1. Applications of Micro Electro Mechanical Systems (MEMS) Jobin Philip

2. Introduction IC invention Large number of transistors on single silicon chip Interconnected to functional circuits

3. Micro-fabricated Membrane Mirrors 12 mm in diameter Less than 1um in thickness

4. Micro-fabricated Membrane Mirrors Optical Switching High optical efficiency Good potential for aberrations correction Coupling efficiency of 3000 interconnections

5. Micro-fabricated Membrane Mirrors

6. Two Axis Micro-mirror

7. Micro-Mirror

9. Optical Switch

10. 2x2 Optical Switch Cross State Bar State

11. Optical Switch

12. NxN Optical Link

13. Agilent Bubble Switch

14. Segmented Mirrors Space Optical Telecommunication  Reliable, Small in size, Light in weight, & Easy to fabricate Air Turbulence causes optical aberrations Quick response time, therefore able correct optical aberrations

15. Segmented Micro-Mirrors

17. Grating Light Valve (GLV) IncidentReflected O th Mode Ribbons Silicon Light Machines: http://www.siliconlight.com Incident Diffracted  +1 st Mode +3 rd Mode Down ribbons Up ribbons

18. GLV Projection System Digital Projection System using Grating Light Valve  If pixel is “off”, light is reflected straight off GVL into the absorbing screen  If pixel is “on”, light is diffracted at an angle, propagating through the lens to the focal plane GLV Color Wheel Lens Focal Plane Prism Screen Optical Input

19. Next Generation Projectors

20. Question…???

21. Optical Switch