1. National Nanofabrication Centre Centre for Nano Science and Engineering IISc, Bangalore, India Cleanroom Admin Committee Meeting Prabhakara Rao December 1, 2015

2.  October month charges o 151 Users - Total charges at a high of 30.5L o 29 NON-MITO users (Paid Users) - Total charges of 3 L o 122 MITO084 users - Total charges of 27.3 L o 76 users from CeNSE - Total charges of 22.2 L CeNSE users charged 72% of total value Reports

3. DataApril-15May-15June-15July-15Aug-15Sep-15Oct-15 Total Users97110120103113122151 MITO084 users 799195808793122 Non-MITO Users 181925232629 Total users from CeNSE 55636052616476 Total charges for MITO084 18.75 L15.5 L22.25 L22.47 L22.18 L25.7 L27.3 L Total charges for Paid users 2.3 L1.86 L2.5 L2.95 L3.54 L4 L3L

4. April 2015 - Nov 2015 - INUP project Status completed 27 ongoing 2 Pending 25 Summary

5. Sl.noProfessorProject CodeAmount 1.Prof. S. RaghavanCDAC0018/ Consumables21,63,753.00 2.Prof. S. RaghavanMITO-0985,70,000.00 3.Prof.Rudra PratapNPMA-0349,00,000.00 4.Prof.Rudra PratapNPMA-03484,304.00 5.Prof.Navakanta BhatBIARC1,50,000.00 6.Prof.Navakanta BhatNPMA-0356,12,365.00 7.Prof.Navakanta BhatNPMA-03551,000.00 Internal Users Total Amount – 45,31,422

6. Sl.no OrganizationProject/Services Amount in Rs 1. SITAR Banglore Gold Evaporation2,00,000 2. TIFRMicrofluidics SU8 master22,000 3. Delhi University DRIE work91,000 External Projects/Services Completed Total Amount – Rs. 3,13,000

7. Penalty Points (July 2014-Nov 2015) 1 24/07/2 014 Chandrash ekhar PrajapatiPost Doc Prof. Navakanta Bhat CeNSE15 Usage off chemical wet benches without prior booking. 2 25/07/2 014 Tanushree ChoudhuryPhD Student Prof. Srinivasan Raghavan CeNSE 30 Tanushre e- 30 EVG Aligner 2-inch chuck damaged 3 25/07/2 014 Prem Prakash SinghPhD Student Prof. Rudra Pratap CeNSE 15Booking slots offensible 4 9/2/201 5 Vineet Kumar SinghPHD Student Prof. Sushobha n Avasthi CeNSE 30 Vineet Singh- 30 E-Beam Evaporation crucible got punctured due to extended evaporation. 2 weeks removed the access from cleanroom.(9/2/201 5 - 23/2/2015 5 1/5/201 5Kshama Project Assistant Prof. Prosenjit SenCeNSE Warnin g Using the wet bench without booking. 6 4/6/201 5 Amiya BanrejeeStudent Prof. Srinivasan Raghavan CeNSEWarnin g using wet bench without authorization/training 7 5/1/201 5 Sandip MondalStudent Prof. Venkatara manPhysics15 Sandip Mondal- 15 using wet bench without booking,warned sometime back, but repeated again 1DateNameDesignation Professor Departmen t Penalty points Cumulative Points Remarks Suspension Status

8. Penalty Points S.NoDateNameDesignationProf.Department Penalty Points Cumulative Points Remarks Suspension Status 8 Sept 2014SaloniPHD Student Prof. Prosenjit SenCeNSE15 Using HF vaporizer carelessly, removing HF vaporizer cover without gloves and necessary PPE 9 6/1/201 5SaloniPHD Student Prof. Prosenjit SenCeNSE30Saloni-45 Leaving chemicals on the bench without identification chit & using glassware from other benches.Prof. Srinivasan Raghavan Independent status Suspended for 1 week (from 8th June- 15th June) 10 5/5/201 5SamathaPHD Student Prof. Navakant BhatCeNSE10Misusing the slot timing 11 5/5/201 5RashmiPHD Student Prof. Navakant BhatCeNSE10Misusing the slot timing 12 12/6/20 15 Prem Prakash SinghPhD Student Prof. Rudra PratapCeNSE15 Prem Prakash Singh - 30 Use of equipment without prior reservation Independent status suspended for 2 weeks for raith Pioneer(20th June- 4th July) 13 12/6/20 15Richa MitraPHD Student Prof. Anindya das Physics 10 use of equipment without prior reservation but she gave back on request from Mr Abhishek

