1. National Nanofabrication Centre Centre for Nano Science and Engineering IISc, Bangalore, India Cleanroom Admin Committee Meeting Prabhakara Rao January 5, 2016

2.  November month charges o 179 Users - Total charges at a high of 35.2L o 20 NON-MITO users (Paid Users) - Total charges of 1.5 L o 159 MITO084 users - Total charges of 33.7 L o 85 users from CeNSE - Total charges of 23.5 L CeNSE users charged 66% of total value Reports

3. DataApril-15May-15June-15July-15Aug-15Sep-15Oct-15Nov-15 Total Users97110120103113122151179 MITO084 users 799195808793122159 Non-MITO Users 181925232629 20 Total users from CeNSE 5563605261647685 Total charges for MITO084 18.75 L15.5 L22.25 L22.47 L22.18 L25.7 L27.3 L33.7 L Total charges for Paid users 2.3 L1.86 L2.5 L2.95 L3.54 L4 L3L1.5 L

4. April 2015 - Nov 2015 - INUP project Status completed 31 ongoing 2 Pending 30 Summary

5. Minutes of the Last Meeting-Dec 1 st,2015  Minutes of the last meeting has to be presented.  Availability of Inline tools in FOM system should be displayed. Displayed  If a person is penalized twice for same offense then the penalty point should be doubled. Being Implemented  Emergency door should not be locked with pad lock and when the door is opened it should be linked with an alarm with BMS. Work is under progress,will be completed by 15 th Jan,2016  Quotation for Fire Hydrant system accessories to be obtained. Quotation is obtained

6. Quotation

7. Sl.noProfessorProject CodeAmount 1.Prof. S. RaghavanCDAC0018/ Consumables21,63,753.00 2.Prof. S. RaghavanMITO-0985,70,000.00 3.Prof.Rudra PratapNPMA-0349,00,000.00 4.Prof.Rudra PratapNPMA-03484,304.00 5.Prof.Navakanta BhatBIARC1,50,000.00 6.Prof.Navakanta BhatNPMA-0356,12,365.00 7.Prof.Navakanta BhatNPMA-03551,000.00 8 Prof.Rudra PratapNPMA-034 7,00,000.00 Internal Users from April- Nov,2015 Total Amount – Rs.52,31,422

8. Sl.no OrganizationProject/Services Amount in Rs 1. SITAR Bangalore Gold Evaporation2,00,000 2. TIFRMicrofluidics SU8 master22,000 3. Delhi University DRIE work91,000 External Projects/Services Completed Upto Nov,2015 Total Amount – Rs. 3,13,000

9. Penalty Points (July 2014-Nov 2015) 1 24/07/2 014 Chandrash ekhar PrajapatiPost Doc Prof. Navakanta Bhat CeNSE15 Usage off chemical wet benches without prior booking. 2 25/07/2 014 Tanushree ChoudhuryPhD Student Prof. Srinivasan Raghavan CeNSE 30 Tanushre e- 30 EVG Aligner 2-inch chuck damaged 3 25/07/2 014 Prem Prakash SinghPhD Student Prof. Rudra Pratap CeNSE 15Booking slots offensible 4 9/2/201 5 Vineet Kumar SinghPHD Student Prof. Sushobha n Avasthi CeNSE 30 Vineet Singh- 30 E-Beam Evaporation crucible got punctured due to extended evaporation. 2 weeks removed the access from cleanroom.(9/2/201 5 - 23/2/2015 5 1/5/201 5Kshama Project Assistant Prof. Prosenjit SenCeNSE Warnin g Using the wet bench without booking. 6 4/6/201 5 Amiya BanrejeeStudent Prof. Srinivasan Raghavan CeNSEWarnin g using wet bench without authorization/training 7 5/1/201 5 Sandip MondalStudent Prof. Venkatara manPhysics15 Sandip Mondal- 15 using wet bench without booking,warned sometime back, but repeated again 1DateNameDesignation Professor Departmen t Penalty points Cumulative Points Remarks Suspension Status

