1. Prabhakara Rao November 3, 2015
National Nanofabrication Centre Centre for Nano Science and Engineering IISc, Bangalore, India
Cleanroom Admin Committee Meeting
Prabhakara Rao
November 3, 2015

2. Reports September month charges CeNSE users charged 72% of total value
122 Users - Total charges at a high of 29.7 L
29 NON-MITO users (Paid Users) - Total charges of 4 L
93 MITO084 users - Total charges of 25.7 L
64 users from CeNSE - Total charges of L
CeNSE users charged 72% of total value

3. Reports Data April-15 May-15 June-15 July-15 Aug-15 Sep-15 Total Users97
110
120
103
113
122
MITO084 users 79 91 95 80 87 93
Non-MITO Users 18 19 25 23 26 29
Total users from CeNSE 55 63 60 52 61 64
Total charges for MITO084
18.75 L
15.5 L
22.25 L
22.47 L
22.18 L
25.7 L
Total charges for Paid users
2.3 L
1.86 L
2.5 L
2.95 L
3.54 L
4 L

4. April 2015 - Nov 2015 - INUP project Status
Summary
completed 23
ongoing 4
pending 27

5. INUP Project Status from April-Nov,2015
Sl.No:
Participant Name
University
Project Title
Status 1
Sudhakumari
ISM Dhanbad
Fabrication of gold nanoslit binary grating for developing ultrasensitive label free plasmonic biosensor
completed 2
Lintu rajan
NIT jaipur
Design and characterization of nanostructured ZnO thin films based heterojunction/schottky  diode for gas sensing application 3
Mahaveer
Jain University
Microchannel //master preparation 4
Papanasam
IIIT kancheepuram
Fabrication and characterization of SiC MIS capacitors with different dielectrics 5
Anjali Choudary
BHU
Fabrication of Microfluidic based Neuromuscular junctions on a chip 6
Manjunath
BMS college
Microwave assisted synthesis of metal oxide nanomaterials and study of opto electronic properties 7
Ummer
IIT Kanpur
Silicon photonic crystal 8
Robin khosla
IIT Mandi
Alternate High K dielectric for semiconductor memories 9
Arun Mehta
KSR Group of Institutions ,Namakal
Natural Rutile Sand as a sustainable source of nano Titania for Dye Sensitized Solar Cell Applications
characterisation to be scheduled 10
Vidya Rajan
Calicut University
Studies on functionalized graphene 11
Shanker Narayanan
Anna University
AlGaN Based biosensors 12
Sumanth
Bangalore University
Colloidal quantum dot solar cell 13
Jaya
calicut University
Fabrication and characterization of transparent p-n heterojunction diodes 14
Priyanka kakoty
Tezpur
Fabrication of MOS gate sensor for tea and other food aroma sensing 15
Anil kumar Pal
Pondicherry university
ZnO based hybrid nanostructures
ongoing 16
Sunitha
Victoria college PKD
P type oxide semiconductors
First stage completed 17
Sivasundari
Annamalai university
Pulse width modulation technique based MEMS pressure sensor 18
joshitha
SSN College TN
Bistable switch 19
Dinesh Kumar
Preparation and Characterization of the (Pt-Ti)/TiO2/Silicon MOS capacitor for sensor applications. 20
Hema Rao
IIT bhubaneshwar
Fabrication of MOS using SiC substrate 21
Nimith K
NIT surathkal
Fabrication and Characterization of Polymer Light Emitting Diodes (PLEDs) 22
Tarun Sharma
Thapar University punjab
Fabrication of Nano-channel Hybrid Plasmonic Waveguide for Nano-scale Optical Confinement and Long range Propagation 23
Manu krishnan
IITM
Fabrication of optical MEMS device 24
parmeshwari
Mangalore University
Characterisation 25
Anita Murugakar
ECE , IISC
Microwave cavity resonators 26
Satyajit Sahoo
VIT chennai
TiO2 based memristor (ReRAM) crossbar solid state memory
Ongoing 27
Jyotirmoy Dutta
Shiv Nadar University, UP
Design and Development of Thin Film Bulk Acoustic Wave Resonator Filter for RF applications

