1. Ischia, 21-23 giugno 2006Riunione Annuale GE 2006 Influence of the oxygen on the optical properties of RF-sputtered Zinco-Oxide thin films (1)Institute for Microelectronics and Microsystems National Council of Research (IMM-CNR), Naples, Italy (2) Mediterranea University of Reggio Calabria, Italy Mariano Gioffrè (2), Massimo Gagliardi (1) (2), Massimo Angeloni (1), Mario Iodice (3), Giuseppe Coppola (1) and Ivo Rendina (1)

2. Ischia, 21-23 giugno 2006Riunione Annuale GE 2006ZnO ellipsometric model fit results X 2 = 0.32 Dispersion model of ZnO: Tauc-Lorentz single oscillator [4,5] immaginary part of dielectric function: real part from Kramer- Kroning relation: Fitting parameters: E 0, E g, A, C, References: [4] H. G. Tompkins, W. A. McGahan, "Spectroscopic Ellipsometry and Reflectometry ", Ed.John Wiley & Sons [5] G. E. Jellison and F. A. Modine, Appl. Phys. Lett. 69, 371 (1996) [6] G. E. Jellison, F.A. Modine, P. Doshi, A. Doshi, A. Rohatgi, Thin Solid Films, 313-314, 195 (1998) [7] A.R. Forouhi, I.Bloomer, Phys.Review B 34, 7018-7026 (1986) [8] A.R.Forouhi, I.Bloomer, Phys.Review B 38, 1865-1874 (1988) Dispersion model of glass: Forouhi & Bloomer [7, 8] Fitting parameters :

3. Ischia, 21-23 giugno 2006Riunione Annuale GE 2006 Refractive index Comparison between measured and simulated transmittance The obteined index refractive is in good agreement with literature[9,10] The resullts of fitting parameters for sample 1 References: [9] E. Dumont, B. Dugnoille, S. Bienfait, Thin Solid Films, 353, 93 (1999) [10] W. L. Bond, J. Appl. Phys. 36, 1674 (1965) Samp le Po wer (W) Temperatur e ( 0 C) Flow argon (sccm) Flow oxigen (sccm) Pressure (mbar) Time (min) 12005040100.0212 2200504060.0212 3200504030.0212 4200504000.0212 Sputtering deposition parameters sample1234 Eg3.217 0.004 3.22 0.01 3.218 0.004 3.296 0.005 Wavelength (nm)