1. Prabhakara Rao February 9 , 2016
National Nanofabrication Centre Centre for Nano Science and Engineering IISc, Bangalore, India
Cleanroom Admin Committee Meeting
Prabhakara Rao
February 9 , 2016

2. Reports December month charges CeNSE users charged 82% of total value
146 Users - Total charges at a high of 24.6 L
18 NON-MITO users (Paid Users) - Total charges of 1.9 L
128 MITO084 users - Total charges of 22.6 L
90 users from CeNSE - Total charges of 20.2 L
CeNSE users charged 82% of total value

3. Reports Data April-15 May-15 June-15 July-15 Aug-15 Sep-15 Oct-15
Nov-15
Dec-15
Total Users 97
110
120
103
113
122
151
179
146
MITO084 users 79 91 95 80 87 93
159
128
Non-MITO Users 18 19 25 23 26 29 20
Total users from CeNSE 55 63 60 52 61 64 76 85 90
Total charges for MITO084
18.75 L
15.5 L
22.25 L
22.47 L
22.18 L
25.7 L
27.3 L
33.7 L
22.6 L
Total charges for Paid users
2.3 L
1.86 L
2.5 L
2.95 L
3.54 L
4 L 3L
1.5 L
1.9 L

4. April 2015 - Nov 2015 - INUP project Status
Summary
completed 30
ongoing 2
Pending 32

5. Minutes of the Last Meeting-Jan 5th,2016
Camera repositioning outside the CeNSE building has to be done without compromising safety.
Maintenance Log for utility is Discussed .It should be made available for all the tools.
Protocols should be listed out saying which equipment should be On & OFF according to the Power supply availability.
Necessity of AMC for Electrical Panel is discussed and felt not required.
Demonstration is needed for Fire Alarm System plan.
There should be a backup Facility Technologist for every tool.

6. Equipment's to be On & OFF according to the Power supply availability.
Whenever raw power not available:
DG KVA-Utility UPS 1,2,3
DG KVA-Utility
DG KVA-Chiller 1& Litho AHU-1,Chilled Water pump
DG KVA –UPS4 CeNSE
Not to be switched On:
Utility- AHU 2&3,Chiller-2&3,Lift
CeNSE- Chiller,Lifts,Other Lab equipment's

7. Orientation Program was conducted on Feb 1st & 2nd ,2016
Total No of Participants: 50
Topics Covered:
Introduction to Clean room  procedures ,FOM networks
Wafer Cleaning and wet processing
High temp growth and deposition ( Oxidation, doping, LPCVD, RTP)
Plasma processing and Dry etch
Lithography
PVD ( Sputtering and Evaporation),ALD

8. CeNSE Faculty Funds From April-Nov,2015
S.No
Date
Invoice PI
Amount in
Rs. 1
CeNSE/PI_rp-4/
Prof. Rudra Pratap
84,304.00 2
CeNSE/PI_SRaghavan/
Prof. S. Raghavan
Received in 2015 3
CeNSE/PI_Vijaymishra -1/
Vijay Mishra
612,365.00 4
CeNSE/PI_Vijaymishra -2/
51,000.00 7
CeNSE/PI_rp-6/
Prof.Rudra Pratap
900,000.00
Total Amount – Rs.38,11,422.00

9. External Projects/Services Completed Upto Nov,2015
Sl.no
Organization
Project/Services
Amount in Rs 1.
SITAR Bangalore
Gold Evaporation
2,00,000 2.
TIFR
Microfluidics SU8 master
22,000 3.
Delhi University
DRIE work
91,000
Total Amount – Rs. 3,13,000

10. Penalty Points (Nov-2015-Jan- 2016)
Date
Name
Designation
Professor
Department
Penalty points
CumulativePoints
Remarks
Suspension Status 1
4/11/2015
Amiya Banrejee
Graduate
Prof.Srinivas Vasu Raghavan
CeNSE 15
Violation of wet bench Protocols 2
9/11/2015
Sandeep vura
Violation of protocols
Removed the access from cleanroom (9thNov-15 thNov) 3
10/11/2015
Nivedita Basu
Prof. Navakanta Bhat
Not Switching off the tools 4
23/11/2015
Vineet Kumar Singh
PHD Student
Prof. Sushobhan Avasthi 30 60
For not wearing goggles and using without booking slot.
Removed the access from cleanroom( 23rd Nov- 29th Nov2015) 5
26/11/2015
Vishal Baloria
Violation of Protocols
Removed the access from cleanroom (26thNov - 9thDec 2015) 6
27/11/2015
Nithin Bhandari
Prof.KN Bhat
Not using goggles in litho wet benches