6. Internal Users Total Amount – 45,31,422 Sl.no Professor Project Code1.
Prof. S. Raghavan
CDAC0018/ Consumables
21,63,753.00 2.
MITO-098
5,70,000.00 3.
Prof.Rudra Pratap
NPMA-034
9,00,000.00 4.
84,304.00 5.
Prof.Navakanta Bhat
BIARC
1,50,000.00 6.
NPMA-035
6,12,365.00 7.
51,000.00
Total Amount – 45,31,422

7. Comparison with other cleanrooms
Description
SITAR
SCL
CeNSE
Remarks
Fire alarm system
Addressable(Notifier)
Addressable(Morley)
Conventional
Need to check all detectors in a Zone.
Panic button
Installed in each bay
Not available
In Emergency user need to call BMS.
FM200
Installed
Not installed
Not harmful to the equipment.
Water sprinkler
Equipment may damage. Need to install in A/C ducts & utility cleanroom tunnel also.
VESDA
Aspirators locations need to be change.
Liquid leak detector
Leakage (other than PCW,DI) only can find when go for an inspection.
Hydrant system
Installed, but functional
System not working, pump house under Biological Dept.
Gas cabin-Magnehelic gauge
Exhaust- rate of air flow can’t see.

8. Fire and safety need to improve
Emergency Response team (ERT) to be formed.
Addressable panel to be installed in cleanroom with minimum 6 detectors in each bay and return air path(5-8 Lakhs).
Aspirator system to be installed at return air path before mixing with the fresh air Lakhs).(present Vesda system 4 nos can utilize)
Corridor area, Utility building, – FAS to be installed. (Present conventional panel for cleanroom can utilize.)
Panic button to be installed at each bay.(50,000 with in-house team)
Fire alarm to be integrated with Access control system.(In-house team)
CCTV to be installed at plenum area. (1Lakh)
CeNSE building Fire Alarm system to be reprogrammed with new locations.(75,000)
Hydrant system to be maintained with pressurized water. (Pump house under Biological dept., Nozzles and hoses to be placed in each fire Hydrant box)

9. Faculty ERT - Members Cleanroom- BMS
Utility- Thiyagu, Shift Electrician
NNfC- Raghu, Smitha, Adithi, Suresh
MNCF- Prakash, Sterin
GF- Narahari, Arun
FF- Marsha, Gajendra
SF- Reshma, Jithin
TF- Manjunath, Pandian

10. Cleanroom Vesda & FAS Sensor location
Plenum
FFU
From AHUs
Cleanroom
Air flow pattern
Aspirators (VESDA)
FAS Sensor
Below raise floor
Dry Cooling coil

11. Annual maintenance scheduleSl
Effected areas
Dec-15
Team Leader
Remarks 5 6 7 8 9 10 11 12 13
CeNSE
Vendor 1
Wet Scrubber
Gajendra
Nanoclean
Cleaning of -poll rings, nozzles, Tank ,leak arresting, Pump installation. 2
General & Dry exhaust system
General servicing. 3
AHU-1, 2 & 3
Over all servcing 4
Gas system
UHP
Chilled water pumps
General servicing, Water seal replacement.
Chiller 1,2&3
PJP
PCW & DC system
Draining & refilling of water & general servicing
Process vacuum, HV
Clean room UPS & EB panel
Tyaganand
Cleaning of contactors, tightening of contacts,cables etc.
ETP
General servicing, RO
Fire protection system DI 14
LT & UPS panels Utility
Thiyaganand 15
Electrical panels- CeNSE 16
DGs
NK Diesel
General servicing,Cleaning of contactors, tightening of contacts,cables etc. 17
Final inspection and Cleaning
Major Spare parts requirement: VFD for PCW- 3 Lakhs, General exhaust dampers 2nos – 1.5 Lakhs, DCP, AHU Valve actuators- 2 Lakhs.

