1. Langmuir Probe Plasma parameter measuring system “

2. Talk Outline Current as a function of Voltage and first derivative of current / voltage Measuring electron temperature (Kte) Measuring ( I isat ) and ( I esat ) Measuring Saturation Ion current Current ( I ) as a function of Voltage (V), and first derivative of I /V Clean I V Curve in Chlorine Clean EEDF Curve in Chlorine

3. Current as a Function of Voltage and First Derivative of Current / Voltage

4. Measuring Electron Temperature (kTe) y = 0.3774x - 8.5523 R 2 = 0.9987 -8.00E+00 -7.50E+00 -7.00E+00 -6.50E+00 -6.00E+00 -5.50E+00 -5.00E+00 -4.50E+00 -4.00E+00 23456789 kTe = 3.2 eV Natural Log (Current) (Amps) Probe Bias (Volts)

5. Measuring ( I isat ) and ( I esat ) N i = 1.21 10 16 m -3 Measuring Ion Current at Plasma Potential (V p ) ( I isat ) N e = 1.03 10 16 m -3 Electron Current at Plasma Potential (V p ) ( I esat )

6. Measuring Saturation Ion Current

7. Current (I) as a function of Voltage (V), and first derivative of I/V Clean data in industrial reactor driven by RF frequency Reactor Type: PlamaLab 100 Gas: Argon Pressure: 20mTorr Frequency: 13.56MHz

8. Clean I V Curve in Chlorine Clean data in industrial reactor driven by RF frequency and reactive gas Reactor Type: PlamaLab 100 Gas: Chlorine Pressure: 20mTorr Frequency: 13.56MHz

9. Clean EEDF Curve in Chlorine Clean data in industrial reactor driven by RF frequency and reactive gas showing a Maxwellian distribution Reactor Type: PlamaLab 100 Gas: Chlorine Pressure: 20mTorr Frequency: 13.56MHz

10. Summary Describing a Langmuir Trace Measuring plasma parameters and saturation points Research and industrial applications using reactive gases