1. National Nanofabrication Centre Centre for Nano Science and Engineering IISc, Bangalore, India TUMS Murthy 25 Feb 2014 Cleanroom administrative committee Meeting

2. TUMS MURTHY Feb 25, 2014 Action Items Sl.NoItemOwner 1To sign acceptance certificate for RTP.Dr. Murthy 2To find solution for Medical InsuranceProf. Rudra Pratap 3Record of consumables issued to each userDr. Murthy 4 To check the quality of liquid discharge after effluent treatment and air quality after scrubbers every six months Mr. Arun Kumar 5To investigate water mist fire extinguishersMr. Arun Kumar 6 Steps to reduce queue time on laser writer Steps to reduce training time for Raith Dr. Hegde 7To estimate annual Budget of MNCF.Dr. Girish Kunte

3. TUMS MURTHY User statistics Feb 25, 2014 Reports

4. TUMS MURTHY Feb 25, 2014 SWIFT Watermist Technology Self -activated Watermist Instant Flooding Technology

5. TUMS MURTHY Feb 25, 2014 SWIFT Watermist Technology

6. TUMS MURTHY Feb 25, 2014 Estimated Annual Budget

7. TUMS MURTHY Feb 25, 2014 NNfC Consumables Item descriptionCost/year(Lakhs) MOS chemicals30.0 Local Chemicals6.0 Lithography -chemicals40.0 Cleanroom supplies19.0 Wafers50.0 Sputter Targets22.0 Evaporation Materials0.0 Bulk Gases Liq N233.3 O217.2 H23.5 Ar1.1 Specialty Gases Replacement only17.0 Specialty Chemicals POCl32.6 TEOS1.5 Total estimate243.1