1. PF3W Series 3-Color Display Digital Flow Switch Planned release date: May 2012

2. １． Purpose of development Reinforce product capabilities Aim for expanding sales by replacing competitors‘ products. (float & impeller types) ① Large flow range (250L/min) ① Large flow range (250L/min) Temperature sensor. Integrated and remote types will both be available. Temperature sensor. Integrated and remote types will both be available. PVC piping version. PVC piping version.

3. 1. Development Purpose (supplementary) Product variations: Now an 250L/min type Now an additionally released 250L/min type. (For integrated, remote, and temperature sensor types) Model PF2WPF3W Integrate type Remote type Integrate type Remote type Temperature Sensor Flow rate Adjustment valve Vinyl chloride piping type Picture Flow range Temperature sensor Temperature sensor Flow adjusting valve 0.5 to 4L/min○○○○○○× 2 to 16L/min○○○○○○× 5 to 40L/min○○○○○○× 10 to 100L/min ○○○○○×○ 50-250L/min××●●●× ●*1●*1 ○ ： Released ● ： Release planned in May 2012 × ： NA *1: The flow range of PVC type is 30 to 250L/min

4. 2. Features (Expansion of the measurement range of flow) Maximum rated flow rate: 250 L/min This can be used to monitor the flow for the main piping of factories. This can be used to measure flow rates where large amounts of cleaning or cooling water is required.

5. ２． Features (retains the functions from existing products) Built-in temp. sensor Remote type For improved piping design flexibility. For improved piping design flexibility. The sensor and display can be The sensor and display can be installed separately. installed separately. Temperature sensor Temperature display Sensor Display

6. 2. Features ( retains the functions from existing products ) PVC piping version This version is mainly used to monitor cleaning water for liquid crystal glass boards. This version is mainly used to monitor cleaning water for liquid crystal glass boards. * The larger the LCD glass, the larger the required flow rate. Therefore this type is only available in a range of 100 to 250L/min. * The larger the LCD glass, the larger the required flow rate. Therefore this type is only available in a range of 100 to 250L/min. Operating fluid temperature 90 o C (70 o C for vinyl chloride piping type.) 90 o C (70 o C for vinyl chloride piping type.)

7. 2. Features ( retains the functions from existing products ) Expansion of applicable fluids This product can be used with water and ethylene glycol. This product can be used with water and ethylene glycol. (Viscosity 3mPas or less) (Viscosity 3mPas or less) Display rotation The display can be adjusted so that the values can be see clearly. The display can be adjusted so that the values can be see clearly.

8. 2. Features (others) Non grease specification Applicable to analog output (current/ voltage) Enclosure: IP65 CE,UL/ SA, RoHS compliant

9. 3. Application Application Monitor main piping flow rate Monitor main piping flow rate Monitor cooling water flow Monitor cooling water flow Monitor cleaning water flow Monitor cleaning water flowMarket Semiconductor manufacturing equipment manufacturers Semiconductor manufacturing equipment manufacturers Solar cell equipment manufacturers Solar cell equipment manufacturers

10. 4-1) Specification (250L range) ModelPF3W721 Fluids Water or ethylene glycol solution (Note that the viscosity should be 3mPas (3cP) or less) Rated flow range 50-250L/min (Metal piping) 30-250L/min (PVC piping) Display and set flow rate range 20 to 350L/min (Displays 0 when the value is less than 20L/min.) Min. setting unit2L/min Accumulated pulse conversion value 2L/pulse Accumulated flow range 99999999.9L (in units of 1L) Switch outputNPN or PNP, max 80mA, max 28V Analog output1-5V or 4 to 20mA Response time 0.5s/1s/2s （ The response time of the switch output and analog output is connected.) Accuracy+/-3%F.S. Integrated display type ModelPF3W521 Fluids Water or ethylene glycol solution (Note that the viscosity should be 3mPas (3cP) or less) Rated flow range 50-250L/min (Metal piping) 30-250L/min (PVC piping) Analogue output1-5V or 4 to 20mA Response time1s Accuracy+/-3%F.S. Remote type sensor

11. 4-1) Specifications Operating pressure range0-1MPa Withstand pressure1.5MPa (1MPa for PVC piping type) Operating fluid temperature0 to 90 o C (0 to 70 o C for PVC piping) Operating temperature range0 to 50 o C Ambient temperature characteristics +/-5%F.S. or less (25 o C standard) Power supply voltage12 to 24 VDC EnclosureIP65 Common specifications between display integrated type and remote type sensor Rated temperature range0 to 100 o C Display and set temperature range-10 o C to 110 o C Min. setting unit 1゜C1゜C Display accuracy+/-2 o C Analog output accuracy3% F.S. Response7s Ambient temperature characteristics+/-5% F.S. or less Temperature sensor specifications Note: The operating pressure range varies depending on the fluid temperature, so please see the catalog for details.

