1. http://www.TEAsystems.com Terrence E. Zavecz tzavecz@TEAsystems.com Weir Temporal Response New TEA Systems Software Presentation from new Weir Temporal Analysis software

2. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 2 Overview Weir TR  Weir Temporal Response New Analysis Sections  Data Import  Plotting Temperature value vs time at each sensor site  Range controls  The Range plot  Temperature range vs High/low values  Phase analysis  Examination of constant vs rise/fall portions of the cycle  Phase graphics  By sensor, temperature and phase.  Contour Mapping  Of Temperature, rise times and Energy

3. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 3 Data import and sensor response Time-selection reduced analysis range Activation temperature is lower-limit of energy calculation Phase Threshold is used in the Phase Analysis to set sensitivity to thermal-rise slope change. Mouse-over curve shows time/ temperature. When a sensor curve is passed, a red square is generated. Red-square is replicated on each sensor’s thermal curve.

4. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 4 Analysis restriction Time has been restricted to 2,000 < time < 2405 seconds

5. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 5 Interactive graphics Red-box on curve marked by red- spot on “temp-variation vs time” wafer plot (right)  Simply hover mouse over top curve to move spot Notice “High” central range of wafer with low upper left & lower right

6. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 6 Variation from Wafer Mean Temperature Response uniformity at each probe Perfect uniformity is a horizontal line across the center of the circle. Time Variation from Mean Degrees Time 2560 sec

7. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 7 Phase Analysis – Primary Graph Press “Phase Tab” Phase graph shows:  Upper/Lower “red” temperature range at each point of process. (right ordinate )  Range in temperature at each time segment (left ordinate of graph with black squares)  Calculated Phase transitions with a yellow box at each phase time. Statistics are excerpts from the “RiseTimesPhase” spreadsheet. Temperature range of all sensors Max/min range measured Phase transition point

8. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 8 Range Plot Statistics show four thresholds which are plotted as yellow-filled squares. Range of data across wafer @ time is plotted by blue circles Max Temp Min Temp Phase change Range

9. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 9 “RiseTimesPhase” spreadsheet Details each process phase (upper chart) Lower chart shows the range of values for the phase.

10. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 10 Reference variation across end of cycle

11. http://www.TEAsystems.com Terrence E. Zavecz tzavecz@TEAsystems.com Additional Phase-Analysis Graphics

12. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 12 Sensor Graphs Three libraries of graphics are created with the Phase Analysis.  Sensor Library  From “SensorResponse” spreadsheet  Details response of each sensor for the analysis  Rise Times Library  From “RiseTimes” spreadsheet  Details specifics about the range of time and temperature for each phase and phase- change.  Radial Library  From “RiseTimes” spreadsheet  Details process response as a function of the sensor’s radius on the substrate (wafer).

13. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 13 Time-cumeEnergy graph Shows the thermal energy injected into the substrate  E = (time * (Temperature-To)  To = threshold temperature One curve for each sensor To should be set the the Arrhenius threshold for the reaction. NOTE:  Any graph can be right-mouse clicked to edit the colors and display.

14. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 14 Temperature by sensor Range of temperature experienced by each sensor

15. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 15 Temperature variation from Phase mean Variance in temperature for each sensor  From the mean temperature of the phase

16. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 16 Cumulative Energy Integrated energy at each sensor  and the phase in which it occurred

17. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 17 Temperature Phase Error over time Phase error over time for each sensor

18. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 18 Rise-time slope over time Slope (deg/sec) as a funciton of time for each sensor

19. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 19 Slope vs Temperature Rise/Fall time slope vs Temperature Final temperature for each probe.

20. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 20 Locations of designated sensors on substrate Last tab in library

21. http://www.TEAsystems.com Terrence E. Zavecz tzavecz@TEAsystems.com Rise/Fall -Time Graphs Process Rise/Fall statistics

22. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 22 Cumulative energy Cumulative energy for each phase and sensor Threshold was set to 380 deg.  So temperatures below 380 deg yield no additional energy.  Note TC16 and TC2 who contribute very little.

23. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 23 Averge temperature for each phase

24. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 24 temperature Rise/fall for each phase

25. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 25 Time spent at each phase

26. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 26 Temperature at the start of the phase

27. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 27 Temperature at the end of the phase

28. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 28 Exact time of each phase transition start

29. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 29 Exact time of each phase transition end

30. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 30 Maximum slope experienced by the probe

31. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 31 Slope mean and Minimum for the probe

32. http://www.TEAsystems.com Terrence E. Zavecz tzavecz@TEAsystems.com Radial Response Library

33. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 33 Cumulative energy by Radial Position The Phase 3 fitted curve was added by right clicking on the graph and using the “Trend” tab

34. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 34 Various other graphs 2 nd order curves fitted to each phase

35. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 35 Uniformity Plots Selected 4 times for display:  1800 sec (345 deg)  2295 sec (379 deg)  2400 sec (400 deg)  2560 sec (400 deg)

36. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 36 Full screen setup

37. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 37 Individual displays

38. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 38 Plots with gridlines for transitions displays

39. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 39 Another thermal matrix

40. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 40 Animation and control of thermal swings 1.Select the time-slices for plotting. 2.Select the method of display. 3.Press “Create maps” to display contour plots. 4.After display, then the maps can be viewed individually. 5.Select either “One plot per screen” to view video of thermal display. 6.Animation control manages video presentation.

41. http://www.TEAsystems.com Terrence E. Zavecz tzavecz@TEAsystems.com Weir Temporal Response for Full Analysis Sequence

42. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 42 Thermal response ranges

43. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 43

44. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 44 Range across the wafer

45. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 45 Average times for each phase

46. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 46 Statistical ranges of each phase

47. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 47 Matrix Display

48. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 48 Rise Times Rise times plotted at 8 times over critical final rise Notice initial rise on left side of wafer at 2295 seconds with a slope range from 0.217 to 0.256 dec/sec rise

49. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 49 Plotting Energy, Rise Times and Cumulative Energy Select data type with drop-down control

50. Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 50 Threshold Analysis data Data from the “RiseTimesPhase” worksheet for 16 sensors Transition points are marked on the thermal curve as black squares with a yellow center (previous slide) Temperature variation