1. 1 MPW Design Introduction Course - Module 4 Process Description Part II Tyre pressure sensor (SensoNor)

2. 2 Contents

3. 3 Absolute design limitations To avoid breakage during fabrication Maximum allowed stress 500 MPa under the following conditions: 2000 g acceleration 1 bar (0.8 bar) pressure difference

4. 4 Process control monitors Test dies electrical parameters mechanical dimensions

5. 5 Process control monitors Product wafers Visual inspection Oxide thickness Diaphragm thickness Test wafers Sheet resistivity Film thickness

6. 6 Test data Automated test data collection Measurement database Process monitoring / SPC

7. 7 SPC

8. 8 Test certificate

9. 9 Chapter 4: MPW Process Description End of this chapter Questions or comments?