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Photo lithography Positive and negative resist. What? Resist (photosensitive material) comes in two forms – positive and negative.

Published byRegina Rogers Modified over 9 years ago

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Presentation on theme: "Photo lithography Positive and negative resist. What? Resist (photosensitive material) comes in two forms – positive and negative."— Presentation transcript:

1 Photo lithography Positive and negative resist

2 What? Resist (photosensitive material) comes in two forms – positive and negative

3 Material to be patterned Fotomask Fotoresist Light source Negative resist Positive resist Exposure

4 Developement Material to be patterned Fotoresist Developer (solution)

5 Compare result Fotomask Material to be patterned Patterned Fotoresist

6 Reflections In which aspects are positive and negative resist similar? In which aspects do they differ? What happens in a positive resist during exposure to UV-light? What happens in a negative resist during exposure to UV-light?

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