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San Jose State University Department of Mechanical Engineering
Large Optics Diamond Turning Machine Presented by Vu Dao Gilbert Wong March 20, 2003 ME 250 Precision Machine Design
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ME 250 Precision Machine Design
Agenda Introduction Advantages Precision Design Summary Q&A March 20, 2003 ME 250 Precision Machine Design
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ME 250 Precision Machine Design
Introduction LODTM Large Optics Diamond Turning Machine High precision two axis vertical lathe Diamond cutting tool 64 in diameter, 20 in height, 3000lb Most precise vertical axis lathe currently available. March 20, 2003 ME 250 Precision Machine Design
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ME 250 Precision Machine Design
March 20, 2003 ME 250 Precision Machine Design
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ME 250 Precision Machine Design
Advantages of LODTM Produce complex geometries Achieve high accuracy and repeatability Produce mirror finish surface March 20, 2003 ME 250 Precision Machine Design
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ME 250 Precision Machine Design
Radial 28 nm (280Å) Surface finish 4.3 nm (42Å) Analogy 280Å is ~ 3500 times smaller than diameter of human hair March 20, 2003 ME 250 Precision Machine Design
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ME 250 Precision Machine Design
Metrology System Metrology frame Kinematically mounted to LODTM frame by three blade flexures Super Invar Very low CTE, 0.63*10-6/°C Liquid Cooling Double-walled panels surrounding the metrology frame Uniform temperature of 0.001°F March 20, 2003 ME 250 Precision Machine Design
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ME 250 Precision Machine Design
Motion Control Interferometer Resolution .618nm Closed loop Relative measurement Baird, 1999 March 20, 2003 ME 250 Precision Machine Design
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ME 250 Precision Machine Design
Motion Control Baird, 1999 March 20, 2003 ME 250 Precision Machine Design
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ME 250 Precision Machine Design
Motion Control Bearings Fluid-film for smooth friction free motion Radial, Thrust Water cooled to prevent heat generation Analog Servos One for X and Z axis 25.4 mm/sec machining speed Fast Tool Servo March 20, 2003 ME 250 Precision Machine Design
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ME 250 Precision Machine Design
Cutting Motion Donaldson, 1983 March 20, 2003 ME 250 Precision Machine Design
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Environmental Control
Four pneumatic isolators Acoustic vibration isolation Air Flow (External) Uniform temperature of 0.01°F Patterson, 1987 March 20, 2003 ME 250 Precision Machine Design
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ME 250 Precision Machine Design
Summary Highest accuracy turning machine Strict temperature control Primarily used to produce precision lens March 20, 2003 ME 250 Precision Machine Design
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ME 250 Precision Machine Design
References Baird, E.D., Patterson, S.R, Donaldson, R.R., “The Laser Interferometer System for the Large Optics Diamond Turning Machine,” UCRL-ID , Lawrence Livermore National Laboratory, 1999. Donaldson, R.R., Patterson, S., “Design and Construction of A Large Vertical Axis Diamond Turning Machine,” UCRL-89738, Lawrence Livermore National Laboratory, 1983. McCue, H., “The Motion Control System for the Large Optics Diamond Turning Machine,” UCRL-86438, Lawrence Livermore National Laboratory, 1981. Patterson, S., “Inspection of the Large Optics Diamond Turning Machine,” UCRL-97696, Lawrence Livermore National Laboratory, 1987. Hamilton, Jim., “Large Optics Diamond Turning Machine,” UCRL-TB , Lawrence Livermore National Laboratory, 2002. March 20, 2003 ME 250 Precision Machine Design
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