10. Penalty Points S.NoDateNameDesignationProf.Department Penalty Points Cumulative Points Remarks Suspension Status 8 Sept 2014SaloniPHD Student Prof. Prosenjit SenCeNSE15 Using HF vaporizer carelessly, removing HF vaporizer cover without gloves and necessary PPE 9 6/1/201 5SaloniPHD Student Prof. Prosenjit SenCeNSE30Saloni-45 Leaving chemicals on the bench without identification chit & using glassware from other benches.Prof. Srinivasan Raghavan Independent status Suspended for 1 week (from 8th June- 15th June) 10 5/5/201 5SamathaPHD Student Prof. Navakant BhatCeNSE10Misusing the slot timing 11 5/5/201 5RashmiPHD Student Prof. Navakant BhatCeNSE10Misusing the slot timing 12 12/6/20 15 Prem Prakash SinghPhD Student Prof. Rudra PratapCeNSE15 Prem Prakash Singh - 30 Use of equipment without prior reservation Independent status suspended for 2 weeks for raith Pioneer(20th June- 4th July) 13 12/6/20 15Richa MitraPHD Student Prof. Anindya das Physics 10 use of equipment without prior reservation but she gave back on request from Mr Abhishek

11. Penalty Points S.NoDateNameDesignationProf.Department Penalty Points Cumulative Points Remarks Suspension Status 14 22/6/20 15 Chandrashekh ar PrajapatiPost Doc Prof. Navakanta Bhat CeNSE10 Chandra shekhar Prajapati 25 For booking and not using Raith Pioneer between 9am-3pm 15 2/9/201 5 Krishna Bharadwaja Prof. Rudra PratapCeNSE45 Krishna Bharadwaj a 45 1. Using wet bench without booking slot: 15 points 2. Etching Cu, which is not allowed: 15 points 3. Exchanging glassware Suspended for a week (from 1st Sept- 9th Sept) 16 3/9/201 5SamathaPhD Student Prof. Navakanta BhatCeNSE10 Samatha - 20 Not informing about cancellation of slot. 17 1/10/20 15Adil MeershaPhD Student Prof. Mayank SrivastavaCeNSE15Adil-15 For breaking of carrier wafer 18 1/10/20 15 Akshdep SharmaPostdoc Prof. Akshay NaikCeNSE30 Akshdeep- 30 1. Working on the wet bench without authorization (that too using BHF) 2.Using someone else's slot 19 15/10/2 015 Puneeth Sharma Project Assistant Prof. Navakanta Bhat CeNSE30 Given access to the un- authorized user Removed the access from cleanroom(15th Oct-22nd Oct)

12. Penalty Points S.NoDateNameDesignationProf.Department Penalty Points Cumulative Points Remarks Suspension Status 20 15/10/2 015Abhishek K AGraduate Prof.Ambarish GhoshCeNSE30 Given access to the un- authorized user Removed the access from cleanroom(15th Oct-22nd Oct) 21 16/10/2 015 Kazi Rafsanjani AminGraduateProf.Aveek BidPhysics30 Un-authorized usage of RIE tool 7 times Suspended for a month(16th Oct-16th Nov) 22 19/10/2 015Ajay DangiGraduate Prof.Rudra PratapCeNSE100 Tampering with the control system & Un- authorized usage Suspended for a month(19th Oct-19th Nov) 23 26/10/2 015 Prem Prakash SinghPhD Student Prof. Rudra PratapCeNSE2050Violation of protocols 24 27/10/2 015 Rituparna Biswas Prof.Prosenjith SenCeNSE15 Violation of protocols 25 29/10/2 015 Dharitri NarjareeGraduate Prof.Akshay NaikCeNSE30 Violation of wet etch Protocols Removed the access from cleanroom(29th Oct-4thNov)

13. Penalty Points –November 2015 S.NoDateNameDesignationProf.Department Penalty Points Cumulative Points Remarks Suspension Status 26 4/11/20 15 Amiya BanrejeeGraduate Prof.Srinivas Vasu RaghavanCeNSE15 Violation of wet bench Protocols 27 9/11/20 15Sandeep vuraGraduate Prof.Srinivas Vasu RaghavanCeNSE15 Violation of protocols Removed the access from cleanroom (9thNov- 15 thNov) 28 10/11/2 015Nivedita BasuGraduate Prof. Navakanta Bhat CeNSE15 Not Switching off the tools 29 23/11/2 015 Vineet Kumar SinghPHD Student Prof. Sushobhan AvasthiCeNSE3060 For not wearing goggles and using without booking slot. Removed the access from cleanroom( 23rd Nov- 29th Nov2015) 30 26/11/2 015Vishal Baloria Prof. Navakanta Bhat CeNSE30 Violation of Protocols Removed the access from cleanroom (26thNov - 9thDec 2015) 31 27/11/2 015 Nithin BhandariProf.KN BhatCeNSE15 Not using goggles in litho wet benches 32 27/11/2 015AnushreeT.SrinivasECE15 Not using goggles in litho wet benches

