1. Ischia, 21-23 giugno 2006Riunione Annuale GE 2006 R. C. Zaccuri, M. Iodice, G. Coppola, I. Rendina. Istituto per la Microelettronica e Microsistemi, Sezione di Napoli Consiglio Nazionale delle Ricerche Via P. Castellino 111, 80123, Napoli, Italia Thermo-electrical analysis of an optoelectronic modulator integrated in a SOI rib waveguide operating in the Gb/s regime

2. Ischia, 21-23 giugno 2006Riunione Annuale GE 2006 Silicon Photonics Advantages: Integration with electronic devices Simple fabrication Low cost Reliability EM Interferences immunity New perspectives Optoelectronic building blocks:

3. Ischia, 21-23 giugno 2006Riunione Annuale GE 2006 Silicon Optoelectronic Devices Sensing Microsystems Optical sensors interrogation Low cost optical interconnections Fiber-to-the-Home and Fiber-in-the-Loop Local Area Network (LAN) … Application fields: Input port Output port P-Si mirrors Air beam splitter

4. Ischia, 21-23 giugno 2006Riunione Annuale GE 2006 P-i-N diode like electrical structure Free-carriers injection is transversal to the optical beam propagation direction Planar structure compatible with standard microelectronic processes Bipolar mode injection which is more efficient respect to unipolar devices Modulator Basic Structure Main properties:

5. Ischia, 21-23 giugno 2006Riunione Annuale GE 2006 Design Methodology ATHENA Microelectronic fabrication processes simulator ATLAS Electronic devices behavior simulator with thermal module 2D optical mode solver and 3D optical Beam Propagation Method (BPM) OPTIMIZED DEVICE IS THE DEVICE ELECTRICALLY AND THERMALLY OPTIMIZED ? IS THE STRUCURE A SINGLE-MODE WAVEGUIDE AND ABLE TO EFFECTIVELY MODULATE THE OPTICAL BEAM? YES NO SOFTWARE INTERFACE LAYER Matlab YES BeamPROP

6. Ischia, 21-23 giugno 2006Riunione Annuale GE 2006 Microelectronics Technology Labs Depositions Photolitography Wet & Dry Etching Oxidations Facilities