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Penn ESE370 Fall2011 -- DeHon 1 ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 9: September 26, 2011 MOS Model
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Today MOS Structure Basic Idea Semiconductor Physics –Metals, insulators –Silicon lattice –Band Gaps –Doping Penn ESE370 Fall2011 -- DeHon 2
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MOS Metal Oxide Semiconductor Penn ESE370 Fall2011 -- DeHon 3
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MOS Metal – gate Oxide – insulator separating gate from channel –Ideally: no conduction from gate to channel Semiconductor – between source and drain See why input capacitive? Penn ESE370 Fall2011 -- DeHon 4 channel gate srcdrain
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Penn ESE370 Fall2011 -- DeHon 5 channel gate srcdrain Capacitor Charge distribution and field?
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Idea Semiconductor – can behave as metal or insulator Voltage on gate creates an electrical field Field pulls (repels) charge from channel –Causing semiconductor to switch conduction –Hence “Field-Effect” Transistor Penn ESE370 Fall2011 -- DeHon 6 channel gate srcdrain
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Source/Drain Contacts Penn ESE370 Fall2011 -- DeHon 7 Contacts: Conductors metalic –Connect to metal wires that connect
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Fabrication Start with Silicon wafer Dope Grow Oxide (SiO 2 ) Deposit Metal Mask/Etch to define where features go Penn ESE370 Fall2011 -- DeHon 8 http://www.youtube.com/watch?v=35jWSQXku74 Cartoon fab seq.: t=2min—4min
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Penn ESE370 Fall2011 -- DeHon 9 Dimensions Channel Length (L) Channel Width (W) Oxide Thickness (T ox ) Process named by minimum length –45nm L=45nm
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Semiconductor Physics Penn ESE370 Fall2011 -- DeHon 10
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Conduction Metal – conducts Insulator – does not conduct Semiconductor – can act as either Penn ESE370 Fall2011 -- DeHon 11
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Why metal conduct? (periodic table) Penn ESE370 Fall2011 -- DeHon 12 http://chemistry.about.com/od/imagesclipartstructures/ig/Science-Pictures/Periodic-Table-of-the-Elements.htm
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Conduction Electrons move Must be able to “remove” electron from atom or molecule Penn ESE370 Fall2011 -- DeHon 13
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Atomic States Quantized Energy Levels Must have enough energy to change level (state) Penn ESE370 Fall2011 -- DeHon 14
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Thermal Energy Except at absolute 0 –There is always free energy –Causes electrons to hop around ….when enough energy to change states –Energy gap between states determines energy required Penn ESE370 Fall2011 -- DeHon 15
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Silicon Atom How many valence electrons? Penn ESE370 Fall2011 -- DeHon 16
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Silicon 4 valence electrons –Inner shells filled –Only outer shells contribute to chemical interactions Penn ESE370 Fall2011 -- DeHon 17
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Silicon-Silicon Bonding Can form covalent bonds with 4 other silicon atoms Penn ESE370 Fall2011 -- DeHon 18
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Silicon Lattice Forms into crystal lattice Penn ESE370 Fall2011 -- DeHon 19 http://www.webelements.com/silicon/crystal_structure.html
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Silicon Lattice Cartoon two-dimensional view Penn ESE370 Fall2011 -- DeHon 20
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Outer Orbital? What happens to outer shell in Silicon lattice? Penn ESE370 Fall2011 -- DeHon 21
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Energy? What does this say about energy to move electron? Penn ESE370 Fall2011 -- DeHon 22
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State View Penn ESE370 Fall2011 -- DeHon 23 Valance Band – all states filled Energy
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State View Penn ESE370 Fall2011 -- DeHon 24 Valance Band – all states filled Energy Conduction Band– all states empty
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Band Gap and Conduction Penn ESE370 Fall2011 -- DeHon 25 EcEc EvEv EvEv EcEc EvEv EcEc OR InsulatorMetal 8ev EvEv EcEc Semiconductor 1.1ev
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Doping Add impurities to Silicon Lattice –Replace a Si atom at a lattice site with another Penn ESE370 Fall2011 -- DeHon 26
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Doping Add impurities to Silicon Lattice –Replace a Si atom at a lattice site with another E.g. add a Group 15 element –E.g. P (Phosphorus) –How many valence electrons? Penn ESE370 Fall2011 -- DeHon 27
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Doping with P Penn ESE370 Fall2011 -- DeHon 28
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Doping with P End up with extra electrons –Donor electrons Not tightly bound to atom –Low energy to displace –Easy for these electrons to move Penn ESE370 Fall2011 -- DeHon 29
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Doped Band Gaps Addition of donor electrons makes more metallic –Easier to conduct Penn ESE370 Fall2011 -- DeHon 30 EvEv EcEc Semiconductor 1.1ev EDED 0.045ev
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Localized Electron is localized Won’t go far if no low energy states nearby Increase doping concentration –Fraction of P’s to Si’s –Decreases energy to conduct Penn ESE370 Fall2011 -- DeHon 31
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Electron Conduction Penn ESE370 Fall2011 -- DeHon 32
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Electron Conduction Penn ESE370 Fall2011 -- DeHon 33
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Capacitor Charge Remember capacitor charge Penn ESE370 Fall2011 -- DeHon 34 + + + + - - - - - - - - -
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MOS Field? What does “capacitor” field do to the doped semiconductor channel? Penn ESE370 Fall2011 -- DeHon 35 - - - Vgs=0 No field + + + + + - - - = Vgs>0 Conducts + + + + - - - Vcap>0
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+ + + + + - - - MOS Field Effect Charge on capacitor –Attract or repel charge in channel –Change the donors in the channel –Modulates conduction –Positive Attracts carriers –Enables conduction –Negative? Repel carriers –Disable conduction Penn ESE370 Fall2011 -- DeHon 36
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Group 13 What happens if we replace Si atoms with group 13 atom instead? –E.g. B (Boron) –Valance band electrons? Penn ESE370 Fall2011 -- DeHon 37
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Doping with B End up with electron vacancies -- Holes –Acceptor electron sites Easy for electrons to shift into these sites –Low energy to displace –Easy for the electrons to move Movement of an electron best viewed as movement of hole Penn ESE370 Fall2011 -- DeHon 38
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Hole Conduction Penn ESE370 Fall2011 -- DeHon 39
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Doped Band Gaps Addition of acceptor sites makes more metallic –Easier to conduct Penn ESE370 Fall2011 -- DeHon 40 EvEv EcEc Semiconductor 1.1ev EAEA 0.045ev
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Field Effect? Effect of postivive field on Acceptor- doped Silicon? Penn ESE370 Fall2011 -- DeHon 41 + + + Vgs=0 No field + + + + - - - Vcap>0 Vgs>0 No conduction
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Field Effect? Effect of negative field on Acceptor- doped Silicon? Penn ESE370 Fall2011 -- DeHon 42 + + + +++++ - - - Vgs=0 No field + - - - + + + Vcap<0 Vgs<0 Conduction
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MOSFETs Donor doping –Excess electrons –Negative or N-type material –NFET Acceptor doping –Excess holes –Positive or P-type material –PFET Penn ESE370 Fall2011 -- DeHon 43
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Admin Intel Fabrication Talk Wednesday (28 th ) at 4pm (Raisler) HW3 –Largely based on Wed. lecture –Should be able to do SPICE parts now –Will want to read text 3.3.2 Penn ESE370 Fall2011 -- DeHon 44
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MOSFET Semiconductor can act like metal or insulator Use field to modulate conduction state of semiconductor Penn ESE370 Fall2011 -- DeHon 45 - - - + + + + +
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