1. Pre-layout prediction of interconnect manufacturability Phillip Christie University of Delaware USA Jose Pineda de Gyvez Philips Research Laboratories The Netherlands

2. BEOD and BEOL Optimization The BEBOP Project Back end of line Dielectric processes Metal processes Yield Planarization Silicon processes Front end of line Back end of design Floor planning Placement Routing Timing closure Synthesis Front end of design Technology file SLIP Tools (MATLAB WireTools)

3. Netlist signature Netlist Floorplan Placement Yield Routing Terminals per net (tpn) Nets per cell (npc)

4. Rent exponent Netlist Floorplan Placement Yield Routing

5. Wiring signature cube 2 3 4 5 6 2 4 6 0.6 0.8 1 npc tpn p Netlist Floorplan Placement Yield Routing

6. Floorplan design Netlist Floorplan Placement Yield Routing

7. Site occupancy probability Netlist Floorplan Placement Yield Routing Probability of occupancy Number of available sites Linear axes

8. Model Development Wire length distribution p=1.0 0.8 0.7 0.6 0.9 0.5 Netlist Floorplan Placement Applications Routing

9. Routing Model Netlist Floorplan Placement Yield Routing implemented with via blocking

10. Netlist Floorplan Placement Yield Routing Yield prediction

11. Netlist Floorplan Placement Yield Routing

12. Cut model Netlist Floorplan Placement Yield Routing defect size, x wire length, l x=1.5w x=1.2w x=w wire width, w length of cut critical area = l width of critical area = x-w

13. Bridge model length of bridge critical area = m+x x=1.2s x=1.5s x=s wire overlap length, m Netlist Floorplan Placement Yield Routing

14. Probability of Failure Netlist Floorplan Placement Yield Routing Defect size distributionSensitivityProbability of Failure = X

15. Cut sensitivity prediction Netlist Floorplan Placement Yield Routing 3 0123 x 10 -6 0 0.2 0.4 0.6 0.8 1 Defect size Sensitivity

16. Bridge sensitivity prediction Netlist Floorplan Placement Yield Routing 0123 x 10 -6 0 0.2 0.4 0.6 0.8 1 Defect size Sensitivity

17. Theory versus experiment Netlist Floorplan Placement Yield Routing POF n (predicted)2.92%2.92%2.91%2.90%0.61%0.34% POF n (extracted)2.80%2.53%2.09%2.30%0.49%0.36% POF n (predicted)1.14%1.14%1.13%1.13%0.21%0.21% POF n (extracted)1.82%1.53%1.17%1.13%0.28%0.16% Layer123456 Cuts Bridges

18. Conclusions  Wiretools is a program development environment for interconnect analysis  Wiretools enables technology and design exploration (BEBOP)  Cut model easy to implement if wire length distribution known  Bridge model can be modeled using basic probability theory  Yield modeling is critical for interconnect geometry optimization

19. Acknowledgements  William Rey, Leo Sevat, Martijn Bennebroek  Philips Research Laboratories  National Science Foundation (CCR-9872159)