1. Welcome to Lawrence Berkeley National Laboratory Workshop on Energy Saving Opportunities in Cleanrooms March 15, 1999 Environmental Energy Technologies Division

2. A Word About Attendees Environmental Energy Technologies Division Research Semiconductor Biotechnology National Laboratories Tool Manufacturers Design Firms Energy Analysis Firms Utilities Sponsors

3. A Word About Our Sponsors Environmental Energy Technologies Division California Institute for Energy Efficiency California Energy Commission

4. Purpose of Today’s Workshop Environmental Energy Technologies Division Increase Awareness of Energy Efficiency Opportunities Share Information Help Develop Research/Market Transformation Agenda Identify and Eliminate Barriers Add Value to Industry’s Energy Reduction Efforts

5. Goals for the Workshop Environmental Energy Technologies Division Open Exchange of Information Stimulate Further Action Expand Network for Energy Efficiency Recognize Successful Case Studies New Ideas for Advancements Establish Collaboration Partners

6. Today’s Agenda Environmental Energy Technologies Division 8:00-8:30Arrive at parking garage/Shuttle to lab 8:30-8:45Welcome/Workshop Goals 8:45-9:15Introduction/Logistics 9:15-9:45Energy Efficiency Opportunity/Benchmarking 9:45-10:00Break 10:00-11:40Case Studies 11:40-1:00Lunch 1:00-1:50Case Studies 1:50-2:45Barriers to Implementing Improvements 2:45-3:00Break 3:00-3:45Research/Market Transformation Needs 3:40-4:00LBNL Research 4:00-5:00 Lab Demonstrations (optional) Tour A – Low flow fume hood/wet bench technology Tour B – Cleanroom lighting concepts