1. For internal use only Ionizer Bar Type IZS40, IZS41, IZS42 Series IZS40 IZS41 IZS42

2. For internal use only 1-1. Features (1) The three series is available suitably for applications. IZS42: The potential amplitude width reduced type, which is suitable for a work piece susceptible to static electricity - The potential amplitude width is 80% reduction from the IZS31. - Ion discharge method: SMC original dual AC type IZS41: The standard type, which is equipped with feedback control and communication functions - Succeeding to the IZS31. The external feedback sensor enables fast deionization. - Ion discharge method: AC type IZS40: The simple type, which is specifically designed for deionization. - Simplified operations enable the ionizer to start by turning on a power. - Ion discharge method: AC type

3. For internal use only 1. Feature (1) (IZS42) The SMC original dual AC type ion discharge method reduces the potential amplitude to 25V. - Ions are discharged from adjacent electrodes with reverse polarities, which reduces the potential amplitude width 80% from the existing model (IZS31) when the ionizer is installed at 300mm in height. Positive ions and negative ions are simultaneously discharged, and reach on a work piece evenly. Potential amplitude V Time IZS42 Existing series Potential amplitude (installation height 300mm)

4. For internal use only 1. Feature (2)-1 (IZS41) The external feedback sensor enables fast deionization. The potential of a work piece is detected by the feedback sensor, and ions with the reverse polarity to the charge polarity are continuously discharged, which realizes faster deionization. Deionization time [s] Supply pressure: 0.1MPa, Frequency: 30Hz, High speed deionization cartridge (8.6L/min (ANR) / Cartridge) Feedback sensor installation height 25mm Without sensor With sensor Installation distance L [mm]

5. For internal use only Two operation modes are available after deionization is complete (within +/- 30 ion balance). The ion discharge is stopped to save the power consumption when deionization is complete. The operation is switched to the AC operation after deionization is complete. Deionization is continued aiming for 0V even after the ion balance falls within +/-30V. Potential Time When the ion balance comes within +/-30V, the pulse DC operation starts or stops. Ions with the reverse polarity to the charge polarity are discharged until the ion balance reaches +/-30V. 1. Feature (2)-2 (IZS41)

6. For internal use only 1. Features (3) (IZS41 and IZS42) Built-in auto balance sensor No need to install a sensor on the ionizer or externally. Ion balance (Image) Ion balance V Time (h) Control of ion balance Monitoring of positive and negative return currents Negative return current Positive return current

7. For internal use only 1. Features (4) (IZS41 and IZS42) Built-in auto balance sensor (externally mounted) The ion balance close to a work piece is detected accurately, and controlled along with the detection result. This way restricts possible variations of the ion balance due to the installation distance or other external turbulences. Two operation types are available. 1. Manual operation The ion balance is adjusted when the signal is input. 2. Automatic operation The ion balance continues to be adjusted during operation. Ion balance adjustment close to a work piece Work piece

8. For internal use only 1. Features (5) (IZS41 and IZS42) Remote controller It is possible to change the set values of multiple ionizers at a distance. The wireless type controller using infrared rays is applicable to a maximum communication distance of 5m. 1. Identification of a maximum of 16 ionizers by address settings 2. Setting of frequency 3. Ion balance adjustment 4. Built-in sensor ON/OFF 5. Selection of electrodes contamination alarm level (3 levels)

9. For internal use only 1. Features (6) (IZS41 and IZS42) Electrode contamination detecting function The contaminated electrode needle is detected, which results in the output of a maintenance signal. (Input signals are necessary for detecting electrode contamination.) Transition wiring cable The maximum connectable number of ionizers by the transition wiring cable is 8 for IZS31 and 5 for IZS42, but it depends on the power supply cable length, transition wiring cable length and external sensor. (Contact us when using the transition wiring cable.)