12. Staff Concerns
Wage Revision
Medical Insurance

13. Lithography Bay October, 2015
Equipments:
•Laser writer, MicroTech
•Laser writer, Heidelberg
•EVG Mask aligner
•MJB4 mask aligner
•EVG Bonder
•E‐Line system
•Pioneer E‐beam system
Gopal

14. Litho Equipments Utilization Chart – Oct 2015, E- beam systems

16. Maintenance Issues
All Litho tools are up, no down time during Sept.
MJB4 needs AMC

17. Raith PIONNER Training Database
Sl No
Requested date
Batch
Staring date
End Date
Name
Department
Status 1
5/6/2015
6/29/2015
7/22/2015
Tathagata Paul
Physics
Done 2
5/12/2015
Banani Biswas
CeNSE 3
5/14/2015
sukanya pal
physics, IISc 4
Awanish pandey 5
7/27/2015
8/12/2015
Vadivukkarasi J 6
5/20/2015
Chandrika T N
ECE
Did Not come 7
6/3/2015
Basant Chitara
MRC 8
6/24/2015
Bhupendra Kumar Sharma 9
8/17/2015
Irfan Ansari 10
Pranav Santosh Mundada
UG programme 11
7/17/2015
Abraham Mathew Koshy
PHYSICS 12
8/14/2015
10/5/2015
Going on
Samprita Nandi
UG (Physics)
done 13
Aditya Hambarde

18. Raith e-LiNE Training Database ( July-Aug. 2015)
Sl No
Requested date
Batch
Staring date
End Date
Name
Department
Status 1
4/7/2015
6/9/2015
7/6/2015
Siddharth Nambiar
CeNSE
Done 2
4/15/2015
Vadivukkarasi J 3
4/17/2015
banani biswas
Did not Come 4
4/26/2015
Awanish pandey 5
4/28/2015
7/9/2015
8/3/2015
Venkateshwara Rao Kolli
ECE,IISC 6
4/29/2015
Avijit Chatterjee 7
5/3/2015
Shubhadeep B 8
Charanjeet Malhi
IISc 9
Rameshnaidu jenjeti
IPC 10
5/18/2015
8/6/2015
8/27/2015
Sandip Mondal
Physics
Skipped 11
5/20/2015
manas ranjan sahu
physics 12
5/24/2015
Arup Paul 13
6/12/2015
Swapnil 14
6/15/2015
Sumit kumar 15
6/16/2015
Jafar Hasan
Materials Engineering 16
9/1/2015
9/22/2015
Dharitri Narjaree
cense 17
6/20/2015
Divya Somvanshi
ECE 18
7/1/2015
santosh chiniwar 19
Soumyadeep Dutta
Indian Institute of Science 20
8/4/2015
Chandrika T N 21
8/5/2015
Going on
Vijay 22
8/19/2015
vaibhav rana 23
8/24/2015
Chandan Kumar 24
9/15/2015
Abinash Kumar 25
9/21/2015
Arjun Shetty

19. EVG Mask aligner training statistics (July-Aug.2015)
Full Name
Department
Contact address
Level of Training
Pramod Ravindra
CeNSE
Not attended
B K Sharma
Physics
Mrityunjay
Level 1
Nayana Ramesh
Thulasi
IAP
Prabhat
Rizwana parween
Harshitha
Dhananjay
Yet to be trained
Ankit soni
CEDT
Dharithri
Nithin
Level 2
Avijit
Puneet sharma
Adithi raman
Mechanical
Sreenath
Vikram
Manish sachdeva
Divya
ECE
Bhavin
Meera
Shreesha prabhu
Semonti
Jatin
Chemical
Rituparna
Mustaque ali
MRC
Praneet
Banani
Hailu Dessalegn Ayalew
Sujoy
Chemistry
kondaiah
Atul
Basant
Bhuvana
Abhishek
Karthik
Vinit
Shashank
Level 1
Single Layer Exposure
Level 2
Top Side Alignment
Level 3
Bottom Side Alignment
Total: 38 users

