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Welcome to ChipMOS Quality Laboratory

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Presentation on theme: "Welcome to ChipMOS Quality Laboratory"— Presentation transcript:

1 Welcome to ChipMOS Quality Laboratory
Laboratory instrument introduction-----1:30~2:00 SAT instrument operation :00~3:00 COF defect sample inspection (OM/Decapsulation/SEM) :00~3:30 COF electrical measurement :30~4:00 COF mechanical test (die strength) --- 4:00~4:30

2 Failure Analysis Procedure
SAT Picture XRM Image SEM Photo LCM Photo Hot Spot (Defect)

3 Scanning Acoustic Tomograph Inspection
Die Surface Delamination Mode TSOPII 50L Die Crack Mode mBGA 70B 2 1

4 COF Defect Location and Decapsulation
COF (48mm) Peeling from tape after decapsulation Fuming Nitric Acid (100%) Room temperature 30mins Rinse by acetone

5 Optical Microscope (OM) Inspection after Decapsulation
50X Stereo OM 200X 500X

6 Scanning Electron Microscope (SEM) Inspection and
Energy Dispersive X-ray (EDX) Detection SEM

7 Electrical Measurement (COF/Chip)
Probe station Curve tracer I (mA) I (mA) I (mA) Short Pass Open V (v) V (v) V (v)

8 Mechanical Test (Die Strength)

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