1. NOVEL NiTi SHAPE MEMORY ALLOY FILMS Manfred Wuttig Manfred Wuttig  Tel 301-405-5212  Fax 301-314-9467  Email wuttig@eng.umd.edu CONTENTS OF PRESENTATION Introduction Novel NiTi Films 1.One Dimensional NiTi Films 2.Gradated NiTi Films 3.NiTi (Ms1)/NiTi(Ms2) Films

2. NOVEL NiTi SHAPE MEMORY ALLOY FILMS Manfred Wuttig Manfred Wuttig  Tel 301-405-5212  Fax 301-314-9467  Email wuttig@eng.umd.edu Corrugated Films - Complicated Stress Distribution Report on ”Corrugated ” Film that can be easily analyzed

3. NOVEL NiTi SHAPE MEMORY ALLOY FILMS Manfred Wuttig Manfred Wuttig  Tel 301-405-5212  Fax 301-314-9467  Email wuttig@eng.umd.edu Gradated Films - Not Easy to Prepare Report on Gradated Films prepared by varying substrate temperature

4. NOVEL NiTi SHAPE MEMORY ALLOY FILMS Manfred Wuttig Manfred Wuttig  Tel 301-405-5212  Fax 301-314-9467  Email wuttig@eng.umd.edu Report on “Corrugated “ Films that can be easily analyzed

5. NOVEL NiTi SHAPE MEMORY ALLOY FILMS Manfred Wuttig Manfred Wuttig  Tel 301-405-5212  Fax 301-314-9467  Email wuttig@eng.umd.edu “Geometrically Novel” NiTi Films

6. NOVEL NiTi SHAPE MEMORY ALLOY FILMS Manfred Wuttig Manfred Wuttig  Tel 301-405-5212  Fax 301-314-9467  Email wuttig@eng.umd.edu

7. NOVEL NiTi SHAPE MEMORY ALLOY FILMS Manfred Wuttig Manfred Wuttig  Tel 301-405-5212  Fax 301-314-9467  Email wuttig@eng.umd.edu Principle of measurement, the cantilever deflection is determined from the change of the resonance frequency,

8. NOVEL NiTi SHAPE MEMORY ALLOY FILMS Manfred Wuttig Manfred Wuttig  Tel 301-405-5212  Fax 301-314-9467  Email wuttig@eng.umd.edu Deflection of four differently patterned NiTi/Si bimorph cantilevers as a function of temperature. All bimorphs were processed simultaneously and identically. aspect ratio = 0.31 aspect ratio = 0.16    aspect ratio = 0.016    aspect ratio = 0.0009

9. NOVEL NiTi SHAPE MEMORY ALLOY FILMS Manfred Wuttig Manfred Wuttig  Tel 301-405-5212  Fax 301-314-9467  Email wuttig@eng.umd.edu Stress analysis of a 1-D / 2-D composite: (a) unstressed components (b) components stressed biaxially (c) patterned film and substrate stressed uniaxially.

10. NOVEL NiTi SHAPE MEMORY ALLOY FILMS Manfred Wuttig Manfred Wuttig  Tel 301-405-5212  Fax 301-314-9467  Email wuttig@eng.umd.edu Conceptual martensitic microstructure: biaxially, top, and uniaxially, bottom,stressed SMA films in the two phase temperature region. The light and dark sections represent martensite and austenite, respectively.

11. NOVEL NiTi SHAPE MEMORY ALLOY FILMS Manfred Wuttig Manfred Wuttig  Tel 301-405-5212  Fax 301-314-9467  Email wuttig@eng.umd.edu Cantilever deflection, Stoney’s Eq.: Martensite biaxial Martensite uniaxial Thermal  T

12. NOVEL NiTi SHAPE MEMORY ALLOY FILMS Manfred Wuttig Manfred Wuttig  Tel 301-405-5212  Fax 301-314-9467  Email wuttig@eng.umd.edu Evaluation of slopes of deflection and comparison of ratios.

13. NOVEL NiTi SHAPE MEMORY ALLOY FILMS Manfred Wuttig Manfred Wuttig  Tel 301-405-5212  Fax 301-314-9467  Email wuttig@eng.umd.edu Report on Structurally Gradated Films prepared by varying substrate temperature

14. NOVEL NiTi SHAPE MEMORY ALLOY FILMS Manfred Wuttig Manfred Wuttig  Tel 301-405-5212  Fax 301-314-9467  Email wuttig@eng.umd.edu Martensite/Martensite Composite NiTi Films Previous Experiments Show: The nature of the martensitic transformation depends on the deposition temperature. Therefore: It is possible to create martensite/martensite composites by varying the substrate temperature during deposition.

