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Terrence E. Zavecz OnWafer Data Set Weir Temporal Response analysis Origin: PEB_March12, 2003.cvs.

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Presentation on theme: "Terrence E. Zavecz OnWafer Data Set Weir Temporal Response analysis Origin: PEB_March12, 2003.cvs."— Presentation transcript:

1 http://www.TEAsystems.com Terrence E. Zavecz tzavecz@TEAsystems.com OnWafer Data Set Weir Temporal Response analysis Origin: PEB_March12, 2003.cvs

2 Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 2 Weir Temporal Analysis Overview Sensor Time-Response Analysis of On-Wafer Data Analysis of Process Phases Thermal Response by sensor  Temperatue  Maximum Temperature  Phase Error Thermal Response over Time  Phase Error as a function of time  Slope  Slope vs Time  Zero Slope = Constant temperature phase Sensor positions Cumulative Energy into the process Contour Maps  Of Temperatkure, Energy, Cumulative Energy and Rise/Fall Slope

3 Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 3 First Analysis Screen

4 Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 4 Thermal Range Across Wafer Five transitions occur  Marked by yellow squares Sections of the wafer begin dropping faster than others at ~ 70 seconds time

5 Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 5 Phase Response Phase change transition threshold should be set lower than 10% to detect the “flat” response of phase 3 Phase 3 has a 2-second variaiton in start time with 3.59 degrees variation Thresholds: Phase: 10% Temperature: 96 deg 3 4

6 Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 6 Thermal Range by Sensor Phase 5 interrupted so phase 1 could be observed

7 Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 7 Phase 2 & 3 response magnified

8 Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 8 Phase Error Phase Error=  (Tsensor – Tmean) T sensor = temperature of the sensor T mean = Mean temperature of the phase

9 Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 9 Phase #3 error @ max temp

10 Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 10 Phase error as function of time

11 Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 11 Slope as a function of time

12 Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 12 Slope vs Temperature Zero slope implies a constant temperature

13 Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 13 Sensor Locations

14 Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 14 Cumulative Energy by sensor Activation temperature set to 96 deg.

15 Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 15 Phase 3 Cumulative Energy Phase 3 (constant temperature) results only.

16 Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 16 Temperature Mean, Rise, Phase Length, Start Value

17 Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 17 Temp @ end of phase

18 Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 18 Maximum/Minimum Slope

19 Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 19 Average slopes for constant temperature

20 Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 20 Energy for 96 degree Threshold Changed threshold to 96 degrees

21 Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 21 Energy transfer Energy transfer into the substrate with a 96 degree threshold Blowup on right shows variation at the maximum temperature

22 Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 22 Temperature plots across cycle Matrix format with selected time-slices

23 Yield Enhancement thru Modeling TEA Systems http://www.TEAsystems.com - 23 Plot matrix of temperature Thermal grid lines added

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