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MS 18 Feb 2008 CMOS group meeting1 Failure analysis of the MimoSTAR3 prototype investigation performed at LBL.

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Presentation on theme: "MS 18 Feb 2008 CMOS group meeting1 Failure analysis of the MimoSTAR3 prototype investigation performed at LBL."— Presentation transcript:

1 MS 18 Feb 2008 CMOS group meeting1 Failure analysis of the MimoSTAR3 prototype investigation performed at LBL

2 MS 18 Feb 2008 CMOS group meeting2 Selected cross-sections

3 MS 18 Feb 2008 CMOS group meeting3 Selected pixels

4 MS 18 Feb 2008 CMOS group meeting4 Cross sections with FIB

5 MS 18 Feb 2008 CMOS group meeting5 Cross sections with FIB Metal 4 Metal 3 Metal 2 Metal 1 Diode power supply Connection to the source follower transistor Gate oxide surrounding the diode

6 MS 18 Feb 2008 CMOS group meeting6 Cross section through vias connecting the power supply to the forward biased diode (left stack) and the charge collecting node with the source follower transistor (right stack) CornerCenter

7 MS 18 Feb 2008 CMOS group meeting7 The cross section through vias connecting the charge collecting node (left stack) with the source follower transistor (right stack) CornerCenter

8 MS 18 Feb 2008 CMOS group meeting8 Cross section through vias connecting the power supply to the forward biased diode (left stack) and the charge collecting node to the input of the source follower transistor (right stack). Corner Center

9 MS 18 Feb 2008 CMOS group meeting9 Summary CornerCenter Report: http://rnc.lbl.gov/hft/hardware/docs/mimostar3_cross_sections/MimoSTAR3_cross_sections_v2.pdf http://rnc.lbl.gov/hft/hardware/docs/mimostar3_cross_sections/MimoSTAR3_cross_sections_v2.pdf The complete set of 66 pictures : http://rnc.lbl.gov/hft/hardware/docs/mimostar3_cross_sections/1/index.html http://rnc.lbl.gov/hft/hardware/docs/mimostar3_cross_sections/2/index.html http://rnc.lbl.gov/hft/hardware/docs/mimostar3_cross_sections/3/index.html http://rnc.lbl.gov/hft/hardware/docs/mimostar3_cross_sections/1/index.html http://rnc.lbl.gov/hft/hardware/docs/mimostar3_cross_sections/2/index.html http://rnc.lbl.gov/hft/hardware/docs/mimostar3_cross_sections/3/index.html Vias are the same size Different distance between metal layers

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