9. Penalty Points S.NoDateNameDesignationProf.Department Penalty Points Cumulative Points Remarks Suspension Status 14 22/6/20 15 Chandrashekh ar PrajapatiPost Doc Prof. Navakanta Bhat CeNSE10 Chandra shekhar Prajapati 25 For booking and not using Raith Pioneer between 9am-3pm 15 2/9/201 5 Krishna Bharadwaja Prof. Rudra PratapCeNSE45 Krishna Bharadwaj a 45 1. Using wet bench without booking slot: 15 points 2. Etching Cu, which is not allowed: 15 points 3. Exchanging glassware Suspended for a week (from 1st Sept- 9th Sept) 16 3/9/201 5SamathaPhD Student Prof. Navakanta BhatCeNSE10 Samatha - 20 Not informing about cancellation of slot. 17 1/10/20 15Adil MeershaPhD Student Prof. Mayank SrivastavaCeNSE15Adil-15 For breaking of carrier wafer 18 1/10/20 15 Akshdep SharmaPostdoc Prof. Akshay NaikCeNSE30 Akshdeep- 30 1. Working on the wet bench without authorization (that too using BHF) 2.Using someone else's slot 19 15/10/2 015 Puneeth Sharma Project Assistant Prof. Navakanta Bhat CeNSE30 Given access to the un- authorized user Removed the access from cleanroom(15th Oct-22nd Oct)

10. Penalty Points S.NoDateNameDesignationProf.Department Penalty Points Cumulative Points Remarks Suspension Status 20 15/10/2 015Abhishek K AGraduate Prof.Ambarish GhoshCeNSE30 Given access to the un- authorized user Removed the access from cleanroom(15th Oct-22nd Oct) 21 16/10/2 015 Kazi Rafsanjani AminGraduateProf.Aveek BidPhysics30 Un-authorized usage of RIE tool 7 times Suspended for a month(16th Oct-16th Nov) 22 19/10/2 015Ajay DangiGraduate Prof.Rudra PratapCeNSE100 Tampering with the control system & Un- authorized usage Suspended for a month(19th Oct-19th Nov) 23 26/10/2 015 Prem Prakash SinghPhD Student Prof. Rudra PratapCeNSE2050Violation of protocols 24 27/10/2 015 Rituparna Biswas Prof.Prosenjith SenCeNSE15 Violation of protocols 25 29/10/2 015 Dharitri NarjareeGraduate Prof.Akshay NaikCeNSE30 Violation of wet etch Protocols Removed the access from cleanroom(29th Oct-4thNov)

11. Penalty Points –November 2015 S.NoDateNameDesignationProf.Department Penalty Points Cumulative Points Remarks Suspension Status 26 4/11/20 15 Amiya BanrejeeGraduate Prof.Srinivas Vasu RaghavanCeNSE15 Violation of wet bench Protocols 27 9/11/20 15Sandeep vuraGraduate Prof.Srinivas Vasu RaghavanCeNSE15 Violation of protocols Removed the access from cleanroom (9thNov- 15 thNov) 28 10/11/2 015Nivedita BasuGraduate Prof. Navakanta Bhat CeNSE15 Not Switching off the tools 29 23/11/2 015 Vineet Kumar SinghPHD Student Prof. Sushobhan AvasthiCeNSE3060 For not wearing goggles and using without booking slot. Removed the access from cleanroom( 23rd Nov- 29th Nov2015) 30 26/11/2 015Vishal Baloria Prof. Navakanta Bhat CeNSE30 Violation of Protocols Removed the access from cleanroom (26thNov - 9thDec 2015) 31 27/11/2 015 Nithin BhandariProf.KN BhatCeNSE15 Not using goggles in litho wet benches 32 27/11/2 015AnushreeT.SrinivasECE15 Not using goggles in litho wet benches