15. NOVEL NiTi SHAPE MEMORY ALLOY FILMS Manfred Wuttig Manfred Wuttig  Tel 301-405-5212  Fax 301-314-9467  Email wuttig@eng.umd.edu 250 385 semi-continuous discontinuous continuous t [min] 0 50 100 250 T[ o C] 10 Variation of the substrate temperature during sputter deposition of the films. top, semi-continuous, center, discontinuous, bottom, continuous

16. NOVEL NiTi SHAPE MEMORY ALLOY FILMS Manfred Wuttig Manfred Wuttig  Tel 301-405-5212  Fax 301-314-9467  Email wuttig@eng.umd.edu Internal Friction of NiTi double layer film Deposited while semi- continuously cooling,  ; Single layers deposited at 250 deg C,  385 deg C,

17. + Manfred Wuttig  Tel 301-405-5212  Fax 301-314-9467  Email wuttig@eng.umd.edu Natural and Artificial Multiferroics New UMD-based MURI SMA/SMA Composite With Large Damping !SMAs display large damping, up to 50%, at large amplitudes of vibration, useful for mitigation of earth quake damage ! -scale R-M SMA Composites display 11% damping at small amplitudes, useful for mitigation of (small amplitude) mechanical noise Craciunescu/Wuttig, J. Thin Solid Films R hombohedral Phase M onoclinic Phase -Scale R-M Composite = Temperature [C] Damping Q -1 [%]

18. NOVEL NiTi SHAPE MEMORY ALLOY FILMS Manfred Wuttig Manfred Wuttig  Tel 301-405-5212  Fax 301-314-9467  Email wuttig@eng.umd.edu Analysis of Enhanced Damping

19. NOVEL NiTi SHAPE MEMORY ALLOY FILMS Manfred Wuttig Manfred Wuttig  Tel 301-405-5212  Fax 301-314-9467  Email wuttig@eng.umd.edu Displacement curves of the NiTi double layer films; Depositions on cooling; semi-continuous,  discontinuous,  continuous. Depositions on heating; semi-continuous,  discontinuous, continuous.

20. Modulus curves for the double layer film deposited on cooling and heating left, cooling: semi-continuous,  discontinuous,  continuous right, heating: semi-continuous,  discontinuous, continuous NOVEL NiTi SHAPE MEMORY ALLOY FILMS Manfred Wuttig Manfred Wuttig  Tel 301-405-5212  Fax 301-314-9467  Email wuttig@eng.umd.edu

21. NOVEL NiTi SHAPE MEMORY ALLOY FILMS Manfred Wuttig Manfred Wuttig  Tel 301-405-5212  Fax 301-314-9467  Email wuttig@eng.umd.edu No Modulus Defect

22. NOVEL NiTi SHAPE MEMORY ALLOY FILMS Manfred Wuttig Manfred Wuttig  Tel 301-405-5212  Fax 301-314-9467  Email wuttig@eng.umd.edu Large Displacement Large Damping

23. NOVEL NiTi SHAPE MEMORY ALLOY FILMS Manfred Wuttig Manfred Wuttig  Tel 301-405-5212  Fax 301-314-9467  Email wuttig@eng.umd.edu SUMMARY Two Kinds of Novel NiTi Films: 1.1-D Films; large displacement 2.Martensite/Martensite Films; large displacement large damping

24. NOVEL NiTi SHAPE MEMORY ALLOY FILMS Manfred Wuttig Manfred Wuttig  Tel 301-405-5212  Fax 301-314-9467  Email wuttig@eng.umd.edu COLLABORATORS Kiyotaka Mori Grad. Student Panasonic Res./Boston Corneliu Craciunescu Research Associate, U. Timisoara Supported by Office of Naval Research National Science Foundation

25. NOVEL NiTi SHAPE MEMORY ALLOY FILMS Manfred Wuttig Manfred Wuttig  Tel 301-405-5212  Fax 301-314-9467  Email wuttig@eng.umd.edu Ehemaliger Dresdner, Anhänger des damaligen DSC: mehrmaliger Deutscher Meister, Heimat-mannschaft von Helmut Schön, des Trainers der Deutschen Fussballmannschaft.