1. Penn ESE370 Fall 2012 -- Townley & DeHon ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems Day 13: October 3, 2012 Layout and Area

2. 2 Today Coping with Variation (from last time) Layout –Transistors –Gates Design rules Standard cells Penn ESE370 Fall 2012 -- Townley & DeHon

3. Penn ESE370 Fall2012 -- DeHon 3 Variation Margin for expected variation Must assume V th can be any value in range –Speed  assume V th slowest value Probability Distribution V TH I on,min =I on (V th,max ) I d,sat  (V gs -V th ) 2

4. Variation See a range of parameters –L: L min – L max –V th : V th,min – V th,max Validate design at extremes –Work for both V th,min and V th,max ? –Design for worst-case scenario Penn ESE370 Fall2012 -- DeHon 4

5. Margining Also margin for –Temperature –Voltage –Aging: end-of-life Penn ESE370 Fall2012 -- DeHon 5

6. Process Corners Many effects independent Many parameters With N parameters, –Look only at extreme ends (low, high) –How many cases? Try to identify the {worst,best} set of parameters –Slow corner of design space, fast corner Use corners to bracket behavior Penn ESE370 Fall2012 -- DeHon 6

7. Simple Corner Example Penn ESE370 Fall2012 -- DeHon 7 Vthp Vthn 150mV 350mV What happens at various corners?

8. Process Corners Many effects independent Many parameters Try to identify the {worst,best} set of parameters –E.g. Lump together things that make slow Vthn, Vthp, temperature, Voltage Try to reduce number of unique corners –Slow corner of design space Use corners to bracket behavior Penn ESE370 Fall2012 -- DeHon 8

9. Range of Behavior Still get range of performances Any way to exploit the fact some are faster? Penn ESE370 Fall2012 -- DeHon 9 Probability Distribution Delay

10. Penn ESE370 Fall2012 -- DeHon 10 Speed Binning Probability Distribution Delay Discard Sell Premium Sell nominal Sell cheap

11. Layout Penn ESE370 Fall 2012 -- Townley & DeHon

12. 12 Transistor Side view Perspective view Penn ESE370 Fall 2012 -- Townley & DeHon

13. 13 Layout Sizing & positioning of transistors Designer controls W,L t ox fixed for process –Sometimes thick/thin oxide “flavors” Penn ESE370 Fall 2012 -- Townley & DeHon

14. 14 NMOS Geometry Top viewPerspective view L W Penn ESE370 Fall 2012 -- Townley & DeHon

15. 15 NMOS Geometry Top view L W Color scheme –Red: gate –Green: source and drain areas (n type diffusion) SDG Penn ESE370 Fall 2012 -- Townley & DeHon

16. 16 t ox Transistors built by depositing materials –Constant rate of deposition (nm/min) –Time controls t ox Oxides across entire chip deposited at same time –Same time interval –thickness is (roughly) constant –Process engineer sets value to: Assure yield What does t ox control? –Field strength  V th, current –Achieve Performance, minimize leakage Penn ESE370 Fall 2012 -- Townley & DeHon

17. 17 NMOS vs PMOS Rabaey text, Fig 2.1 Penn ESE370 Fall 2012 -- Townley & DeHon Mostly talked about NMOS so far –PMOS: “opposite” in some sense –NMOS built on p substrate, PMOS built on n substrate –Name refers to bias/carriers when channel is inverted

18. 18 PMOS Geometry n well L W Color scheme –Red: gate –Orange: source and drain areas (p type) –Green: n well NMOS built on p wafer –Must add n material to build PMOS SDG Penn ESE370 Fall 2012 -- Townley & DeHon

19. 19 Body Contact “Fourth terminal” Needed to set voltage around device –PMOS: V b = V dd –NMOS: V b = GND At right: PMOS (orange) with body contact (dark green) Penn ESE370 Fall 2012 -- Townley & DeHon

20. Rotate All but PMOS Transistor 90 degrees

21. 21 Interconnect How to connect transistors –Different layers of metal Intermediate layers “Contact” - metal to transistor “Via” - metal to metal Penn ESE370 Fall 2012 -- Townley & DeHon

22. 22 Interconnect How to connect transistors –Different layers of metal Intermediate layers “Contact” - metal to transistor “Via” - metal to metal Penn ESE370 Fall 2012 -- Townley & DeHon

23. 23 Interconnect Cross Section ITRS 2007 Penn ESE370 Fall 2012 -- Townley & DeHon

24. 24 Masks Define areas want to see in layer –Think of “stencil” for material deposition Use photoresist (PR) to form the “stencil” –Expose PR through mask –PR dissolves in exposed area –Material is deposited Only “sticks” in area w/ dissolved PR Penn ESE370 Fall 2012 -- Townley & DeHon