12. Penalty Points - November 2015 S.NoDateNameDesignationProf.Department Penalty Points Cumulative Points Remarks Suspension Status 33 27/11/2 015 Debadrita PariaGraduate Dr.Ambarish GhoshPhysics15 Not using goggles in litho wet benches 34 27/11/2 015 Nayana rameshPost Doc Prof.Srinivas vasuCeNSE15 For not wearing goggle in litho wet bench 35 27/11/2 015Anumitra SilProf.Anil kumarPhysics15 For not wearing goggle in litho wet bench 36 30/11/2 015 Samatha BenedictPhD Student Prof.Navankant a BhatCeNSE1535 For not wearing goggle in litho wet bench 37 30/11/2 015Ajay DangiGraduate Prof.Rudra PratapCeNSE15115 For not wearing goggle in litho wet bench 38 1/12/20 15 Samatha BenedictPhD Student Prof.Navankant a BhatCeNSE1550 For not wearing goggle in litho wet bench

13. (DO)(AO)(DI)(AI) M & E SYSTEM EQUIPMENT Quantity Remote Start/Stop Command Humidifier Heater 2 way on/off valve Motorised Damper Control Valve By-Pass Valve Control VFD On/Off Status Trip Alarm Motorised Valve Open/Close Fault Alarm Hi-Lo Level Filter Dirty Alarm Motorised Damper Supply Air Temperature Water Supply Temperature Water Return Temperature Room Temperature Room Humidity Air Flow Differential Pressure Voltage Ampere PH Reading Pressure Reading Flow Resistivity PPM Fluoride HF&Acid Alkaline level S/NSystem DDC CONTROL PANEL 1190361810036 1.0CH1 to CH333 33 2.0CHWP1 to CHWP333 33 3.0CHW Header (By-Pass)1 1 1 11 1 4.0DCP1&DCP222 1 22 1 5.0PCW1&PCW222 1 222 1 1 6.0MAU1 to MAU33313 43 3333 643 2 7.0CDA22 22 11 8.0House Vacuum P1&P222 22 9.0Absorbtion Dryer111 11 10.0Ultra Pure Water22 22 222 11.0Process Vacuum P1&P222 22 1 12.0Raw Power2 2 22 13.0Diesel Generator2 2 22 14.0UPS3 3 33 15.0WWT-Fluoride 12 16.0HF Sump Pump11 11 17.0Alkaline Sump Pump11 11 Sub Total : 241304425312440064331002277043212 I/O Used:14932116937 Total Spare:571133211 DDC CONTROL PANEL 284211524 1.0Dry Coil Units42 10 2.0Gas System1 1 3.0Fire System1 1 4.0General Exhaust11 111 1 5.0Wet Scrubber11 111 1 1 1 6.0Dry Scrubber11 111 1 Sub Total : 3000010033302100000 3000100000 I/O Used:49313924 Total Spare:35182150 TOTAL I/O POINTS COUNT:198 35247861 TOTAL SPARE POINTS:92 199535 Note working fine Made it working by us Parts needs to be changed not connected BMS Present status

