1. Maximum Areas in HPK Rule (ATLAS internal only) Y. Unno (KEK) 2015/1/13, 2015/4/8 updated, Y. Unno1

2. Dicing and Active/Implant Diameters 2015/1/13, 2015/4/8 updated, Y. Unno2

3. ATLAS12 Design ATLAS12 design: – with the distance of inner edge of bias ring-to-dicing line: 986 µm (W)/side, 910 µm (H)/side – with the width of active area (inner edge-to-inner edge of the bias ring): 95.567 mm (= 74.5 µm x (1282+1) – 16 µm) The dicing line and the outer edge of the guard ring are well within the circles. 2015/1/13, 2015/4/8 updated, Y. Unno3

4. ATLAS”X” Design (Barrel) Active area (inside bias ring) being square; – with the width and height of inner edge-to-inner edge of bias ring: 96.718 x 96.718 mm 2 – Sensor dicing slightly rectangular: 97.718 (W) x 97.618 (H) mm 2 Outer edge of the guard ring (Al+implant) is within the circle of 137.2 mm. “Slim edge” design: – with the distance of inner edge of the bias ring-to-dicing line: 500 µm (W)/side and 450 µm (H)/side, Strip pitch is 75.37 µm – Strip pitch has to be an unit of 0.5 µm (HPK rule). 2015/1/13, 2015/4/8 updated, Y. Unno4 2.3% more area than ATLAS12

5. ATLAS”X” with Strip Pitch 75.5 µm Strip pitch being an unit of 0.5 µm, 75.5 µm. – the width and height of inner edge-to-inner edge of bias ring: 96.851(W) x 96.585(H) mm 2 – Sensor dicing slightly rectangular; 97.851 (W) x 97.485 (H) mm 2 Outer edge of the guard ring (Al+implant) is within the circle of 137.2 mm. “Slim edge” design: – with the distance of inner edge of the bias ring-to-dicing line: 500 µm (W)/side and 450 µm (H)/side, 2015/1/13, 2015/4/8 updated, Y. Unno5 2.3% more area than ATLAS12

6. ATLAS”Maxi” Design (Endcap?) Outer edge (Al+implant) of the “edge” ring is within the circle of 139.5 – with a round edge ring of radius of 0.450 mm at corner. “Slim edge” design with the distance of inner edge of bias ring-to-dicing line: – 500 µm (W)/side, 450 µm (H)/side Outer edge of the guard ring (Al+implant) is within the circle of 137.2 mm – with a round edge of the bias ring, i.e., un-equal length of strips near the corner. 2015/1/13, 2015/4/8 updated, Y. Unno6

7. “Circular” Dicing Constraint/recommendation of HPK – Polygon of a straight section of 2 mm or larger and 10-20 sections. Thus, an example is – If the length of an edge is 80 mm, the length of the straight section becomes 4 mm. – At a radius of 30 cm, an edge of 80 mm become a polygon of 20 sections with a sagitta of about 27 µm between the adjacent sections. 2015/1/13, 2015/4/8 updated, Y. Unno7