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El-Mul Technologies Ltd – Confidential & Proprietary El-Mul Technologies El-Mul Technologies Ltd – Confidential & Proprietary Prof. Eli Cheifetz, Chairman and CTO El-Mul Technologies, Ltd. March 2013
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2 El-Mul Technologies Ltd – Confidential & Proprietary Established 1992, private ownership. Supplier of customized detection solutions for Scanning Electron Microscopes, semiconductor tools and analytical instrument industries (OEM). 26 employees (8 in R&D and Engineering, 6 Ph.D.). Located in Tamar Science Park, Rehovot. About El-Mul Technologies, Ltd. Mission: To be a technology leader and strategic OEM supplier of advanced detectors and devices for electron and ion beam tools.
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3 El-Mul Technologies Ltd – Confidential & Proprietary Main Areas of Activity Customized detectors for electron and ion beam tools with focus on speed, efficiency and special features. OEM Business. WETSEM – Enables analyzing liquids/biological tissues in atmospheric condition with SEM Carbon nano-tubes grown on surfaces: platform technology for various applications.
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4 El-Mul Technologies Ltd – Confidential & Proprietary Unmatched Efficiency and Homogeneity 30% higher efficiency than sedimented phosphor screens Proprietary phosphor brushing process: thin layers of P47, R42 Organic material free - extended lifetime, UHV compatible YAG, YAP solutions available Coupled with light guide expertise: Designing, simulating, extra-fine polishing of complex polymer structures, mirror coating, segmenting ScintiMax ™ Screens: A World Standard
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5 El-Mul Technologies Ltd – Confidential & Proprietary El-Mul’s P47 & R42 properties ScintiMa x™ Peak wavelength (nm) Emission (to vacuum) Photons @10keV e - Decay time (100% to 10% ns) R4251011068 P4740021096
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6 El-Mul Technologies Ltd – Confidential & Proprietary High Voltage Holding Technology Electro-magnetic field numerical simulations Insulator DC voltage holding capabilities of >3kV/mm in vacuum Proprietary high resistivity coated insulators ● Eliminates charging effects ● Minimizes SE generation 3mm 10kV Collecting Grid Filtering Grid Used in tunable electron energy filter Voltage holding capability enabling compact design
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7 El-Mul Technologies Ltd – Confidential & Proprietary 3Max ™ : SE/SE3 selectivity Improved SE collection efficiency SE3 collection from larger phase space Enables low energy BSE imaging without additional detector Improves SNR in difficult imaging conditions New feature to Everhart-Thornley Detectors El-Mul Patent Design: tailored, optimized for specific instrument
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8 El-Mul Technologies Ltd – Confidential & Proprietary Elion™: One Detector – Two Functions Electron/Ion collection efficiency optimization by simulations ● Minimize “dead areas” ● Trajectories focus on scintillator Design, engineering of specialized ion-electron converters STAGE I STAGE II Electron or ion detection in one device Unique patented configuration
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9 El-Mul Technologies Ltd – Confidential & Proprietary SiMax: High responsivity Silicon Detector for low keV electrons Technology: n/p silicon diode Key Features: ● Superior responsivity at low keV due to thin window ● Segmented geometry Responsivity= I diode / (I primary beam x E primary beam ) Hippocampus, taken at 3keV, courtesy of Carl Zeiss
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10 El-Mul Technologies Ltd – Confidential & Proprietary MCP Assembly Design Unique detector design capabilities Flexibility allows implementation of non-standard concepts Full equipment for testing and characterization
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11 El-Mul Technologies Ltd – Confidential & Proprietary WET Sample WETSEM ® Technology Thin, vacuum-tight, electron-transparent membrane Biocompatible Fits standard SEM instruments Quick and easy to use Membrane Vacuum Area Atmospheric Pressure WET Sample Enables high resolution SEM imaging of wet samples with minimum preparation
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12 El-Mul Technologies Ltd – Confidential & Proprietary Vertically Aligned CNT on surfaces Control over: length, density, alignment and thickness of multiwall CNTs. Growth of CNT films on various surfaces; metallic, semi-conductive, insulator Positioning of CNT sites at high resolution Patterning capability CNTs
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13 El-Mul Technologies Ltd – Confidential & Proprietary Thank You! El-Mul Technologies Ltd – Confidential & Proprietary
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