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Experiment Electronics UMC 0.18µm radiation hardness studies Progress since last Collaboration Meeting Sven Löchner GSI Darmstadt 15 th CBM Collaboration Meeting April 13th, 2010
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Experiment Electronics April 13th, 201015th CBM Collaboration Meeting - Sven Löchner 2 Agenda GRISU Project - Reminder –ASIC –Single Event Effects Testing site –Microprobe Testing site –Total Ionising Dose Testing Progress / News since last Collaboration Meeting –TID –SEE –Microprobe Summary
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Experiment Electronics April 13th, 201015th CBM Collaboration Meeting - Sven Löchner 3 Reminder: GRISU project Project objectives: Characterisation of UMC 0.18µm CMOS process concerning : Vulnerability against Single Event Effects (SEE), especially Single Event Upsets (SEU) and Single Event Transients (SET) –SEU cross section for different Flip-Flop designs and layouts –SET sensitivity of the UMC 0.18µm process –Critical Linear Energy Transfer (LET crit ) Single Transistor measurements –Comparison of transistor models by simulation –Total Ionising Dose (TID) Characterisation of the UMC 0.18µm process under irradiation leakage currents threshold shifts, annealing
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Experiment Electronics April 13th, 201015th CBM Collaboration Meeting - Sven Löchner 4 GRISU test ASIC Test structures for TID measurements Test structures for SEU measurements Test structures for SET measurements, Q crit Ring oscillator for TID / SEU measurements GRISU chip UMC 0.18µm process 1.5 x 1.5 mm² 64 pads –28 core pads –36 pads
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Experiment Electronics April 13th, 201015th CBM Collaboration Meeting - Sven Löchner 5 Low Energy testing site Installation of a test facility for ASIC irradiation with heavy ions at X6 cave at GSI (in cooperation with bio physics group) Beam monitoring via ionisation chamber Dosimetry setup available Irradiation of DUT in air Testing parameters: –11.4 MeV/u –LET in the range of 1...62 MeV·cm 2 /mg (SiO 2 ) –10 3 …10 12 ions / (cm 2 s) –50mm beam size
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Experiment Electronics April 13th, 201015th CBM Collaboration Meeting - Sven Löchner 6 Microprobe testing site Setup of a single hit heavy ion test environment for ASIC irradiation (micro beam test line) possibility of a localised radiation of the DUT resolution: ~500nm scanning area: down to 10x10µm² energy of ions: 4.8 MeV/u First results from Xe-132 test: plot shows overlay of detected ion positions (3 ) which triggered an SET and chip layout SET homogeneity map of ASIC
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Experiment Electronics April 13th, 201015th CBM Collaboration Meeting - Sven Löchner 7 Total Ionizing Dose (TID) tests TID testing with X-rays –Irradiation facility at Institute for Experimental Nuclear Physics, University of Karlsruhe –60keV X-ray, 40...240krad/h GRISU chips tested –Total dose between 320krad and 1000krad(SiO 2 ) –Operating dose rate between 80krad/h and 230krad/h –Measurements: leakage current, threshold shift, transition times, total power consumption, annealing, … of non-hardened digital library Leakage current of ESD protection diodes increased by factor of 100 Average core current increased by factor 2 (after 600krad) Transition times of ring oscillator inverters decrease (changing of NMOS / PMOS ratio) Good annealing performance
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Experiment Electronics April 13th, 201015th CBM Collaboration Meeting - Sven Löchner 8 Progress (since last meeting) TID testing with X-rays Due to a miscalibration of the X-ray system at Karlsruhe: dose rate was only ~40% than displayed by the diagnostic system (wrong for all measurements between 2008 and 2009) all results are now updated Cadence simulation models (for different dose levels) still need to be updated No influence on annealing Still good annealing performance
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Experiment Electronics April 13th, 201015th CBM Collaboration Meeting - Sven Löchner 9 Progress (since last meeting) SEE testing 7 irradiation tests so far –C-12, Ar-40, Ni-58, Ru-96, Xe-132 –final dosimetry for Ar-40 and Ru-96 run are not yet done problems with the “old” GSI scanning electron microscope (SEM) now scheduled with new system for end of April All Cross section measurements will then be updated
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Experiment Electronics April 13th, 201015th CBM Collaboration Meeting - Sven Löchner 10 Progress (since last meeting) Microprobe testing 2nd testing with the GSI microprobe system (Au-197 run 02/2010) –Improve of the spatial resolution –First results are combined together with ASIC layout D-FlipFlop with additional buffersPosition of triggered SEE events – DFF loaded with „0“Position of triggered SEE events – DFF loaded with „1“Overlay of both triggered events Redundant layout structures should keep at least 1um apart
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Experiment Electronics April 13th, 201015th CBM Collaboration Meeting - Sven Löchner 11 Work progress at GSI so far… Development of a UMC 0.18µm Test-ASIC (GRISU) Installation of testing site for SEE measurements Installation of a micro beam testing site for single ion hit measurements TID testing of the UMC 0.18µm process at Karlsruhe Still to do: TID irradiation with low dose rates Long term test with gamma source (for example Co-60) Neutron test “On hold”: 3rd iteration of GRISU test ASIC “on hold Triple redundant test structures (for SEU / SET improvement) Test circuits for SET suppression Re-design of the DICE layout cells (decrease SEU cross-section) Right now nothing is contradicting against the UMC 0.18µm process
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Experiment Electronics April 13th, 201015th CBM Collaboration Meeting - Sven Löchner 12 Additional Talks & Documents Reference to further talks: EE-Gruppenmeeting (7.7.2008) GRISU Statusreport CBM-XYTER Family Planning Workshop (5.12.2008) UMC 0.18μm radiation hardness studies IT/EE-Palaver (20.1.09) Untersuchung von Strahlungseffekten in anwendungs-spezifischen integrierten Schaltungen (ASIC) Strahlungseffekte 13 th CBM Collaboration Meeting (12.3.2009) Radiation hardness studies - Update EE-Gruppenmeeting (29.6.2009) GRISU Microbeam Irradiation 14 th CBM Collaboration Meeting (7.10.2009) UMC 0.18μm radiation hardness studies - Update Link: http://wiki.gsi.de/cgi-bin/view/EE/GRISU
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