10. For internal use only Reference: Number for transition wiring

11. For internal use only The air sheath structure reduces electrode contamination The electrode material is selectable from tungsten and single crystal silicon. 1. Features (7) (Common) Air covers electrodes. Electrode

12. For internal use only 1. Features (8) (Common) Two types of cartridge are available. High speed deionization cartridgeEnergy saving deionization cartridge Two nozzles in the electrode cartridge to effectively discharge ions to a work piece and improve the deionization performance. One nozzle in the electrode cartridge to reduce air consumption.

13. For internal use only 1. Features (9) (Common) Safety function Excessive high voltage (HV) alarm Stops the excessive high voltage discharged. Cartridge drop preventive structure Secures the electrode cartridge with a double action lock.

14. For internal use only 1. Features (10) (Common) Safety function Drop prevention cover Secure prevention of electrode cartridge drop Image of the product with cover

15. For internal use only 1. Features (11) (Common) AC adapter Available as an option for all models. AC adapter AC cord The connector is different for the IZS40 and IZS41 and for the IZS42.

16. For internal use only 2. Background of Development To respond to requests for the AC type ion discharge method (for all models). To add a model with the deionization function only (IZS40), and to prevent unobservable such as electric shock, attachment of work pieces, etc. To reduce the potential amplitude width during deionization (IZS42). Industries: Electronic devices and FPD manufacturing To meet requests for a transition wiring cable (IZS41 and IZS42). To satisfy requests for a wireless remote controller (IZS41 and IZS42). Applicable industries: Electric machinery manufacturing and general machinery manufacturing (Semiconductor, FPD, Electronic board mounting, Resin and rubber molding, Film and paper manufacturing, Foods and beverage processing)

17. For internal use only 3. Application (1) Deionization of pet bottles - Prevention of fall during transportation, - Prevention of dust Deionization of films - Prevention of incorrect roll-up, - Prevention of dust Deionization of molded products - Easier release of molded product from die Deionization of film products - Prevention of adhesion to conveyor, - Prevention of scattering of finished products

18. For internal use only 3. Application (2) Deionization of transported wafers - Prevention of damage due to discharge between wafer and hand Deionization of films - Prevention of cling or attachment of filling agents, - Prevention of incorrect packing Deionization of electric boards - Prevention of damage to elements due to discharge, - Prevention of dust Deionization of glass boards - Prevention of damage due to cling, attachment or discharge, - Prevention of dust

19. For internal use only 4. Specifications and Performance (1) ModelIZS40 IZS41-□□ （ NPN ） IZS41-□□P （ PNP ） IZS42-□□ （ NPN ） IZS42-□□P （ PNP ） Ion generating typeCorona discharging type Voltage applying methodAC, DCAC, Sensing AC, DCDual AC Applied voltage+/-7,000V+/-6,000V Ion balance *1 +/-30V Air purge FluidAir (Clean and dry) Operating pressure 0.5 MPa or less Proof pressure0.7MPa Tube O.D.  6,  8,  10 Current consumption 330mA or less 440mA or less (480mA or less when the external sensor is used) 700mA or less (740mA or less when the external sensor is used) Power supply voltageDC24V±10% (AC100~240V: AC adapter, option) Power supply voltage in transition wiring ―DC24V~DC26.4V Input signal― Discharge stop signal, Maintenance signal Output signal― Maintenance signal, Error signal Ambient/Fluid temperature0~40 o C Ambient humidity35~80% Rh (no condensation) Material Ionizer cover: ABS, Electrode cartridge: PBT, Electrode: Tungsten, Single crystal silicon Impact proof100m/s 2 Standard/DirectiveCE (EMC directive: 2004/108/EC) *1: With air purge at a distance of 300mm between the workpiece and ionizer

20. For internal use only 4. Specifications and Performance (2) Available functions list IZS40IZS41IZS42 Ion generating typeAC, DC AC, DC Sensing AC Dual AC Standard equipment Input / Output ＯＯ Built-in auto balance sensor ＯＯ Transition wiring cable ＯＯ Electrode contamination detection ＯＯ Incorrect high voltage ＯＯＯ Electrode air sheath structure ＯＯＯ Energy saving deionization cartridge / High speed deionization cartridge ＯＯＯ Option Feedback sensor Ｏ Auto balance sensor ＯＯ Wireless remote controller ＯＯ Connection of AC adapter ＯＯＯ Drop prevention cover ＯＯＯ

