1. Ref: P.ppt (06/03/2016) 1 EUROTHERM CONTROLS 2704 Vacuum Block

2. Ref: P.ppt (06/03/2016) 2 EUROTHERM CONTROLS Vacuum Feature Vacuum Feature 1 or 3 input gauges Polyfit linearisation Scientific display in mB,Torr, Pascal Bumpless auto gauge switchover 6 On/Off setpoint outputs High vacuum gauge enable signal Roughing pump timer Leak detection routine Displays Chamber Vacuum + 2nd value with user text

3. Ref: P.ppt (06/03/2016) 3 EUROTHERM CONTROLS Typical Application Hi Vac Gauge Temperature Control Loop Heating Cooling Setpoint Programmer mB Vacuum Function Block Temp SP Program Events Run Hold Reset Thermocouple C Lo Vac Gauge mB Backing Gauge mB Program Wait Signal SP1 SP2 SP6 Vacuum Valves PLC Interlocks

4. Ref: P.ppt (06/03/2016) 4 EUROTHERM CONTROLS Gauge switch-over Switch- over block Hi Vac Gauge mB Lo Vac Gauge mB Chamber Vacuum

5. Ref: P.ppt (06/03/2016) 5 EUROTHERM CONTROLS Gauge Switch-over 1.0- E08 Increasing vacuum(mB) 1.0+E0 3 1.0- E06 1.0- E04 1.0- E02 1.0+E0 0 Pirani measurement range 10vdc 2vdc AIM or Penning measurement range 10vdc Switch-over region Chamber Vacuum = 50:50

6. Ref: P.ppt (06/03/2016) 6 EUROTHERM CONTROLS Communications Leak detect Chamber Vacuum Leak detected Leak Detect Time Target leak Rate Pump off Start Leak Detect LEAK DET

7. Ref: P.ppt (06/03/2016) 7 EUROTHERM CONTROLS Profibus-DPCommunications Roughing Pump Time-out Chamber Vacuum Time-out Time Target Vacuum Pump off Start PUMP TOUT

8. Ref: P.ppt (06/03/2016) 8 EUROTHERM CONTROLS Profibus-DPCommunications Hi Vac. Gauge Enable Gauge Enable Backing Vacuum Gauge On Setpoin t Low Vacuum GON

9. Ref: P.ppt (06/03/2016) 9 EUROTHERM CONTROLS Profibus-DPCommunications Error Indication Gauge 1 Status ERR OR Gauge 3 Status Gauge 2 Status