11. Penalty Points S.No Date Name Designation Prof. Department
Cumulative Points
Remarks
Suspension Status 7
27/11/2015
Anushree
T.Srinivas
ECE 15
Not using goggles in litho wet benches 8
Debadrita Paria
Graduate
Dr.Ambarish Ghosh
Physics 9
Nayana ramesh
Post Doc
Prof.Srinivas vasu
CeNSE
For not wearing goggle in litho wet bench 10
Anumitra Sil
Prof.Anil kumar 11
30/11/2015
Samatha Benedict
PhD Student
Prof.Navankanta Bhat 35 12
Ajay Dangi
Prof.Rudra Pratap
115

12. Penalty Points S.No Date Name Designation Prof. Department
Cumulative Points
Remarks
Suspension Status 13
1/12/2015
Samatha Benedict
PhD Student
Prof.Navankanta Bhat
CeNSE 15 50
For not wearing goggle in litho wet bench
Removed the access from cleanroom(1st Dec-7th Dec) 14
Chandan Kumar
Graduate
Prof.Anindya das
Physics
3/12/2015
Nalla Somaiah
Prof.Praveen kumar
Materials Engineering 16
4/12/2015
Swanand Solanke
Prof.Digbijoy Nath 17
5/1/2016
Chandan Samatha
Prof.Akshay Naik 18
Parameshwar

13. Penalty Points S.No Date Name Designation Prof. Department
Cumulative Points
Remarks
Suspension Status 19
6/1/2016
Jafar hasan
Post Doc
Prof.Kaushik Chaterjee
Material Engineering 15
For not wearing goggle in litho wet bench 20
Swapnil More
Graduate
Prof.Akshay Naik
CeNSE 21
11/1/2016
Meera Garud
Prof. Rudra Pratap
Violation of Protocols 22
25/1/2016
Ajay Dangi
Prof.Rudra Pratap 30
Failed to follow standard operating procedures while handling spin coater.
Independent status of spin coater is suspended for two weeks from 25 th jan,2016 to 7 th feb 2016. 23
Anisha Kalra
Prof.Digbijoy Nath
Failed to cleanup equipment work space after the slot
Independent status is suspended 24
27/1/2016
Awanash Pandy
Prof.Shankar K Selvaraja
For not wearing the goggles in litho wet bench.

14. BMS Re-configuration Stage 1 Stage 2 Stage 3 PRESENT STATUS
NEED TO BE CALIBRATED
Stage 3
DESIGNED BUT NOT CONNECTED
BY PROJECT TEAM.
CRITICAL AND NOT WORKING
No.of items which were not working
No.of items rectified 17
No.of items which were not working
No.of items rectified
Remarks 13 10
Material required
No.of items which were not working
No.of items rectified
Remarks 42 14
Time period required

15. Jan 2016’s work Fail proof alarm and trip system
Fire alarm is integrated with BMS, GMS and Biometric.
The system is configured to switch off biometric, Alarm GMS and BMS when ever the fire alarm is triggered.

16. Time limits Date of under taking the work : 14-08-15 Stage 1
Target date: completion date :
Stage 2
Target date: completion date:
Stage 3
Target date:
Since stage 3 includes not connected items and it is a learning process, we need some more time to act on all other incomplete works.
For some items we need to purchase material, Planning to take a quote at once after finalizing the list of requirement.

17. Details on remaining items
As per our understanding some of the items in list are not required. Please suggest
The current status of each item is listed in next slides.
We need 2 more months to completely act on remaining items.

18. Equipment Action point remarks CDA Remote Start/Stop Command
Not required
Pressure Reading
Need to check with vendor for availability to connect
Flow
Absorbtion Dryer1
On/Off Status
Trip Alarm
Ultra Pure Water
Flow sensor and cabling required
Resistivity
Need a signal splitter
Process Vacuum P1&P2
cabling
Need a sensor and cabling

19. Need to check the signal availability in sensor HF&Acid Alkaline level
Equipment
Action point
remarks
WWT-Fluoride
PPM Fluoride
Need to check the signal availability in sensor
HF&Acid Alkaline level
Need to install level sensors and cabling
HF Sump Pump
Remote Start/Stop Command
Not required
On/Off Status
Trip Alarm
Alkaline Sump Pump
Diesel Generator
Voltage
Vendor involvement required
Ampere
Raw Power
Cabling

20. Lithography Bay 9th February, 2016
Equipment's:
•Laser writer, MicroTech
•Laser writer, Heidelberg
•EVG Mask aligner
•MJB4 mask aligner
•EVG Bonder
•E‐Line system
•Pioneer E‐beam system
Gopal

22. Litho Equipment’s Utilization Chart – January-2016

23. Maintenance Issues:
All Litho tools are up

24. Furnaces and wet benches
Savitha P

26. Dry Etch & Thin films & Process Integration Feb 9th,2016
Sunanda Babu

27. Equipment Utilization
Techport Sputter 2: Tool down for 3-position Gate valve and heater transformer installation, new gate valve helps to save on gas and turbo pump life.
PECVD: User broke wafer causing tool downtime.