25. 25 Masking Process Goal: draw a shape on the substrate –Simplest example: draw a rectangle Silicon wafer Mask Penn ESE370 Fall 2012 -- Townley & DeHon

26. 26 Masking Process First: deposit photoresist photoresist Mask Silicon wafer Penn ESE370 Fall 2012 -- Townley & DeHon

27. 27 Masking Process Expose through mask –UV light Penn ESE370 Fall 2012 -- Townley & DeHon

28. 28 Masking Process Remove mask and develop PR –Exposed area dissolves –This is “positive photoresist” Penn ESE370 Fall 2012 -- Townley & DeHon

29. 29 Masking Process Deposit metal through PR window –Then dissolve remaining PR Why not just use mask? –Masks are expensive –Shine light through mask to etch PR –Can reuse mask Penn ESE370 Fall 2012 -- Townley & DeHon

30. 30 Logic Gates How to build complete inverter? –Connect NMOS, PMOS using metal Penn ESE370 Fall 2012 -- Townley & DeHon

31. 31 Inverter Layout Example Penn ESE370 Fall 2012 -- Townley & DeHon

32. 32 Inverter Layout Example Start with PMOS, NMOS transistors Space for interconnect Penn ESE370 Fall 2012 -- Townley & DeHon

33. 33 Inverter Layout Example Penn ESE370 Fall 2012 -- Townley & DeHon

34. 34 Inverter Layout Example Add body contacts Connect gates of transistors Penn ESE370 Fall 2012 -- Townley & DeHon

35. 35 Inverter Layout Example Penn ESE370 Fall 2012 -- Townley & DeHon

36. 36 Inverter Layout Example Add contacts to source, drain, gate, body Connect using metal (blue) Penn ESE370 Fall 2012 -- Townley & DeHon

37. 37 Design Rules Why not adjacent transistors? –Plenty of empty space –If area is money, pack in as much as possible Recall: processing imprecise –Margin of error for process variation Penn ESE370 Fall 2012 -- Townley & DeHon

38. 38 Design Rules Contract between process engineer & designer –Minimum width/spacing –Can be (often are) process specific Lambda rules: scalable design rules –In terms of = 0.5 L min (L drawn ) –Can migrate designs from similar process –Limited scope: 45nm process != 1  m Penn ESE370 Fall 2012 -- Townley & DeHon

39. Design Rules: Some Examples Penn ESE370 Fall 2012 -- Townley & DeHon 2 6 6 3 2 2 1.5 n doping p doping gate contact metal 1 metal 2 via Legend

40. 40 Layout Revisited How to “decode” circuit from layout? Penn ESE370 Fall 2012 -- Townley & DeHon

41. Penn ESE370 Fall2010 -- DeHon 41 Layout to Circuit 1. Identify transistors Penn ESE370 Fall 2012 -- Townley & DeHon

42. 42 Layout to Circuit 2. Add wires Penn ESE370 Fall 2012 -- Townley & DeHon

43. 43 Layout to Circuit 2. Add wires Penn ESE370 Fall 2010 -- Townley (DeHon)Penn ESE370 Fall 2012 -- Townley & DeHon

44. 44 Layout to Circuit 2. Add wires Penn ESE370 Fall 2010 -- Townley (DeHon)Penn ESE370 Fall 2012 -- Townley & DeHon

45. 45 Layout to Circuit 2. Add wires Penn ESE370 Fall 2010 -- Townley (DeHon)Penn ESE370 Fall 2012 -- Townley & DeHon

46. 46 Layout #2 (practice) Penn ESE370 Fall 2012 -- Townley & DeHon

47. 47 Layout #2 (practice) How many transistors? –PMOS? –NMOS? How connected? –PMOS, NMOS? Inputs connected? Outputs? What is it? Penn ESE370 Fall 2012 -- Townley & DeHon

48. 48 Standard Cells Lay out gates so that heights match –Rows of adjacent cells –Standardized sizes Motivation: automated place and route –EDA tools convert HDL to layout Penn ESE370 Fall 2012 -- Townley & DeHon

49. Standard Cell Area invnand3 All cells uniform height Width of channel determined by routing Cell area Identify the full custom and standard cell regions on 386DX die http://microscope.fsu.edu/chipshots/intel/386dxlarge.html

50. Admin HW4 due Thursday Lecture on Friday Review on Sunday at 6pm Exam on Monday –No class at noon that day Penn ESE370 Fall 2012 -- Townley & DeHon

51. 51 Big Idea Layouts are physical realization of circuit –Geometry tradeoff Can decrease spacing at the cost of yield Design rules Can go from circuit to layout or layout to circuit by inspection Penn ESE370 Fall 2012 -- Townley & DeHon