1. Nelson Applied Research, Inc. 2142 – N. 88 th St. Seattle, WA. 98103 USA 206-498-9447 Craigmail @ aol.com Design and Performance of Piezopumps Craig E. Nelson - Consultant Engineer

2. Nelson Applied Research, Inc. 2142 – N. 88 th St. Seattle, WA. 98103 USA 206-498-9447 Craigmail @ aol.com 1.Maximum pressure available seems to be on the order of about 12 PSI 2.Flow rate at a pressure of 1 PSI seems to be about 5ml/min for 1 inch dia. piezos 3.Pumping rates for liquid seem to be about 3.5 that for gas at 1 PSI back pressure Typical Commercial Piezo Pump 1

3. Nelson Applied Research, Inc. 2142 – N. 88 th St. Seattle, WA. 98103 USA 206-498-9447 Craigmail @ aol.com Piezo Pump Performance Capability About 5 PSI Typical Commercial Piezo Pump 2

4. Nelson Applied Research, Inc. 2142 – N. 88 th St. Seattle, WA. 98103 USA 206-498-9447 Craigmail @ aol.com 11.6 PSI (100 hecto Pascals = 1.45 PSI) Typical Commercial Piezo Pump 3

5. Nelson Applied Research, Inc. 2142 – N. 88 th St. Seattle, WA. 98103 USA 206-498-9447 Craigmail @ aol.com 5.8 PSI 2.2 PSI (100 hecto Pascals = 1.45 PSI) About 1 PSI Typical Commercial Piezo Pump 4

6. Nelson Applied Research, Inc. 2142 – N. 88 th St. Seattle, WA. 98103 USA 206-498-9447 Craigmail @ aol.com Piezo Pump Parts and Construction

7. Nelson Applied Research, Inc. 2142 – N. 88 th St. Seattle, WA. 98103 USA 206-498-9447 Craigmail @ aol.com Inside a PAR Corporation Pump

8. Nelson Applied Research, Inc. 2142 – N. 88 th St. Seattle, WA. 98103 USA 206-498-9447 Craigmail @ aol.com Piezo Pump Elements

9. Nelson Applied Research, Inc. 2142 – N. 88 th St. Seattle, WA. 98103 USA 206-498-9447 Craigmail @ aol.com Disc Type Valve Typical Piezo Pump Assembly Piezo Pump Elements

10. Nelson Applied Research, Inc. 2142 – N. 88 th St. Seattle, WA. 98103 USA 206-498-9447 Craigmail @ aol.com 15, 27 and 35 mm Piezo Disks Typical Piezo Disks

11. Nelson Applied Research, Inc. 2142 – N. 88 th St. Seattle, WA. 98103 USA 206-498-9447 Craigmail @ aol.com Summary The performance of several commercially available piezopumps has been presented. Some aspects of the design and construction of typical piezopumps were shown.