1. First Measurements of Novati Wafer Ulrich Heintz, Meenakshi Narain, Sinan Sagir, Eric Spencer, Juan Trenado Brown University, Providence 4/30/2015Brown - Novati measurements 1

2. Probe station setup 4/30/2015Brown - Novati measurements 2

3. 4/30/2015Brown - Novati measurements 3 A scratch

4. 4/30/2015Brown - Novati measurements 4 Scratch

5. Wafer Map 4/30/2015 5 TS-1 Ts-2 TS-3 TS-4 TS-5 TS-6 HGC- 1 HGC- 2 PS AL-1 CL-1 SL-1 SR-1 SR-2 AL-2 ST-1 ST-2 CS-1 CS-2 CS-3 ss1 ss2 ss3 ss4 ss5 ss6 ss7 ss8 ss9 ss10 ss11 ss12 ss13 ss14 ss15 ss16 ss17 ss18 ss19 ss20 ss21 ss22 ss23 ss24 ss25 ss26 ss27 ss28 ss29 ss30 ss31 Brown - Novati measurements

6. Novati Structure 4/30/2015 6 Small diode Via chains SIMS field MOS Van der Paw Punchthrough structures SD VC-1 VC-2 VDP1-4 PT-1-12 PT-13-24 BS-1-2 Reference for test: SS-#/VC-# (eg) Brown - Novati measurements

7. Contact to ss27-SD 4/30/2015Brown - Novati measurements 7

8. Ss15 and ss27 small diodes 4/30/2015Brown - Novati measurements 8

9. Test Structure Cell 4/30/2015 9 LD DC and punchthough strips Probe test structures GD-1 GD-2 SS-1 DCS ACS SS-2 SS-3 MD Reference: TS-#/GD-# Brown - Novati measurements

10. TS-2 large and medium diodes 4/30/2015Brown - Novati measurements 10