1. Cleanroom Energy Efficiency Research Activities March, 2006

2. Research Activities Research Roadmap for PIER Research Roadmap for PIER Cleanroom Programming Guide Cleanroom Programming Guide Benchmarking/Case studies involving 28 cleanroom spaces Benchmarking/Case studies involving 28 cleanroom spaces see: http://hightech.lbl.gov/cr-benchmarking- results.html Energy Design Resources – Collaboration with PG&E and Rumsey Engineers to develop Design Guides based upon observed best practices Energy Design Resources – Collaboration with PG&E and Rumsey Engineers to develop Design Guides based upon observed best practicessee: Energy Design Resources and http://hightec.lbl.gov/cleanrooms_bpg.html

3. Research Activities, con’t Demand controlled filtration – control based upon particle counts Demand controlled filtration – control based upon particle counts –Completed pilot study - see: http://hightech.lbl.gov/dc-filtration_case.html –Demonstration project in progress Minienvironment study see: http://hightech.lbl.gov/mini-env.html Minienvironment study see: http://hightech.lbl.gov/mini-env.html Fan-filter Units Fan-filter Units –Draft test procedure completed –Testing of 15 or more units in progress

4. Overall average 0.91

5. * Recirculation efficiency could not be measured for 21-24. System consisted of central air handler and fan-filter units cascading through four rooms. Average 0.49

6. * Recirculation efficiency could not be measured for 21-24. System consisted of central air handler and fan-filter units cascading through four rooms.

11. Best practice topics Yellow - completed White - planned Cleanroom Best Practices Topic Organization

12. Demand Controlled Filtration Benchmarking confirmed large energy savings by setting back recirculation air Pilot Studies confirmed ability to control based upon particle concentrations Market is skeptical

13. Fan-filter unit testing Testing 2’x4’ units Performance curves based upon pressure rise, airflow, and fan kW Goal is to integrate results into deployment programs

14. Minienvironment studies Study of energy performance of one minienvironment suggests performance can be improved Study of cleanroom using many minienvironments addresses overall energy performance

15. For more information See High-tech Buildings website for latest publications: http://hightech.lbl.gov