N T A G E S  Lower leakage and consume much less power.  Faster & cooler operation.  45% increase in speed or 50x reduction in off- current.  The basic building blocks for future microprocessors.  Moore's Law scaling can be taken well into the next decade.

20. A P P L I C A T I O N S  Critical part of INTEL's energy efficient performance  Scaling of silicon transistors  Increase battery life of mobile devices

23. QUESTIONS & QUERIES ? ? ?