14. Penalty Points - November 2015 S.NoDateNameDesignationProf.Department Penalty Points Cumulative Points Remarks Suspension Status 33 27/11/2 015 Debadrita PariaGraduate Dr.Ambarish GhoshPhysics15 Not using goggles in litho wet benches 34 27/11/2 015 Nayana rameshPost Doc Prof.Srinivas vasuCeNSE15 For not wearing goggle in litho wet bench 35 27/11/2 015Anumitra SilProf.Anil kumarPhysics15 For not wearing goggle in litho wet bench 36 30/11/2 015 Samatha BenedictPhD Student Prof.Navankant a BhatCeNSE1535 For not wearing goggle in litho wet bench 37 30/11/2 015Ajay DangiGraduate Prof.Rudra PratapCeNSE15115 For not wearing goggle in litho wet bench 38 1/12/20 15 Samatha BenedictPhD Student Prof.Navankant a BhatCeNSE1550 For not wearing goggle in litho wet bench

15. Annual maintenance

16. Fire alarm system plan by Honeywell

17. Room Void Protection

18. Cleanroom FAS estimate given by Honeywell.  Fire alarm addressable panel Morley make with 60 detectors, - 6,05,995.00 INR  VESDA system 15 nos with sampling points, power supply- 36,14,091.00 INR

19. BMS RE-CONFIGURATION STATUS CRITICAL AND NOT WORKING No of items which were not working No of items rectified 17 NEED TO BE CALIBRATED No of items which were not working No of items rectified Remarks 1310 Material Required DESIGNED BUT NOT CONNECTED BY PROJECT TEAM No of items Which were not connected No of Items rectified Remarks 4214 Time period required((approx. 1 month)

20. Equipment & Process Monitoring  Updates Review done on processes which are/need to be monitored for all Bays(Thin Films, Dry etch, Wet Bench, Furnace, Litho, Inline Characterization). Process &Tool Monitoring document prepared (Draft) and under review for all processes. Target & process spec for each item is defined(out-of-control limits). Monitoring frequency for each item is defined,e.g first Monday of every month Ownership/Back up responsibility is defined. Links to Process Monitoring procedure document is defined. Monitoring data to be updated into Trend charts, which will be reviewed in the NTC monthly meetings. Trend charts to be open to all NNfC users ( IT infrastructure reqd.)  To Do/Follow up Actions Monitoring procedure for each item has to be defined and documented, ECD -- Feb’16 Out –of-Control Action Plan for each item has to be defined and documented, ECD – Feb’16.

21. Job Scope Definition and Annual Performance Review  Job Scope of Facility Technologist, Tech. Manager, Process Integration etc. Job Scope/Responsibilities of FT &SFT to be defined,documented and implemented by the Tech Manager,ECD Jan’16. Process Integration Job Scope/ Responsibilities should be clearly defined, documented and implemented, ECD Jan’16. Technology Manager Job Scope/Responsibilities to be defined,documented and implemented.  Performance Review for all staff will be quantified, as of 2016, based on the below metrics. Tool Capability Enhancement /Continuous improvement related work Process Development/Process Requests related work. Ease of doing business with others, punctuality, discipline etc.

22. External Project Handling Procedure at NNfC  Policy for External project handling should be clearly defined and documented.  Certain aspects have been decided in the External Project review meetings. Access to Fab for external users through INUP.  Currently, no external industry users are being allowed inside during processing, w/o prior permission from CEO/Tech managers.  No biometric access through finger, only through access card available at INUP office, returnable to INUP office /PI in charge in the evening.  External projects coming through INUP to be executed during office hours only IP protection of Process Flow/Design of the users.  PI/Anyone having access to User data are not allowed to share it with other users.  It cannot be stored in public places like WINSCP…  Specific storage access space is identified and access permissions will be defined.  Project coding to be started off for all new external projects. FOM slot booking to be done based on project codes. IP protection of NNfC Developed/Optimized processes for the external users.  Process improvement/Process innovation developed by NNfC team will not be shared with external user. But, it will be documented as a “Best Known Method” so that it can be used by NNfC for other projects.  Lot traveller document will not be shared with external user. It is only for internal tracking purposes. It will not have any recipe parameter details. Only ranges to be mentioned.  Process Runsheets for INUP sessions should be generic in nature.  No public presentations of NNfC External Project work are allowed without committee clearance. e.g invited talk, articles, TV display, Cense newsletter,1-1 discussions among ourselves… Only Published materials can be displayed.

