1. jenmorris@cmu.edu 16-722 L2004- 10A (solid-state chemical sensors) 1 sensing and sensors 16-722 - S2004 F 9a30-12p20 NSH1305 Jen Morris +1 412 268 3303 office: HH A313

2. jenmorris@cmu.edu 16-722 L2004- 10A (solid-state chemical sensors) 2 L2004-10A Solid-state Chemical Sensors and Chemical Sensor Arrays

3. jenmorris@cmu.edu 16-722 L2004- 10A (solid-state chemical sensors) 3 Bibliography Figaro Engineering, Inc. –http://www.figarosensor.com/http://www.figarosensor.com/ MicroChemical Systems SA –http://www.microchemical.com/http://www.microchemical.com/ –http://www.sensors.com.cn/download/MiCS/http://www.sensors.com.cn/download/MiCS/ Cyrano Sciences, Inc. –http://cyranosciences.com/http://cyranosciences.com/

4. jenmorris@cmu.edu 16-722 L2004- 10A (solid-state chemical sensors) 4 Solid-State Chemical Sensors Metal-oxide semiconductor layer –Usually tin dioxide (SnO 2 ) Apply heat –In air Surface oxygen increases (negatively charged) Resistance increases –In presence of deoxidizing gas Surface oxygen decreases Resistance decreases

5. jenmorris@cmu.edu 16-722 L2004- 10A (solid-state chemical sensors) 5 How They Work

6. jenmorris@cmu.edu 16-722 L2004- 10A (solid-state chemical sensors) 6 Figaro Engineering, Inc. Chemical gas sensors –LP-Gas/Propane (500-10000ppm) –Natural gas/Methane (500-10000ppm) –General combustible gas (500-10000ppm) –Hydrogen (50-1000ppm) –Carbon monoxide (50-1000ppm) –Ammonia (30-300ppm) –Hydrogen sulfide (5-100ppm)

7. jenmorris@cmu.edu 16-722 L2004- 10A (solid-state chemical sensors) 7 Figaro TGS 2442 Carbon Monoxide Sensor Applications: –CO detectors –Air quality controllers –Indoor parking lot ventilation Gas sensing layer –Tin dioxide (SnO 2 )

8. jenmorris@cmu.edu 16-722 L2004- 10A (solid-state chemical sensors) 8 Figaro TGS 2442 Features: –Low power consumption –High sensitivity/selectivity to carbon monoxide (CO) –Miniature size –Low sensitivity to alcohol vapor –Long life and low cost –Low humidity dependency

9. jenmorris@cmu.edu 16-722 L2004- 10A (solid-state chemical sensors) 9 TGS 2442 Basic Measuring Circuit 1 second heating cycle 1 second circuit voltage cycle

10. jenmorris@cmu.edu 16-722 L2004- 10A (solid-state chemical sensors) 10 TGS 2442 Specifications

11. jenmorris@cmu.edu 16-722 L2004- 10A (solid-state chemical sensors) 11 SnO 2 for CO Sensing Rs = Sensor resistance of displayed gases Ro = Sensor resistance in 100ppm CO

12. jenmorris@cmu.edu 16-722 L2004- 10A (solid-state chemical sensors) 12 SnO 2 for CO Sensing Rs = Sensor resistance at 30ppm, 100ppm and 300ppm of CO at various temperatures and 50%R.H. Ro = Sensor resistance at 300ppm of CO at 25°C and 50% R.H.

13. jenmorris@cmu.edu 16-722 L2004- 10A (solid-state chemical sensors) 13 MicroChemical Systems SA Chemical gas sensors –Ozone (0.01-10ppm) –Nitrogen Dioxide (0.05-5ppm) –Ethanol (50-1000ppm) –CO / NO 2 (1-400ppm/0.05-5ppm) –Carbon Monoxide & HCs (1-400ppm)

14. jenmorris@cmu.edu 16-722 L2004- 10A (solid-state chemical sensors) 14 MicroChemical Systems MiCS-3110 Ethanol Sensor Applications: –Breathalizer: (Blood Alcohol Content) –Various industrial applications Gas sensing layer –Tin dioxide (SnO 2 )

15. jenmorris@cmu.edu 16-722 L2004- 10A (solid-state chemical sensors) 15 MicroChemical Systems MiCS-3110 Features: –Low heater current –Wide detection range –High sensitivity –Fast thermal response –Electro-Static Discharge protected –Miniature dimensions –High resistance to shocks and vibrations

16. jenmorris@cmu.edu 16-722 L2004- 10A (solid-state chemical sensors) 16 MiCS-3110 Basic Measuring Circuit Run in constant voltage mode Heater voltage of V H = 2.4 V –increases temperature of R s to 430°C

17. jenmorris@cmu.edu 16-722 L2004- 10A (solid-state chemical sensors) 17 MiCS-3110 Specifications

18. jenmorris@cmu.edu 16-722 L2004- 10A (solid-state chemical sensors) 18 SnO 2 for Ethanol Sensing RS = Sensor resistance to C 2 H 5 OH R 10ppm = Sensor resistance resistance in 10 ppm of C 2 H 5 OH

19. jenmorris@cmu.edu 16-722 L2004- 10A (solid-state chemical sensors) 19 Chemical Sensor Arrays Array of polymer composite sensors Swell in presence of vaporized analyte –Conductive polymer pathways broken –Resistance increases Different gases produce different responses

20. jenmorris@cmu.edu 16-722 L2004- 10A (solid-state chemical sensors) 20 Cyrano Sciences, Inc. Cyranose® 320 Hand-held chemical vapor sensor 32 thin-film carbon-black chemiresistors Trained by taking different measurements –Create a database of patterns –Match odors against saved patterns

21. jenmorris@cmu.edu 16-722 L2004- 10A (solid-state chemical sensors) 21 Cyranose® 320 Specifications

22. jenmorris@cmu.edu 16-722 L2004- 10A (solid-state chemical sensors) 22 Cyrano Sciences, Inc. NoseChip TM Under development –Low cost, low power, lightweight sensing –Optional short-range wireless capability Applications –Sensing nodes for facilities protection –Personal badge detectors for toxic industrial chemicals and chemical warfare agents –Residual life indication –Leak detectors in military or commercial systems –Quality monitors in embedded systems

23. jenmorris@cmu.edu 16-722 L2004- 10A (solid-state chemical sensors) 23 NoseChip TM Specifications

24. jenmorris@cmu.edu 16-722 L2004- 10A (solid-state chemical sensors) 24 Bibliography Figaro Engineering, Inc. –http://www.figarosensor.com/http://www.figarosensor.com/ MicroChemical Systems SA –http://www.microchemical.com/http://www.microchemical.com/ –http://www.sensors.com.cn/download/MiCS/http://www.sensors.com.cn/download/MiCS/ Cyrano Sciences, Inc. –http://cyranosciences.com/http://cyranosciences.com/