21. For internal use only 4. Specifications and Performance (3) Deionization Time [Measurement conditions] Supply pressure: 0.3MPa Frequency: 30Hz Charged object: Charge plate (□150mm, 20pF) Deionization time: Attenuation time from 1000V to 100V IZS42 energy saving IZS40/41 energy saving IZS42 high speed IZS40/41 high speed Deionization time [s] Installation height [mm]

22. For internal use only 4. Specifications and Performance (4) Potential Amplitude Width [Measurement conditions] Supply pressure: 0.3MPa. Operating frequency: 30Hz, Charged object: Charge plate (□150mm, 20pF), High speed deionization cartridge Enlarged view Potential amplitude width [V] Installation distance [mm]

23. For internal use only 5-1. Construction (1) No.Item 1Ionizer 2 Electrode cartridge 3One-touch fitting 4End bracket 5 Intermediate bracket IZS40 series (to be released in July 2012) IZS41 and IZS42 series

24. For internal use only 5-1. Construction (2) 12 3 4 5 No.Item 1Power supply LED 2 Ion discharge/ Excessive high voltage LED 3Ion balance adjustment 4Frequency set switch 5Power supply connector IZS40 series

25. For internal use only 5-1. Construction (3) 1234567891011121314 No.ItemNo.Item 1Power supply LED8Frequency set switch 2 Ion discharge/ Excessive high voltage LED 9ID number set switch 3Maintenance LED10Operation mode set switch 4Balance complete LED11Receiving part of the remote controller 5Sensor LED12Power supply connector 6Remote controller enable LED13Link connector (for transition wiring cable) 7Ion balance adjustment14Sensor connection IZS41 / IZS42 series

26. For internal use only 7. How-to-Order

27. For internal use only 8. Dimensions (1) Ionizer / IZS40

28. For internal use only 8. Dimensions (2) End bracket / IZS40-BE Intermediate bracket / IZS40-BE Full length of ionizer (L) Cross-sectional view A-A

29. For internal use only 8. Dimensions (3) Ionizer / IZS41 and IZS42

30. For internal use only 8. Dimensions (4) End bracket / IZS40-BE Intermediate bracket / IZS40-BE Full length of ionizer (L) Cross-sectional view A-A

31. For internal use only 9. Precautions for Handling (1) Do not use in a place where the product could be splashed by dust, water or liquids (water, oils, chemicals, etc.). Clean specification is not available with this product. Provide grounding for the product. The F.G. terminal of the power supply cable should be grounded at 100W. This is not only for safety purpose but also for maintaining the deionization performance because the ion balance is based on the ground. When adjusting the ion balance of the product placed close to other products within 2m or less, turn off the power supplies of other products. Also, do not place DC driven products within 2m. Otherwise, the built-in sensor can malfunction.

32. For internal use only 9. Precautions for Handling (2) Use the power supply with a sufficient current capacity and supply a voltage in a range of 24 to 26.4VDC for the transition wiring cable. Unused cables should be insulated and fixed by a vinyl tape to prevent contact with other cables. The IZS41 and IZS42 are equipped with a discharge stop signal and discharge ion when the signal is not wired. Use a recommended one-touch fitting depending on the bar length.

33. For internal use only 9. Precautions for Handling (3) (for comparison test with competitors) Set the same installation distance. The installation distance to a work piece affects deionization time. Set the same installation place and conditions. Installation environments can affect deionization performance. If the ionizers are installed closely, deionization time is affected by ions attracted there. Set the same flow rate. Use the same consumption flow rate when air is purged. Deionization time is largely affected by the air discharge energy. If the test is based on the pressure, which varies depending on the nozzle size, number of nozzles and effective area, the performance inherent to the ionizer cannot be clarified. Test on the same date. Temperature and humidity affect the deionization performance, and so tests implemented on different dates result in deviation.