1. 240-451 VLSI, 2000 1 Lecture 5 Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut Design Rules

2. 240-451 VLSI, 2000 2 Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut Design Rules Interface between designer and process engineer Guidelines for constructing process masks Unit dimension: Minimum line width –scalable design rules: lambda parameter –absolute dimensions (micron rules)

3. 240-451 VLSI, 2000 3 Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut Mead and Conway 1. Diffusion not lower than 2  2. Poly not lower than 2  22 22

4. 240-451 VLSI, 2000 4 Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut Mead and Conway 3. Diffusion and diffusion not lower than 3  33

5. 240-451 VLSI, 2000 5 Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut 4. Poly and poly not lower than 2  Mead and Conway 22

6. 240-451 VLSI, 2000 6 Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut Mead and Conway 5. Poly and diffusion not lower than 1  11

7. 240-451 VLSI, 2000 7 Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut Mead and Conway 6. Poly cross diffusion 22

8. 240-451 VLSI, 2000 8 Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut Mead and Conway 7. 1 1  1 1 

9. 240-451 VLSI, 2000 9 Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut Mead and Conway 8. Contact cut on diffusion 22 22

10. 240-451 VLSI, 2000 10 Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut Mead and Conway 9. Contact cut on poly 22 22

11. 240-451 VLSI, 2000 11 Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut 22 22 Mead and Conway 10. Contact cut on metal

12. 240-451 VLSI, 2000 12 Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut 11.,12. In Metal Mead and Conway 33 33

13. 240-451 VLSI, 2000 13 Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut Mead and Conway 13.,14. Contact Cut 33 22

14. 240-451 VLSI, 2000 14 Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut Mead and Conway 15. Buttering contact 66 44 