20. Training Completion Date
MJB4 Mask aligner training statistics (July-Aug.2015)
Si No
User Name
Department
Training Request Date
Training Completion Date
Level of training 1
Preethi Deshpande
CeNSE
8/9/2015
9/1/2015
Level 1 2
Abishek
8/8/2015
9/3/2015 3
Shreesha Phrabu
8/11/2015
8/24/2015
Level 2 4
Sonthosh kumar
Not attended 5
mrityunjay Shukla
8/5/2015 6
Nayana Ramesh
9/5/2015
Going on 7
Vinit Kumar
MechEngg
9/7/2015
Level 1
Single Layer Exposure
Level 2
Top Side Alignment

21. Furnaces and wet benches
Savitha P

23. Dry Etch and Thin films & Process Integration Nov 3 ,2015
Sunanda Babu

24. Equipment Utilization
DRIE:SMC chiller was down due to refrigerant leak, leak fixed.
RIE-Cl and RIE-F: AMC for both tools completed.
E-beam: Planetary rotation ball-bearing faulty, replaced and resolved.

25. Equipment Utilization

26. INUP External Project Status(Oct’15)
PI Owner
Start Date
ECD
Mask Layers
Status
MSRIT RF MEMS switch( (Laxmi)
Owner: Siva
Bkup:Sabiha
Oct’14
May’15 4
Closed
MTRDC TWT SWS(Anurag)
Jun’15
May’16 2
3rd mask written wit both structures, superimposed. With e-beam Al2O3 as hard mask, DRIE of straight channel(70um deep) and superimposed serpentine channel(375um deep) processing completed. Results look promising. Go ahead with gold coating, and then wafer-wafer bonding.
RCI Accelerometer(Mandal)
Jun ’12
Mar’12 7
7 masks done for 1st iteration. Optimize PECVD BSG and re-try the 7um trench filling with BSG( to achieve
Nanosniff Sensor (Sachin)
Owner: Sabiha
Bkup:Siva
Aug’12
continuous 5
Gold peeling resolved with new Cr target, Pt film blanket wet etch still patchy. Pt remolded target quality suspected. Continue 7th process run with Ti/Pt dry etch. Pilot run looks promising.
IITGB Micro Needles (Bhushan)
Jul’14
4” DSP wafers available, pending customer feedback on requirement.

27. INUP External Project Status(Oct’15)
PI Owner
Start Date
ECD
Mask Layers
Status
NAL Insulator Deposition and Etching (Prasanta Choudhury)
Owner: Sabiha
Bkup:Siva
Aug’12
continuous NA
2 2” wfrs processed ( Oxide/Nitride deposition, RIE pad etch, PR strip and Pad resistance measurement),Pad resistance meets customer requirements, awaiting remaining 2 samples from NAL.
BMSIT Gold electrodes( Sreedevi)
Sep’15 1
Feasible, Process estimate provided. Payment process ongoing.
IIT Madras Thermal Interface resistance measurement of thin films, like Graphene on substrates( Arvind)
Feasible, process estimate provided, pending customer feedback.

28. INUP External Project Status(Oct’15)
PI Owner
Start Date
ECD
Mask Layers
Status
SNS college of Engineering Piezoelectric cantilever for energy harvesting( Sreeja)
Owner: Sabiha
Bkup:Siva
Sep’15
Feasibility/customer requirements discussion on going
Asarva chips/BNMIT Blood pressure sensor (Veena)
Owner: Siva
Bkup:Sabiha
Feasible, Process estimate provided
NIT Trichy Pressure Sensor(Sujan)
Feasible, Process estimate provided,

29. INUP External Project Status(Oct’15)
PI Owner
Start Date
ECD
Mask Layers
Status
Delhi University DRIE processing( back side Si etch)
Owner: Lava
Bkup: Aditi
Sep’15
Oct’15
Done, customer requirements met. Closed.
Dr Anzari(IITDM) Cantilever project
Owner: Sabiha
Bkup: Siva
Process estimate provided, pending customer feedback
Dr Palash Basu(IIST Trivandrum,)Graphene FET
Owner: Sangeeth
Previous work has been done. To continue further

30. Thank you