23. IT Infrastructure  External users: new Website under construction.  Internal Users: Twiki will be replaced by another portal. Process Request database, Process/Tool capability matrix Database, SPC(Trend Charts), Technical reports….) Hardware already available(Server identified) Process development, by Gubbi labs (50K for process development,30K for AMC)  Direct Billing system S/W through ERP is in progress. Purchase orders, Staff Leave will be processed through ERP. Tentative implementation by Jan’16.

24. Lithography Bay 5 th January, 2016 Equipment's: Laser writer, MicroTech Laser writer, Heidelberg EVG Mask aligner MJB4 mask aligner EVG Bonder E‐Line system Pioneer E‐beam system Gopal

26. Litho - Raith - Equipment's Utilization Chart – December-2015

27. Maintenance Issues  All Litho tools are up after raw power failure and yearly utility maintenance.

28. Furnaces and wet benches Savitha P

29. Equipment Utilization

30. Dry Etch and Thin films & Process Integration January 5 th,2016 Sunanda Babu

32. PECVDDRIE Anelva Sputter

33. INUP External Project Status(Dec’15) ProjectPI OwnerStart DateECD Mask Layers Status TWT SWSOwner: Siva Bkup:Sabiha Jun’15May’162First prototype device handed over to customer AccelerometerOwner: Siva Bkup:Sabiha Jun ’12Mar’167IIT Mumbai for CMP option being explored. Micro heaterOwner: Sabiha Bkup:Siva Aug’12continuo us 58 th visit ongoing, membrane processing with PECVD oxide Micro NeedlesOwner: Sabiha Bkup:Siva Jul’14continuo us 24” DSP wafers available, pending customer feedback on requirement.

34. INUP External Project Status(Dec’15) ProjectPI OwnerStart DateECD Mask Layers Status NAL Insulator Deposition and Etching (Prasanta Choudhury) Owner: Sabiha Bkup:Siva Aug’12continuousNA2 2” wfrs processed ( Oxide/Nitride deposition, RIE pad etch, PR strip and Pad resistance measurement),Pad resistance meets customer requirements, awaiting remaining 2 samples from NAL. BMSIT Gold electrodes( Sreedevi) Owner: Sabiha Bkup:Siva Sep’151Feasible, Process estimate provided. Payment process ongoing. IIT Madras Thermal Interface resistance measurement of thin films, like Graphene on substrates( Arvind) Owner: Sabiha Bkup:Siva Sep’15Feasible, process estimate provided, pending customer feedback.

35. INUP External Project Status(Dec’15) ProjectPI OwnerStart DateECD Mask Layers Status SNS college of Engineering Piezoelectric cantilever for energy harvesting( Sreeja), PhD project. Owner: Siva Bkup:Sabiha Nov’154Initial discussion with student. AlN replaces PZT as piezo material. Need optimization of AlN film in Sputter-2. Pending more feedback from Requestor. Asarva chips/BNMIT Blood pressure sensor (Veena) Owner: Siva Bkup:Sabiha Sep’15Feasible, Process estimate provided NIT Trichy Pressure Sensor(Sujan) Owner: Siva Bkup:Sabiha Sep’15Feasible, Process estimate provided. Dr Palash Basu(IIST Trivandrum,)Graphene FET Owner: Sangeeth Bkup: Siva Oct’15Previous work has been done. To continue further. Requires Al2O3 characterization. Dr Anzari(IITDM) Cantilever project Owner: Sabiha Bkup: Siva Sep’15Process estimate provided, pending customer feedback

36. INUP External Project Status(Dec’15) ProjectPI OwnerStart DateECD Mask Layers Status MSRIT RF MEMS switch(2014-2015 (Laxmi) Owner: Siva Bkup:Sabiha Oct’14May’154Closed Delhi University DRIE processing( back side Si etch) Owner: Lava Bkup: Aditi Sep’15Oct’15NAClosed. Cr/Au Deposition for SITAR(e-beam evaporation) Owner: Chandra Bkup: Suresh ongoingNA Cr/Au(10nm/20nm)-8 6” Si wfrs Cr/Au(60nm/100nm)-6 6” glass wfrs Cr/Au (10nm/20nm)- 2 6” Si wfrs Cr/Au ( )– 4 6” glass wfrs Microfluidics TIFR Hyderabad Dr Seshagiri Rao( Fabrication of SU8 master mold) Owner; Sabiha Bkup: Sangeeth Oct’15Nov’151Closed.

37. Thank you