28. Equipment Utilization
Beneq ALD: (Tool owner: Advaitha)Ozone generator installation done with extensive help from Raghu and Mirji.

29. INUP External Project Status(Jan’16)
PI Owner
Start Date
ECD
Mask Layers
Status
TWT SWS
Owner: Siva
Bkup:Sabiha
Jun’15
May’16 2
First prototype device handed over to customer
Accelerometer
Jun ’12
Mar’16 7
IIT Mumbai for CMP option being explored.(visited IITB, CMP still not done, IITB thickness means tool may need fine tuning for thick oxides, measurements ongoing.
Micro heater
Owner: Sabiha
Bkup:Siva
Aug’12
continuous 5
9th visit done, 2 wafers processed with 74% and 90% yield. Achieved by teamwork between NNfC and Nanosniff( membrane oxide recipe obtained from Nanosniff and processed at NNfC on First Nano furnace)
Micro Needles
Jul’14
4” DSP wafers available, pending customer feedback on requirement.

30. INUP External Project Status(Jan’16)
PI Owner
Start Date
ECD
Mask Layers
Status
NAL Insulator Deposition and Etching (Prasanta Choudhury)
Owner: Sabiha
Bkup:Siva
Aug’12
continuous NA
2 2” wfrs processed ( Oxide/Nitride deposition, RIE pad etch, PR strip and Pad resistance measurement),Pad resistance meets customer requirements, awaiting remaining 2 samples from NAL.
BMSIT Gold electrodes( Sreedevi)
Sep’15
Feasible, Process estimate provided. Payment process ongoing.
IIT Madras Thermal Interface resistance measurement of thin films, like Graphene on substrates( Arvind)
Feasible, process estimate provided, pending customer feedback. Current request for wire bonding on some samples.

31. INUP External Project Status(Jan’16)
PI Owner
Start Date
ECD
Mask Layers
Status
SNS college of Engineering Piezoelectric cantilever for energy harvesting( Sreeja) , PhD project.
Owner: Siva
Bkup:Sabiha
Nov’15 4
Initial discussion with student. AlN replaces PZT as piezo material. Need optimization of AlN film in Sputter-2. Pending more feedback from Requestor.
Asarva chips/BNMIT Blood pressure sensor (Veena)
Sep’15
Feasible, Process estimate provided
NIT Trichy Pressure Sensor(Sujan) 8
Feasible, Process estimate provided. Design and Verification process started on 8th Feb, 2016.
Dr Palash Basu(IIST Trivandrum,)Graphene FET
Owner: Sangeeth
Bkup: Siva
Oct’15
Previous work has been done. To continue further. Requires Al2O3 characterization. Samples handed over to User(8th Feb, 2016) for Terahertz testing at TIFR,Mumbai.
Dr Anzari(IITDM) Cantilever project
Owner: Sabiha
Process estimate provided, pending customer feedback

32. INUP External Project Status(Jan’16)
PI Owner
Start Date
ECD
Mask Layers
Status
MSRIT RF MEMS switch( (Laxmi)
Owner: Siva
Bkup:Sabiha
Oct’14
May’15 4
Closed
Delhi University DRIE processing( back side Si etch)
Owner: Lava
Bkup: Aditi
Sep’15
Oct’15 NA
Closed.
Cr/Au Deposition for SITAR(e-beam evaporation)
Owner: Chandra
Bkup: Suresh
ongoing
Cr/Au(10nm/20nm)-8 6” Si wfrs
Cr/Au(60nm/100nm)-6 6” glass wfrs
Cr/Au (10nm/20nm)- 2 6” Si wfrs
Cr/Au ( )– 4 6” glass wfrs
Microfluidics TIFR Hyderabad Dr Seshagiri Rao( Fabrication of SU8 master mold)
Owner; Sabiha
Bkup: Sangeeth
Nov’15 1
Closed. User was extremely satisfied with results, using the SU8 mould. New request raised with a slightly more complex design for mould preparation in Silicon

33. Thank you