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Published byEsmond Malone Modified over 9 years ago
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Controlled Catalysis for CNT Growth at ARL Fe(NO 3 ) 3 Solution Catalyst Thin Metal Film Catalysts ~ 100 g Fe(NO 3 ) 3 /mL IPA ~ 25 g Fe(NO 3 ) 3 /mL IPA 0.7nm Ni stripes on SiO 2 1.5nm Ni/10nm Al/500nm SiO 2 selected area CNT growth on silicon substrate 1nm Ni encapsulated by 500nm SiO 2, exposed by cracking Ni stripe SiO 2 Ni Si CNT CNTs on Ni CNTs
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Photolithographically Defined CNT-FETs CNT-FET devices have been demonstrated using the following approach: CVD-grown SW-CNTs Cr/Au contacts 500 nm SiO 2 n ++ Si substrate for backside gating
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1 2 3 4 5 6 7 8 AB CD CNT FET Pattern
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CNT027A, Device A, Fingers 2-3 10-17-06 Initial Testing 10-20-06 Under vacuum
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CNT027A, Device B, Fingers 2-3 10-17-06 Initial Testing 10-20-06 Under vacuum
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