1. Thorium Dioxide (ThO2) And Its Optical Constants in The Extreme Ultraviolet Elise Martin & David Muhlestein

2. Astronomy http://science.nasa.gov/ssl/pad/solar/images/solar-b3.jpg The sun in the Extreme Ultraviolet

3. Plasma Diagnostics UC Davis Plasma Diagnostic Group (PDG) http://tempest.das.ucdavis.edu/pdg/

4. Other Uses Photolithography Photolithography Microscopy Microscopy http://www.microscopy-uk.org.uk/mag/imgoct02/486test.jpg

5. The Sputtering Process

6. Berkeley, California Berkeley Provo

7. Fitting

8. Bad Fit

9. Good Fit

10. The Index of Refraction δ =1-n=real part of index of refraction affects wavelength affects wavelength β =k =imaginary part of index of refraction affects attenuation affects attenuation

11. Attenuation due to β

12. Delta vs. Wavelength

13. Beta vs. Wavelength

14. Why is ThO 2 important? - Small β and small δ means ThO 2 makes a good spacer layer for multilayer mirrors - Easily made compared to other materials

15. Acknowledgements Niki Farnsworth Niki Farnsworth Dr. Steven Turley Dr. Steven Turley Dr. David Allred Dr. David Allred The BYU Thin Films Research Group The BYU Thin Films Research Group The Advanced Light Source The Advanced Light Source