1. Kick-off meeting, Villingen 18.08.2004 A. Heinrici, P. Haring Bolívar, H. Kurz Institut für Halbleitertechnik, RWTH Aachen, Germany ATHOS – media tester development

2. Research Topics IHT Research topics IHT

3. Institute of Semiconductor Electronics, RWTH Aachen Contents o Role of RWTH in ATHOS o Deliverables and milestones o Time schedule o Current work o Open discussion points

4. Institute of Semiconductor Electronics, RWTH Aachen Role of RWTH in ATHOS Substrate and disk development (WP4) o Task 4.5 Characterization and optimization of the disc assembly (with LETI&MPO) Media testing (WP7) o Task 7.2:Scattering analysis of media o Task 7.3:Holographic media tester (with Optimal/BU) o Task 7.4:Holographic testing of media

5. Institute of Semiconductor Electronics, RWTH Aachen Deliverables & Milestones o D22 (month 12)Dedicated tester for holographic media analysis at 408nm o M19 (month 24)Detailed performance inter-comparison of media manufactured at LETI and MPO, using Aprilis and InPhase materials to concentrate further development. o M20 (month 24)Characterization of flat media (without tracking structure) manufactured with different materials o M21 (month 36)Final evaluation of fundamental characteristics of structured media

6. Institute of Semiconductor Electronics, RWTH Aachen Time schedule o Official planning: o First priority is holographic tester o Planned schedule: working setup by Feb 2005

7. Institute of Semiconductor Electronics, RWTH Aachen Holographic media tester o Detailed planning is actually performed in close cooperation with Optimal Optik (Gábor Szarvas) o Start at 532nm (5W DPSS laser) and then 408nm laser 1 mirror 1 shutter 1 semitransparent mirror detector λ/2 plate microscope objective pinhole achromatic doublet PBS prism shutter 2 λ/2 plate mirror 2 Cr mask Writing Fourier objective reference aperture reference lens data carrier Beam stop relay lens CCD/CMOS detector array Adjustable components (Computer controlled) Reading Fourier objective Intermediate image plane Reference arm Scheme of tester (by Optimal Opt.)

8. Institute of Semiconductor Electronics, RWTH Aachen Requirements o Transmission and reflection o Shift multiplexing and angle multiplexing + phase!! o 532nm and 405nm Writing Fourier objective NT30-941 Reading Fourier objective, NT30-941 Chromium mask Beam stop Substrate+ storage layer

9. Institute of Semiconductor Electronics, RWTH Aachen Interference analysis o Tests with large area interference setup

10. Institute of Semiconductor Electronics, RWTH Aachen Examples of interference patterns on photoresist (2  )

11. Institute of Semiconductor Electronics, RWTH Aachen Open issues General issues: o Reflection geometry for media tester: When will first reflection disks be available? o Is angle multiplexing best option for quantifying shrinkage? o Phase stability of DLP devices? Disadvantages of LC-array? o Blue laser by Toptica? When? Characteristics o Scattering sensitivity of disks? Storage requirements? Spectral dependencies? o Material specs (InPhase tapestry 3000?)  intensity specs for detection array?