14. Not connected EquipmentAction pointD/APOATarget date CDA Remote Start/Stop CommandDONeed to check the cabling, if there is a provision from equipment we can connect.31-Oct-15 CDA Pressure ReadingAIModification required, partial vendor involvement required.31-Oct-15 CDA FlowAIModification required, partial vendor involvement required.31-Oct-15 Absorbtion Dryer1 Remote Start/Stop CommandDONeed to check the cabling, if there is a provision from equipment we can connect.31-Oct-15 Absorbtion Dryer1 On/Off StatusDINeed to check the cabling, if there is a provision from equipment we can connect.31-Oct-15 Absorbtion Dryer1 Trip AlarmDINeed to check the cabling, if there is a provision from equipment we can connect.31-Oct-15 Ultra Pure Water On/Off StatusDINeed to check the cabling, if there is a provision from equipment we can connect.31-Oct-15 Ultra Pure Water Trip AlarmDINeed to check the cabling, if there is a provision from equipment we can connect.31-Oct-15 Ultra Pure Water Pressure ReadingAINeed to check the cabling, if there is a provision from equipment we can connect.31-Oct-15 Ultra Pure Water FlowAINeed to check the cabling, if there is a provision from equipment we can connect.31-Oct-15 Ultra Pure Water ResistivityAINeed to check the cabling, if there is a provision from equipment we can connect.31-Oct-15 Ultra Pure Water Remote Start/Stop CommandDONeed to check the cabling, if there is a provision from equipment we can connect.31-Oct-15 Process Vacuum P1&P2 Remote Start/Stop CommandDONeed to check the cabling, if there is a provision from equipment we can connect.31-Oct-15 Process Vacuum P1&P2 Trip AlarmDINeed to check the cabling, if there is a provision from equipment we can connect.31-Oct-15 Process Vacuum P1&P2 Pressure ReadingAINeed to check the cabling, if there is a provision from equipment we can connect.31-Oct-15 Raw Power On/Off StatusDINeed to check the cabling, if there is a provision from equipment we can connect.31-Oct-15 Raw Power VoltageAIVendor involvement required31-Oct-15 Raw Power AmpereAIVendor involvement required31-Oct-15 Diesel Generator 1 on/off StatusAINeed to check the cabling, if there is a provision from equipment we can connect.31-Oct-15 Diesel Generator 2 on/Off StatusAINeed to check the cabling, if there is a provision from equipment we can connect.31-Oct-15 Diesel Generator VoltageAIVendor involvement required31-Oct-15 Diesel Generator AmpereAIVendor involvement required31-Oct-15 UPS 1 On/Off StatusDINeed to check the cabling, if there is a provision from equipment we can connect.31-Oct-15 UPS 1 VoltageAIVendor involvement required31-Oct-15 UPS 1 AmpereAIVendor involvement required31-Oct-15 UPS 2 On/Off StatusDINeed to check the cabling, if there is a provision from equipment we can connect.31-Oct-15 UPS 2 VoltageAIVendor involvement required31-Oct-15 UPS 2 AmpereAIVendor involvement required31-Oct-15 UPS 3 On/Off StatusDINeed to check the cabling, if there is a provision from equipment we can connect.31-Oct-15 UPS 3 VoltageAIVendor involvement required31-Oct-15 UPS 3 AmpereAIVendor involvement required31-Oct-15 UPS cense On/Off StatusDINeed to check the cabling, if there is a provision from equipment we can connect.31-Oct-15 UPS cense VoltageAIVendor involvement required31-Oct-15 UPS cense AmpereAIVendor involvement required31-Oct-15 WWT-Fluoride PPM FluorideAICalibration required.31-Oct-15 WWT-Fluoride HF&Acid Alkaline levelAICalibration required.31-Oct-15 HF Sump Pump Remote Start/Stop CommandDONeed to check the cabling, if there is a provision from equipment we can connect.31-Oct-15 HF Sump Pump On/Off StatusDINeed to check the cabling, if there is a provision from equipment we can connect.31-Oct-15 HF Sump Pump Trip AlarmDINeed to check the cabling, if there is a provision from equipment we can connect.31-Oct-15 Alkaline Sump Pump Remote Start/Stop CommandDONeed to check the cabling, if there is a provision from equipment we can connect.31-Oct-15 Alkaline Sump Pump On/Off StatusDINeed to check the cabling, if there is a provision from equipment we can connect.31-Oct-15 Alkaline Sump Pump Trip AlarmDINeed to check the cabling, if there is a provision from equipment we can connect.31-Oct-15

15. Staff Concerns Wage Revision Medical Insurance

16. Lithography Bay 1 st December, 2015 Equipment's: Laser writer, MicroTech Laser writer, Heidelberg EVG Mask aligner MJB4 mask aligner EVG Bonder E‐Line system Pioneer E‐beam system Gopal