12. 4-1) Specifications Remote type display (For flow range 250L/min.) ModelPF3W3 Display and set flow rate range 20 to 280L/min Min. setting unit2L/min Accumulated pulse conversion value 2L/pulse Accumulated flow range 99999999.9L (in units of 1L) Switch outputNPN or PNP, max 80mA, max 28V Analog output1-5V or 4 to 20mA Response time 1s/2s (The response time of the switch output and analog output is connected.) Accuracy (single product)+/-0.5% F.S. Operating temperature range 0 to 50 o C Ambient temperature characteristics (Single product) +/-0.5% F.S. or less (25 o C is the standard) Power supply voltage12 to 24 VDC EnclosureIP40

13. 5. Construction (Cross section: Metal piping, with temp. sensor) Attachment （ SUS304 ） Body (PPS) Sensor (PPS) Temperature sensor (SUS304) brazed Temperature sensor body (SUS304) M8 connector Seal (FKM) Non grease specification for PF3W series

14. 5. Construction (Cross section: vinyl chloride piping type) PVC piping （ C-PVC ） Body (PPS) Sensor (PPS) M8 connector Seal (FKM) Non grease specification for PF3W series

15. 7 ． How-to-Order

16. 7. How-to-Order

17. 7 ． How to Order (Made-to-order)

18. 8 ． Dimensions (display integrated type) PF3W721

19. 8 ． Dimensions (separated type sensor) PF3W521

20. 8 ． Dimensions (with temperature sensor) Integrated display type Remote sensor type PF3W721 ‐ □ ‐ □T PF3W521 ‐ □ ‐ □T

21. 8 ． Dimensions (with vinyl chloride piping) Integrated display type PF3W721 ‐ U30 Flow direction 4x3.5 depth 14

22. 8 ． Dimensions (with vinyl chloride piping) Separated sensor type PF3W521 ‐ U30 Flow direction

23. 9 ． Cautions for handling Selection Precautions (1) The rated flow range depends on piping type - Metal piping (Rc,NPT,G): 50 to 250L/min - Vinyl chloride (U30): 30 to 250L/min The goal of the metal piping is to minimize cost of the parts of the product and reducing the length of the product. When the mass production version was checked, we confirmed that the Karman vortex becomes unstable and accuracy is reduced to +/-5%FS at a flow rate of 50L/min. Therefore, considering the operating flow range for customers that select the 2050L/min as their upper flow range area, we have set the rated flow range as 50 to 250L/min and the accuracy as +/- 3%F.S.

24. 9 ． Handling precautions (2) Product appearance Scratches or dirt on the main part do not affect the performance of the product and are treated as good product. (3) No Special Bracket Prepared Since we assume that the product will be mounted directly to main line piping, a part number for a bracket has not been assigned. There are holes at the bottom of the product for customers to mount it by themselves. * Recommended screw standard: M4 x 10 (4pcs.)

25. 9. Handling precautions (4) PVC piping PVC piping is JIS K6742 compliant. PVC piping type is connected by specific fitting in the market (See photo). Special knowledge is required when using this an adhesive. The piping must be connected by an engineer with sufficient knowledge. If engineers who do not have sufficient knowledge connect the piping, leakage and damage may occur. When selecting an adhesive for PVC piping, sufficient heat and endurance requirements must be taken into consideration in order to be able to properly work with the operating fluid temperature and pressure. Picture. Fitting for vinyl chloride

26. 9 ． Handling precautions Although the unit will appear to be operating properly, be sure to only use the product within the rated flow range. If the rated flow is exceeded, the output frequency of Karman vertex will lower and the display and analog output will be reduced. Be sure to use the product within the operating fluid temperature, from 0 to 90 o C. * PVC piping: 0 to 70 ℃ If the product is mounted vertically, be sure to direct the flow from bottom to top. If the direction is from top to down, air bubbles will not dissipate, thus leading to a malfunction. It is not possible to measure highly viscous ethylene glycol solution. (Viscosity: 3cP or less)

27. 10 ． Summary ([Selling point]) Large flow range added # Built-in temperature sensor (selected by model number), remote type PVC piping. # Built-in temperature sensor (selected by model number), remote type PVC piping. Piping material can be selected (SUS or brass) # Brass piping is made to order. # Brass piping is made to order.

28. Remarks (comprehension test) (1) Set flow range: 50 to 250[L/min] (1) Set flow range: 50 to 250[L/min] (2) All types of ethylene glycol solution can be used. (3) Operating fluid temperature for vinyl chloride piping is up to 90 o C. (4) The length of the straight pipe needs to be 8 times the piping port diameter. (5) Vinyl chloride piping is JIS K6742 compliant. (6) SUS, brass and vinyl chloride can be selected as piping material. (7) There is a type with analog output for both the flow rate and temperature. (8) The flow adjustment valve is applicable only to 4, 16 and 40L/min. (9) Vinyl chloride piping is only applicable to 250L/min.