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ELECTRONICS II VLSI DESIGN Fall 2013
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The Hydrogen Atom
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Allowable States for the Electron of the Hydrogen Atom
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The Periodic Table
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From Single Atoms to Solids
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Energy bands and energy gaps Silicon
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Band Structures at ~0K
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Atomic Bonds
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Electrons and holes in intrinsic [no impurities] semiconductor materials
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Electrons and holes in extrinsic [“doped”] semiconductor materials
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Some Terminology and Definitions
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Electron and Hole Concentrations at Equilibrium
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Calculating Concentrations
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Some Calculations At room temperature kT = 0.0259eV
At room temperature ni for Si = 1.5 x 1010/cm3 Solve this equation for E = EF 𝑓 𝐸 = 𝑒 (𝐸− 𝐸 𝐹 )/𝑘𝑇 Let 𝑇→0𝐾 find f(E<EF) and f(E>EF) Let T = 300K and EF = 0.5eV plot f(E) for 0 < E < 1 EC EV
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Fermi-Dirac plus Energy Band
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More Calculations At room temperature kT = 0.0259eV
At room temperature ni for Si = 1.5 x 1010/cm3 If Na = 2 x 1015 /cm3 find po and no The band gap of Si at room temp is 1.1eV or EC – EV = 1.1eV What is the value of EC – EF for intrinsic Si at T= 300K The band gap of Si at room temp is 1.1eV or EC – EV = 1.1eV What is the value of Ei – EF if Na = 2 x 1015 /cm3 at T= 300K The band gap of Si at room temp is 1.1eV or EC – EV = 1.1eV What is the value of EF – Ei if Nd = 2 x 1015 /cm3 at T= 300K
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Intrinsic Carrier Concentrations
SEMICONDUCTOR ni Ge 2.5 x 1013/cm3 Si 1.5 x 1010/cm3 GaAs 2 x 106/cm3 Which element has the largest Eg? What is the value of pi for each of these elements?
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Si with 1015/cm3 donor impurity
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Conductivity
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Excess Carriers
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Photoluminescence
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Diffusion of Carriers
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Drift and Diffusion
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Diffusion Processes 𝜑 𝑛 𝑥 0 = 𝑙 2 𝑡 ( 𝑛 1 − 𝑛 2 ) n(x) n1 n2
𝜑 𝑛 𝑥 0 = 𝑙 2 𝑡 ( 𝑛 1 − 𝑛 2 ) n(x) n1 n2 Since the mean free path is a small differential, we can write: 𝑛 1 − 𝑛 2 = 𝑛 𝑥 −𝑛(𝑥+∆𝑥) ∆𝑥 𝑙 x0 Where x is at the center of segment 1 and ∆𝑥= 𝑙 x0 - l x0 + l In the limit of small ∆𝑥 𝜑 𝑛 𝑥 = 𝑙 𝑡 lim ∆𝑥→0 𝑛 𝑥 −𝑛 𝑥+∆𝑥 ∆𝑥 = 𝑙 𝑡 𝑑𝑛(𝑥) 𝑑𝑥 𝑙 𝑡 ≡ 𝐷 𝑛 or 𝐷 𝑝
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Diffusion Current Equations
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Combine Drift and Diffusion
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Drift and Diffusion Currents
Electron drift Hole drift Electron & Hole Drift current E(x) n(x) Electron diffusion Hole diffusion Electron Diff current Hole Diff current p(x)
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Energy Bands when there is an Electric Field
𝑉 𝑥 = 𝐸(𝑥) −𝑞 = 𝑑𝑉(𝑥) 𝑑𝑥 = 𝑑𝑉(𝑥) 𝑑𝑥 =− 𝑑 𝑑𝑥 𝐸 𝑖 −𝑞 = 1 𝑞 𝑑 𝐸 𝑖 𝑑𝑥 E(x) E(x)
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The Einstein Relation At equilibrium no net current flows so any concentration gradient would be accompanied by an electric field generated internally. Set the hole current equal to 0: 𝐽 𝑝 𝑥 =0=𝑞 𝜇 𝑝 𝑝 𝑥 𝐸 𝑥 −𝑞 𝐷 𝑝 𝑑𝑝(𝑥) 𝑑𝑥 = 𝐷 𝑝 𝜇 𝑝 1 𝑝(𝑥) 𝑑𝑝(𝑥) 𝑑𝑥 E(x) Using for p(x) 𝑝 0 = 𝑛 𝑖 𝑒 𝐸 𝑖 − 𝐸 𝐹 /𝑘𝑇 qE(x) = 𝐷 𝑝 𝜇 𝑝 1 𝑘𝑇 𝑑 𝐸 𝑖 𝑑𝑥 − 𝑑 𝐸 𝐹 𝑑𝑥 E(x) The equilibrium Fermi Level does not vary with x. 𝐷 𝑝 𝜇 𝑝 = 𝑘𝑇 𝑞 Finally:
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D and mu Dn (cm2/s) Dp mun (cm2/V-s) mup Ge 100 50 3900 1900 Si 35
12.5 1350 480 GaAs 220 10 8500 400
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Message from Previous Analysis
An important result of the balance between drift and diffusion at equilibrium is that built-in fields accompany gradients in Ei. Such gradients in the bands at equilibrium (EF constant) can arise when the band gap varies due to changes in alloy composition. More commonly built-in fields result from doping gradients. For example a donor distribution Nd(x) causes a gradient in no(x) which must be balanced by a built-in electric field E(x). Example: An intrinsic sample is doped with donors from one side such that: 𝑁 𝑑 = 𝑁 0 𝑒 −𝑎𝑥 Find an expression for E(x) and evaluate when a=1(μm)-1 Sketch band Diagram
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Diffusion & Recombination
Jp(x) Jp (x + Δx) x x + Δx Increase in hole conc In differential volume Per unit time Rate of Hole buildup Recombination Rate = - 𝜕𝑝 𝜕𝑡 𝑥→𝑥+∆𝑥 = 1 𝑞 𝐽 𝑝 𝑥 − 𝐽 𝑝 𝑥+∆𝑥 ∆𝑥 − 𝛿𝑝 𝜏 𝑝 𝜕𝛿𝑝 𝜕𝑡 =− 1 𝑞 𝜕 𝐽 𝑝 𝜕𝑥 − 𝛿𝑝 𝜏 𝑝 𝜕𝛿𝑛 𝜕𝑡 =− 1 𝑞 𝜕 𝐽 𝑛 𝜕𝑥 − 𝛿𝑛 𝜏 𝑛
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If current is exclusively Diffusion
𝐽 𝑛 𝑑𝑖𝑓𝑓 =𝑞 𝐷 𝑛 𝜕𝛿𝑛 𝜕𝑥 𝜕𝛿𝑛 𝜕𝑡 = 𝐷 𝑛 𝜕 2 𝛿𝑛 𝜕 𝑥 2 − 𝛿𝑛 𝜏 𝑛 And the same for holes
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And Finally, the steady-state Determining Diffusion Length
𝜕𝛿𝑛 𝜕𝑡 = 𝐷 𝑛 𝜕 2 𝛿𝑛 𝜕 𝑥 2 − 𝛿𝑛 𝜏 𝑛 =0 𝜕 2 𝛿𝑛 𝜕 𝑥 2 = 𝛿𝑛 𝐷 𝑛 𝜏 𝑛 = 𝛿𝑛 𝐿 2 𝐿 𝑛 = 𝐷 𝑛 𝜏 𝑛
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