18. Litho - Raith - Equipment's Utilization Chart – November-2015

19. Maintenance Issues  All Litho tools are up.  Raith Pioneer was down for 3 days due to back up battery failure.

20. Furnaces and wet benches Savitha P

21. Equipment Utilization chart

22. Dry Etch and Thin films & Process Integration December 1 st,2015 Sunanda Babu

23. Equipment Utilization RIE-F: LL Pump faulty, replaced. Faulty pump to be sent for repair this week.

24. Equipment Utilization

25. INUP External Project Status(Nov’15) ProjectPI OwnerStart DateECD Mask Layers Status MTRDC TWT SWS(Anurag) Owner: Siva Bkup:Sabiha Jun’15May’162Go ahead with gold coating, and then wafer- wafer bonding of top wafer and bottom wafer RCI Accelerometer(Mandal)Owner: Siva Bkup:Sabiha Jun ’12Mar’1677 masks done for 1 st iteration. Optimize PECVD BSG and re-try the 7um trench filling with BSG( to achieve. Checking with IIT Mumbai for CMP option. Nanosniff Sensor (Sachin)Owner: Sabiha Bkup:Siva Aug’12continuo us 57 th process run completed. DRIE release was done for all wafers. Oxide membrane was observed to crack, almost all dies affected over time. Suspect film stresses not optimized in the Nanosniff Process flow. IITGB Micro Needles (Bhushan) Owner: Sabiha Bkup:Siva Jul’14continuo us 24” DSP wafers available, pending customer feedback on requirement.

26. INUP External Project Status(Nov’15) ProjectPI OwnerStart DateECD Mask Layers Status NAL Insulator Deposition and Etching (Prasanta Choudhury) Owner: Sabiha Bkup:Siva Aug’12continuousNA2 2” wfrs processed ( Oxide/Nitride deposition, RIE pad etch, PR strip and Pad resistance measurement),Pad resistance meets customer requirements, awaiting remaining 2 samples from NAL. BMSIT Gold electrodes( Sreedevi) Owner: Sabiha Bkup:Siva Sep’151Feasible, Process estimate provided. Payment process ongoing. IIT Madras Thermal Interface resistance measurement of thin films, like Graphene on substrates( Arvind) Owner: Sabiha Bkup:Siva Sep’15Feasible, process estimate provided, pending customer feedback.

27. INUP External Project Status(Nov’15) ProjectPI OwnerStart DateECD Mask Layers Status SNS college of Engineering Piezoelectric cantilever for energy harvesting( Sreeja), PhD project. Owner: Siva Bkup:Sabiha Nov’154Initial discussion with student. AlN replaces PZT as piezo material. Need optimization of AlN film in Sputter-2. Pending more feedback from Requestor. Asarva chips/BNMIT Blood pressure sensor (Veena) Owner: Siva Bkup:Sabiha Sep’15Feasible, Process estimate provided NIT Trichy Pressure Sensor(Sujan) Owner: Siva Bkup:Sabiha Sep’15Feasible, Process estimate provided. Dr Palash Basu(IIST Trivandrum,)Graphene FET Owner: Sangeeth Bkup: Siva Oct’15Previous work has been done. To continue further. Requires Al2O3 characterization. Dr Anzari(IITDM) Cantilever project Owner: Sabiha Bkup: Siva Sep’15Process estimate provided, pending customer feedback

28. INUP External Project Status(Oct’15) ProjectPI OwnerStart DateECD Mask Layers Status MSRIT RF MEMS switch(2014-2015 (Laxmi) Owner: Siva Bkup:Sabiha Oct’14May’154Closed Delhi University DRIE processing( back side Si etch) Owner: Lava Bkup: Aditi Sep’15Oct’15NAClosed. Cr/Au Deposition for SITAR(e-beam evaporation) Owner: Chandra Bkup: Suresh ongoingNA Cr/Au(10nm/20nm)-8 6” Si wfrs Cr/Au(60nm/100nm)-6 6” glass wfrs Cr/Au (10nm/20nm)- 2 6” Si wfrs Cr/Au ( )– 4 6” glass wfrs Microfluidics TIFR Hyderabad Dr Seshagiri Rao( Fabrication of SU8 master mold) Owner; Sabiha Bkup: Sangeeth Oct’15Nov’151Closed.

29. Thank you