1. 1 Status of Vacuum Process Facilities at SSL 16 October 2009 Sharon R Jelinsky Space Sciences Laboratory, UC Berkeley

2. 2Introduction Process Facilities at the Space Sciences Lab shall support the following: —Development of bialkali photo-cathodes on borofloat substrates —Build prototype small sealed tubes for efficiency and longevity tests —Develop process for large sealed tubes of the 8” square design —Provide test systems for performance evaluations All Process Facilities are in place for prototype small systems —Equipment is in house for windows of 33mm diameter New Facilities are needed for the large systems —An intermediate 4” format process chamber from modifications —A large 8.6” format process chamber must be built from scratch —Modifications are necessary to other auxiliary equipment

3. 3 Facilities at SSL SPECIFIC FACITITYREADY FOR SMALLMODS FOR LARGE Class 100 Assembly Benchesyesnone Precision Wet Cleaningyesnone Vacuum Baking yeseasy Plasma Etchingyesneed larger etcher Electrode Evaporationyesmoderate Hi-Pot Stationyeseasy Helium Leak Checkeryeseasy N2 & Vacuum Storageyeseasy 4” P-C Process Chambers---modify existing 8.6” P-C Process Chamber---need larger chamber Vacuum Test Chambersyesmoderate

4. 4 Small Prototype Tubes Small Tube Equipment We Currently Have Ready for Use Multiple windows of 33mm diameter for prototype tests —Borofloat 33 —Fused Silica 7980 Brazed bodies for 33mm windows Micro-channel plates to fit brazed bodies —Not necessary for relative photo-cathode measurements Handling fixtures for 33mm substrates in process chambers Cross delay line anodes that can accommodate the small format Vacuum flanges with appropriate feed-thrus Electrical equipment for performance tests Process Facilities all ready and running for the small format

5. 5 33mm System Parts Small Tube Parts at SSL Many windows of 33mm diameter for prototype tests Brazed bodies designed for 33mm windows Handling fixtures for 33mm substrates in process chambers

6. 6 Process Chamber Small Format Glass Window UV Transmissive Window Photo-Cathode Forming Well Flange Manipulator Detector Mount Tube, 4” OD 6” Conflat Detector Loading Flange Photo-Cathode Forming Well Tube View Port CHAMBER DIMENSIONS: 12” DIA. x 30” LONG x 22” HIGH

7. 7 Looking Down In Process Tank Window in Holder Detector Stack on Loading Flange P-C Forming Well Manipulator Arm TRANSFERING WINDOW FROM P-C WELL TO BODY STACK

8. 8 Looking Thru Side View Port Detector Body Stack Indium Cup RESTRICTED SPACE FOR MANY STEPS IN PROCESS CHAMBER Photo-Cathode Deposition, Window Transfer, Seal Window-Body Stack Staging Hook P-C Forming Well Window in Holder Manipulator Arm

9. 9 Processing Oven Accommodates Small & Large Format Inside Envelope: 36” x 30” x 25” High Defines Large Chamber Limits

10. 10 Large Process Chamber Glass Window UV Transmissive Window 8.6” Sqr Window Cathode Chimney Photo-Cathode Forming Well Flange 8.6” Sqr Brazed Body Build Mount Standoffs 16.5” Detector Loading Flange 16”D Chamber OVERALL DIMENSIONS: 30” LONG, 16.5” WIDE, 22” HIGH

11. 11 System Diagnostics SSL Facilities already in place for testing photocathodes or tubes, in situ before and after sealing Pinhole mask image below used to test uniformity and distortion

12. Large System Equipment New Large Process Chamber to Accommodate 8.6” Square —Made per SSL design by outside vendor New Window Handling/Transfer Fixtures —Design, machine and install in chamber at SSL Vacuum Flanges, Valves, Plumbing —Many specialized flanges, electrical feedthrus added at SSL —Manipulator arm vacuum feedthru —metal seals vacuum valves to withstand high temp over 300C Vacuum Pumps, Controls, Gages —Turbo pump cart for pumping to e-6 torr —Ion pump system for pumping to e-9 torr —Associated vacuum controls and gages Cart for Process Chamber to support all the above —We have a frame to begin with 12

13. 13 Status of Process Chambers 33mm Format Prototype Process Chamber —Have all parts, fixtures and chamber needed to deposit photocathodes —Must clean and prep chamber and parts, then begin test runs 4” Format Intermediate Process Chamber —Have a chamber that must be modified to fit —Must design and build fixtures —Must design and procure windows, bodies and anodes —Must clean and prep chamber and parts, then begin test runs 8.6” Square Large Process Chamber —Must finish the design of process chamber and send out for bid —Must design and build window transfer system/fixtures and flanges —Must design and procure windows, bodies and anodes —Must clean and prep chamber and parts —Operate process chamber and make test runs —Build a complete detector (hopefully by due date of June 30, 2010)

14. 14 Precision Wet Cleaning

15. 15 Class 100 Assembly Benches

16. 16 N2 Storage, Welder

17. 17 Evaporator, Vac Storage, Hi-Pot

18. 18 Plasma Etcher, Evaporator

19. 19 Leak Checker, Process Oven

20. 20 Pre/Post Process Test Systems