1. Review of Ion Beam Sputtering Ramin Lalezai ramin@atfilms.comramin@atfilms.com, voice: 720-494-4194 x-26 Advanced Thin Films, 105 S. Sunset St Suite G, Longmont, CO 80501.History of the Kaufman ion source.Early days of ion beam sputtering.The modern IBS machines.Characteristics of IBS optical coatings -environmental stability -losses -stress.Materials which can be deposited using IBS.”Intrinsic” contaminants in IBS films

2. Herman Oberth and the ABMA rocket team (Early 1950s)

5. Ion beam sputtering of optical coatings was invented by technologists at Litton in the early 1970s.

7. Technology Ion Beam Sputtering Dense films (not porous) Excellent adhesion Stable and durable No spectral shift Low loss Easy to clean Indefinite lifetime

8. Comparison of E-beam evaporated, IAD, and IBS coatings E-beam: Porous. Columnar structure. High scatter. Poor environmental stability. IAD: Increased density. Reduced porosity. High stress. Improved environmental stability. IBS: Dense films. Minimal structure. Low scatter. No porosity. Excellent environmental stability

9. Spectral shift due to moisture (%). Stress coefficient of mirror coatings (MPa).

11. λmaterialSubsTrans ppm Total loss ppmA&S ppmmeasured by 308nmHfO2ATF12601795535Mark YeoCU 369nmTa2O5ATF-2.5cm230362132Andrew GrierMITV4-664 369nmTa2O5ATF-10cm23030273Andrew GrierMIT 405nmTa2O5ATF153924Steve BrownNOAA 514nmTa2O5ATF6104Steve BrownNOAA 635nmTa2O5ATF484RLATFV5-1 qualification 698nmTa2O5GO462RLATF V3-320 JILA Cavity 852nmTa2O5ATF&REO0.42.1<2Tracy NorthupCal Tech 1064nmTa2O5GO73?<0.5*LIGO* Absorption only 1392nmTa2O5ATF43632TigerRegular Process 1392nmTa2O5ATF473TigerLow water films Measured Losses

12. Materials which can be grown using IBS Most oxides Ta2O5, Nb2O5, V2O5, TiO2, ZrO2, HfO2, Al2O3,Y2O3, SiO2, … Most nitrides Si3N4, AlN, TiN, … Most elements Si, Al, Pt, … IBS is generally not suitable for the deposition of fluorides and zinc compounds.

13. Intrinsic Contaminants in IBS Films 1- Argon (working gas) 2- Water (typically the last element in the vacuum system)